Patents by Inventor Katherina Konjuh

Katherina Konjuh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Surface treatment of antireflective layer in chemical vapor deposition process
    Patent number: 6051282
    Abstract: In a chemical vapor deposition process a surface layer is formed on an antireflective layer to prevent amines in the antireflective layer from neutralizing acid components formed during the exposure of an overlying photoresist layer. The surface layer is formed by introducing an oxygen-containing gas such as N.sub.2 O into the CVD chamber in the presence of radio frequency power, after the antireflective layer has been formed.
    Type: Grant
    Filed: June 4, 1998
    Date of Patent: April 18, 2000
    Assignee: Novellus Systems, Inc.
    Inventors: Katherina Konjuh, Wilbert G. M. van den Hoek