Patents by Inventor Katrina Mikhay Iichenko

Katrina Mikhay Iichenko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cleaning Compound and Method and System for Using the Cleaning Compound
    Publication number: 20120145202
    Abstract: A cleaning compound is provided. The cleaning compound includes about 0.1 weight percent to about 10 weight percent of a fatty acid dispersed in water. The cleaning compound includes an amount of a base sufficient to bring a pH of the fatty acid water solution to about a level where above about 50% of the dispersed fatty acid is ionized. A method for cleaning a substrate, a system for cleaning a substrate, and a cleaning solution prepared by a process are also provided.
    Type: Application
    Filed: February 14, 2012
    Publication date: June 14, 2012
    Applicant: Lam Research Corporation
    Inventors: Erik M. Freer, John M. de Larios, Katrina Mikhay Iichenko, Michael Ravkin, Mikhail Korolik, Fred C. Redeker