Patents by Inventor Katja Grundmann

Katja Grundmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for coating plate-shaped substrates
    Patent number: 6187158
    Abstract: A device for coating plate-shaped substrates by using cathode sputtering has several process chambers one after the other, each of which are bordered on the top by a chamber roof having in each case an opening. In this opening, which is covered at the top by a cathode arrangement, a frame is inserted. Screens and coolant lines of the process chamber are provided on the frame that can slide upwards out of the opening, projects into the process chamber, and is supported inside the opening of the chamber roof. A top of the cathode arrangement projects over the frame on the sides and is supported directly on the chamber roof so it seals it.
    Type: Grant
    Filed: July 30, 1999
    Date of Patent: February 13, 2001
    Assignee: Leybold Systems GmbH
    Inventors: Manfred Schuhmacher, Andreas Sauer, Katja Grundmann