Patents by Inventor Kathleen Early

Kathleen Early has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Backside wafer polishing for improved photolithography
    Patent number: 5780204
    Abstract: The accuracy of photolithographic processing, particularly in forming small diameter through holes and/or trenches in a dielectric layer, is improved by polishing the wafer backside prior to photolithography. It was found that particles adhering to and/or scratches on the wafer backside resulting from prior processing steps cause inaccurate photolithographic processing, particularly at a submicron level. Backside polishing, as by chemical-/mechanical polishing, removes such adhering particles and/or scratches, thereby improving photolithographic accuracy.
    Type: Grant
    Filed: February 3, 1997
    Date of Patent: July 14, 1998
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Tho Le La, Subramanian Venkatkrishnan, Mark T. Ramsbey, Jack F. Thomas, Kathleen Early