Patents by Inventor Kathleen Keay

Kathleen Keay has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for electronic diagnostics of a process vacuum environment
    Publication number: 20070043534
    Abstract: In one embodiment according to the invention, there is disclosed a method of identifying a source of a vacuum quality problem in a vacuum environment associated with a tool. The method comprises gathering and storing vacuum environment data; identifying an anomaly within the vacuum environment; determining a tool component operating state when the anomaly likely occurred; and determining the source of the vacuum quality problem based on a state of the vacuum environment when the anomaly likely occurred and the tool component operating state when the anomaly likely occurred.
    Type: Application
    Filed: August 18, 2005
    Publication date: February 22, 2007
    Inventors: Joseph Arruda, Kathleen Keay, Glen Gilchrist