Patents by Inventor Katrina Mikhaylichenko

Katrina Mikhaylichenko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150040947
    Abstract: An apparatus for cleaning a substrate is disclosed. The apparatus having a first head unit and a second head unit. The first head unit is positioned proximate to the surface of the substrate and has a first row of channels defined within configured to supply a foam to the surface of the substrate. The second head unit is positioned substantially adjacent to the first head unit and proximate to the surface of the substrate. A second and a third row of channels are defined within the second head unit. The second row of channels is configured to supply a fluid to the surface of the substrate. The third row of channels is configured to apply a vacuum to the surface of the substrate.
    Type: Application
    Filed: August 7, 2013
    Publication date: February 12, 2015
    Applicant: Lam Research Corporation
    Inventors: Erik M. Freer, John M. deLarios, Katrina Mikhaylichenko, Michael Ravkin, Mikhail Korolik, Fred C. Redeker, Clint Thomas, John Parks
  • Publication number: 20150040941
    Abstract: A method for cleaning a substrate is provided. The method initiates with disposing a fluid layer having solid components therein to a surface of the substrate. A shear force directed substantially parallel to the surface of the substrate and toward an outer edge of the substrate is then created. The shear force may result from a normal or tangential component of a force applied to a solid body in contact with the fluid layer in one embodiment. The surface of the substrate is rinsed to remove the fluid layer. A cleaning system and apparatus are also provided.
    Type: Application
    Filed: August 7, 2013
    Publication date: February 12, 2015
    Applicant: Lam Research Corporation
    Inventors: Erik M. Freer, John M. deLarios, Katrina Mikhaylichenko, Michael Ravkin, Mikhail Korolik, Fred C. Redeker
  • Patent number: 8757177
    Abstract: A first application of a cleaning material is made to a surface of a substrate. The cleaning material includes one or more viscoelastic materials for entrapping contaminants present on the surface of the substrate. A first application of a rinsing fluid is made to the surface of the substrate so as to rinse the cleaning material from the surface of the substrate. The first application of the rinsing fluid is also performed to leave a residual thin film of the rinsing fluid on the surface of the substrate. A second application of the cleaning material is made to the surface of the substrate having the residual thin film of rinsing fluid present thereon. A second application of the rinsing fluid is then made to the surface of the substrate so as to rinse the cleaning material from the surface of the substrate.
    Type: Grant
    Filed: November 6, 2012
    Date of Patent: June 24, 2014
    Assignee: Lam Research Corporation
    Inventors: Arnold Kholodenko, Katrina Mikhaylichenko, Cheng-Yu (Sean) Lin, Mark Wilcoxson, Leon Ginzburg, Mark Kawaguchi
  • Patent number: 8716210
    Abstract: Material for cleaning using a tri-state body are disclosed. A substrate having a particle deposited thereon is provided. A tri-state body that has a solid portion, liquid portion, and a gas portion is generated. A force is applied over the tri-state body to promulgate an interaction between the solid portion and the particle. The tri-state body is removed along with the particle from the surface of the substrate. The interaction between the solid portion and the particle causes the particle to be removed along with the tri-state body.
    Type: Grant
    Filed: November 17, 2010
    Date of Patent: May 6, 2014
    Assignee: Lam Research Corporation
    Inventors: Erik M. Freer, John M. de Larios, Katrina Mikhaylichenko, Michael Ravkin, Mikhail Korolik, Fred C. Redeker
  • Publication number: 20140116476
    Abstract: Systems for removing post etch polymer residue from etched surface includes a first proximity head to introduce a first cleaning chemistry as a first meniscus to a portion of the surface of the substrate so as to cover a length that extends to at least a diameter of the substrate and a first width that is less than the diameter of the substrate. A second proximity head is configured to introduce a second cleaning chemistry as a second meniscus to the portion so as to cover the length that extends to the diameter and a second width that is less than the diameter of the substrate. A substrate supporting device equipped with a motor coupled to a computing system is used to move the substrate supporting device under the first proximity head at a first linear speed and under the second proximity head at a second linear speed.
