Patents by Inventor Katherine Giles

Katherine Giles has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for forming a film on a substrate
    Patent number: 7309662
    Abstract: This invention relates to a method and apparatus for forming a film on the substrate. The method comprises supplying to the chamber in gaseous or vapor form a silicon containing organic compound and an oxidizing agent in the presence of a plasma to deposit a film on the substrate and setting the film such that carbon containing groups are retained therein. In particular embodiments the setting is achieved by exposing the film to H2 plasma.
    Type: Grant
    Filed: June 26, 2000
    Date of Patent: December 18, 2007
    Assignee: Aviza Europe Limited
    Inventors: Katherine Giles, Knut Beekmann, Christopher David Dobson, John MacNeil, Antony Paul Wilby
  • Forming low k dielectric layers
    Patent number: 7205246
    Abstract: A low k dielectric layer is formed by depositing an unset dielectric layer on a substrate, the dielectric layer including Silicon, Carbon and Oxygen. The surface of the dielectric layer exposed to an activated gas to form a semi-permeable skin on or of the surface of the layer. The layer is then cured to render at least part of the layer porous.
    Type: Grant
    Filed: November 18, 2002
    Date of Patent: April 17, 2007
    Assignee: Aviza Technology Limited
    Inventors: John MacNeil, Sajid Ishaq, Hervé Gris, Katherine Giles
  • Forming low k dielectric layers
    Publication number: 20030124870
    Abstract: A low k dielectric layer is formed by depositing an unset dielectric layer on a substrate, the dielectric layer including Silicon, Carbon and Oxygen. The surface of the dielectric layer exposed to an activated gas to form a semi-permeable skin on or of the surface of the layer. The layer is then cured to render at least part of the layer porous.
    Type: Application
    Filed: November 18, 2002
    Publication date: July 3, 2003
    Inventors: John Macneil, Sajid Ishaq, Herve Gris, Katherine Giles