Patents by Inventor Katie HORE

Katie HORE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor etching methods
    Patent number: 11961773
    Abstract: A method of etching into a one or more epitaxial layers of respective semiconductor material(s) in a vertical cavity surface emitting laser (VCSEL) semiconductor structure, wherein the or each semiconductor material is a III-V semiconductor material, a III-N semiconductor material, or a II-VI semiconductor material is disclosed. The method comprises placing a substrate having the semiconductor structure thereon onto a support table in a plasma processing chamber, the semiconductor structure carrying a patterned mask on the surface of the semiconductor structure distal from the support table.
    Type: Grant
    Filed: July 17, 2019
    Date of Patent: April 16, 2024
    Inventors: Ligang Deng, Katie Hore
  • SEMICONDUCTOR ETCHING METHODS
    Publication number: 20210296187
    Abstract: A method of etching into a one or more epitaxial layers of respective semiconductor material(s) in a vertical cavity surface emitting laser (VCSEL) semiconductor structure, wherein the or each semiconductor material is a III-V semiconductor material, a III-N semiconductor material, or a II-VI semiconductor material is disclosed. The method comprises placing a substrate having the semiconductor structure thereon onto a support table in a plasma processing chamber, the semiconductor structure carrying a patterned mask on the surface of the semiconductor structure distal from the support table.
    Type: Application
    Filed: July 17, 2019
    Publication date: September 23, 2021
    Inventors: Ligang DENG, Katie HORE