    Type: Application
    Filed: December 31, 2013
    Publication date: May 1, 2014
    Applicant: Lam Research Corporation
    Inventors: Katrina Mikhaylichenko, Yizhak Sabba, Dragan Podlesnik
  • Publication number: 20140059789
    Abstract: An apparatus for processing a substrate is provided. The apparatus includes a solid material having a support side and a contact side. The contact side has an outer surface, and the outer surface is configured to become softer relative to a remainder of the solid material when exposed to an activation solution. The apparatus includes a support structure configured to support the solid material from the support side of the solid material, such that the contact side of the solid material is oriented to face a surface of the substrate, when the substrate is present. Also provided is a gimbaled structure connected to the support structure. The gimbaled structure enabling the outer surface of the contact side to substantially align in a coplanar arrangement with the surface of the substrate, when the substrate is present. A force application structure is coupled to the gimbaled structure.
    Type: Application
    Filed: October 16, 2013
    Publication date: March 6, 2014
    Applicant: Lam Research Corporation
    Inventors: Erik M. Freer, John M. deLarios, Katrina Mikhaylichenko, Michael Ravkin, Mikhail Korolik, Fred C. Redeker
  • Patent number: 8652266
    Abstract: A system and method for removing polymer residue from around a metal gate structure formed on a surface of a substrate during a post-etch cleaning operation includes determining a plurality of process parameters associated with the metal gate structure and the polymer residue to be removed. A plurality of fabrication layers define the metal gate structure and the process parameters define characteristics of the fabrication layers and the polymer residue. A first cleaning chemistry and second cleaning chemistry are identified and a plurality of application parameters associated with the first and second cleaning chemistries are defined based on the process parameters. The first and second application chemistries are applied sequentially in a controlled manner using the application parameters to substantial remove the polymer residue while preserving the structural integrity of the gate structure.
    Type: Grant
    Filed: September 17, 2008
    Date of Patent: February 18, 2014
    Assignee: Lam Research Corporation
    Inventors: Katrina Mikhaylichenko, Yizhak Sabba, Dragan Podlesnik
  • Patent number: 8617993
    Abstract: A method is provided for treating the surface of high aspect ratio nanostructures to help protect the delicate nanostructures during some of the rigorous processing involved in fabrication of semiconductor devices. A wafer containing high aspect ratio nanostructures is treated to make the surfaces of the nanostructures more hydrophobic. The treatment may include the application of a primer that chemically alters the surfaces of the nanostructures preventing them from getting damaged during subsequent wet clean processes. The wafer may then be further processed, for example a wet cleaning process followed by a drying process. The increased hydrophobicity of the nanostructures helps to reduce or prevent collapse of the nanostructures.
    Type: Grant
    Filed: February 1, 2010
    Date of Patent: December 31, 2013
    Assignee: Lam Research Corporation
    Inventors: Amir A. Yasseri, Ji Zhu, Seokmin Yun, David S. L. Mui, Katrina Mikhaylichenko
  • Patent number: 8608859
    Abstract: A method is provided for removing contamination from a substrate. The method includes applying a cleaning solution having a dispersed phase, a continuous phase and particles dispersed within the continuous phase to a surface of the substrate. The method includes forcing one of the particles dispersed within the continuous phase proximate to one of the surface contaminants. The forcing is sufficient to overcome any repulsive forces between the particles and the surface contaminants so that the one of the particles and the one of the surface contaminants are engaged. The method also includes removing the engaged particle and surface contaminant from the surface of the substrate. A process to manufacture the cleaning material is also provided.
    Type: Grant
    Filed: April 27, 2010
    Date of Patent: December 17, 2013
    Assignee: Lam Research Corporation
    Inventors: Erik M. Freer, John M. deLarios, Katrina Mikhaylichenko, Michael Ravkin, Mikhail Korolik, Fred C. Redeker
  • Patent number: 8591662
    Abstract: A method for cleaning a substrate is provided. The method initiates with applying an activation solution to a surface of the substrate. The activation solution and the surface of the substrate are contacted with a surface of a solid cleaning surface. The activation solution is absorbed into a portion of the solid cleaning element and then the substrate or the solid cleaning surface is moved relative to each other to clean the surface of the substrate. A method for cleaning the surface of the substrate with a solid cleaning element that experiences plastic deformation is also provided. Corresponding cleaning apparatuses are also provided.
