Patents by Inventor Kathryn P. Ta

Kathryn P. Ta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and methods for measuring chemical concentrations of a plating solution
    Patent number: 7851222
    Abstract: An electrochemical plating system, which includes one or more plating cell reservoirs for storing plating solution and a chemical analyzer in fluidic communication with the one or more plating cell reservoirs. The chemical analyzer is configured to measure chemical concentrations of the plating solution. The plating system further includes a plumbing system configured to facilitate the fluidic communication between the one or more plating cell reservoirs and the chemical analyzer and to substantially isolate the chemical analyzer from electrical noise generated by one or more plating cells of the one or more plating cell reservoirs.
    Type: Grant
    Filed: July 26, 2005
    Date of Patent: December 14, 2010
    Assignee: Applied Materials, Inc.
    Inventors: Alexander F. Hoermann, Yevgeniy Rabinovich, Kathryn P. Ta