    Type: Grant
    Filed: October 26, 2012
    Date of Patent: November 26, 2013
    Assignee: Lam Research Corporation
    Inventors: Erik M. Freer, John deLarios, Katrina Mikhaylichenko, Michael Ravkin, Mikhail Korolik, Fred C. Redeker
  • Patent number: 8590550
    Abstract: A substrate holder is defined to support a substrate. A rotating mechanism is defined to rotate the substrate holder. An applicator is defined to extend over the substrate holder to dispense a cleaning material onto a surface of the substrate when present on the substrate holder. The applicator is defined to apply a downward force to the cleaning material on the surface of the substrate. In one embodiment the cleaning material is gelatinous.
    Type: Grant
    Filed: August 24, 2010
    Date of Patent: November 26, 2013
    Assignee: Lam Research Corporation
    Inventors: Mikhail Korolik, Erik M. Freer, John M. de Larios, Katrina Mikhaylichenko, Mike Ravkin, Fritz Redeker
  • Publication number: 20130284217
    Abstract: A substrate cleaning systems are provided. One system includes a proximity head system for applying a meniscus to a surface of a substrate during a cleaning operation. Also provided is a container for holding the solution, the solution being mixed from at least a continuous medium, a polymer material, and a solid material, the polymer material in the solution imparting a finite yield stress to the material, such that the solution is maintained in a stable elastic gel form. A pump coupled to the container is also provided for moving the solution from the container to the proximity head system, where the pump applies at least a minimum shear stress on the solution. The pump provides agitation that exceeds the finite yield stress causing the solution to flow. A conduit is provided between the container and the proximity head system.
    Type: Application
    Filed: June 28, 2013
    Publication date: October 31, 2013
    Inventors: Erik M. Freer, John M. de Larios, Michael Ravkin, Mikhail Korolik, Katrina Mikhaylichenko, Fred C. Redeker
  • Patent number: 8555903
    Abstract: A cleaning material is disposed over a substrate. The cleaning material includes solid components dispersed within a liquid medium. A force is applied to the solid components within the liquid medium to bring the solid components within proximity to contaminants present on the substrate. The force applied to the solid components can be exerted by an immiscible component within the liquid medium. When the solid components are brought within sufficient proximity to the contaminants, an interaction is established between the solid components and the contaminants. Then, the solid components are moved away from the substrate such that the contaminants having interacted with the solid components are removed from the substrate.
    Type: Grant
    Filed: November 17, 2009
    Date of Patent: October 15, 2013
    Assignee: Lam Research Corporation
    Inventors: Erik M. Freer, John M. de Larios, Katrina Mikhaylichenko, Michael Ravkin, Mikhail Korolik, Fred C. Redeker, Clint Thomas, John Parks
  • Patent number: 8522799
    Abstract: An apparatus for cleaning a substrate is disclosed. The apparatus having a first head unit and a second head unit. The first head unit is positioned proximate to the surface of the substrate and has a first row of channels defined within configured to supply a foam to the surface of the substrate. The second head unit is positioned substantially adjacent to the first head unit and proximate to the surface of the substrate. A second and a third row of channels are defined within the second head unit. The second row of channels is configured to supply a fluid to the surface of the substrate. The third row of channels is configured to apply a vacuum to the surface of the substrate.
    Type: Grant
    Filed: September 15, 2006
    Date of Patent: September 3, 2013
    Assignee: Lam Research Corporation
    Inventors: Erik M. Freer, John M. de Larios, Katrina Mikhaylichenko, Michael Ravkin, Mikhail Korolik, Fred C. Redeker, Clint Thomas, John Parks
  • Patent number: 8522801
    Abstract: A method for cleaning a substrate is provided. The method initiates with disposing a fluid layer having solid components therein to a surface of the substrate. A shear force directed substantially parallel to the surface of the substrate and toward an outer edge of the substrate is then created. The shear force may result from a normal or tangential component of a force applied to a solid body in contact with the fluid layer in one embodiment. The surface of the substrate is rinsed to remove the fluid layer. A cleaning system and apparatus are also provided.
    Type: Grant
    Filed: December 18, 2006
    Date of Patent: September 3, 2013
    Assignee: Lam Research Corporation
    Inventors: Erik M. Freer, John M. deLarios, Katrina Mikhaylichenko, Michael Ravkin, Mikhail Korolik, Fred C. Redeker
  • Patent number: 8480810
    Abstract: A method and system for cleaning a surface, having particulate matter thereon, of a substrate features impinging upon the surface a jet of a liquid having coupling elements entrained therein. A sufficient drag force is imparted upon the coupling elements to have the same move with respect to the liquid and cause the particulate matter to move with respect to the substrate.
    Type: Grant
    Filed: October 4, 2006
    Date of Patent: July 9, 2013
    Assignee: Lam Research Corporation
    Inventors: Erik M. Freer, John M. de Larios, Katrina Mikhaylichenko, Michael Ravkin, Mikhail Korolik, Fritz C. Redeker
  • Patent number: 8475599
    Abstract: A method for making a solution for use in preparing a surface of a substrate is provided. The method includes providing a continuous medium that adds a polymer material to the continuous medium. A fatty acid is adding to the continuous medium having the polymer material, and the polymer material defines a physical network that exerts forces in the solution that overcome buoyancy forces experienced by the fatty acid, thus preventing the fatty acids from moving within the solution until a yield stress of the polymer material is exceeded by an applied agitation. The applied agitation is from transporting the solution from a container to a preparation station that applies the solution to the surface of the substrate.
    Type: Grant
    Filed: December 18, 2006
    Date of Patent: July 2, 2013
    Assignee: Lam Research Corporation
    Inventors: Erik M. Freer, John M. de Larios, Michael Ravkin, Mikhail Korolik, Katrina Mikhaylichenko, Fritz C. Redeker
  • Patent number: 8440573
    Abstract: A method is provided for processing a wafer used in fabricating semiconductor devices. The method can comprise forming high-aspect ratio features on the wafer, which is followed by wet processing and drying. During drying, pattern collapse can occur. This pattern collapse can be repaired to allow for additional processing of the wafer. In some instance, pattern collapse can be repaired via etching where the etching breaks bonds that can have formed during pattern collapse.
    Type: Grant
    Filed: January 26, 2010
    Date of Patent: May 14, 2013
    Assignee: Lam Research Corporation
    Inventors: Katrina Mikhaylichenko, Denis Syomin, Qian Fu, Glenn W. Gale, Shenjian Liu, Mark H. Wilcoxson
  • Publication number: 20130068261
    Abstract: A first application of a cleaning material is made to a surface of a substrate. The cleaning material includes one or more viscoelastic materials for entrapping contaminants present on the surface of the substrate. A first application of a rinsing fluid is made to the surface of the substrate so as to rinse the cleaning material from the surface of the substrate. The first application of the rinsing fluid is also performed to leave a residual thin film of the rinsing fluid on the surface of the substrate. A second application of the cleaning material is made to the surface of the substrate having the residual thin film of rinsing fluid present thereon. A second application of the rinsing fluid is then made to the surface of the substrate so as to rinse the cleaning material from the surface of the substrate.
    Type: Application
    Filed: November 6, 2012
    Publication date: March 21, 2013
    Inventors: Arnold Kholodenko, Katrina Mikhaylichenko, Cheng-Yu (Sean) Lin, Mark Wilcoxson, Leon Ginzburg, Mark Kawaguchi
  • Publication number: 20130048021
    Abstract: A method for cleaning a substrate is provided. The method initiates with applying an activation solution to a surface of the substrate. The activation solution and the surface of the substrate are contacted with a surface of a solid cleaning surface. The activation solution is absorbed into a portion of the solid cleaning element and then the substrate or the solid cleaning surface is moved relative to each other to clean the surface of the substrate. A method for cleaning the surface of the substrate with a solid cleaning element that experiences plastic deformation is also provided. Corresponding cleaning apparatuses are also provided.
    Type: Application
    Filed: October 26, 2012
    Publication date: February 28, 2013
    Inventors: Erik M. Freer, John deLarios, Katrina Mikhaylichenko, Michael Ravkin, Mikhail Korolik, Fred C. Redeker