Patents by Inventor Katsuaki Usui

Katsuaki Usui has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200109712
    Abstract: An information processing apparatus detecting presence or absence of abnormality of a vacuum pump derived from a product produced within a target vacuum pump, including: a determination unit configured to determine a normal variation range or a normal time variation behavior of a target state quantity which is a state quantity varying depending on a load of gas flowing into the vacuum pump, based on at least one of past target state quantities of the target vacuum pump or another vacuum pump; and a comparison unit configured to compare a current target state quantity of the target vacuum pump with the normal variation range or the normal time variation behavior and output the comparison result.
    Type: Application
    Filed: March 13, 2018
    Publication date: April 9, 2020
    Inventors: Keiji Maishigi, Tetsuro Sugiura, Katsuaki Usui, Masahiro Hatakeyama, Chikako Honma, Toru Osuga, Koichi Iwasaki, Jie Yuan Lin
  • Patent number: 8251678
    Abstract: The present invention relates to a dry vacuum pump unit capable of achieving ultimate pressure of about 1 Pa. The vacuum pump unit includes a main pump (15) disposed at an outside-pressure side, and a booster pump (16) disposed at a vacuum side. The booster pump (16) and the main pump (15) are coupled in series. The booster pump (16) has a higher pumping speed than that of the main pump (15). Each of the main pump (15) and the booster pump (16) includes a pair of pump rotors (52a and 52b), a casing (50) having an inlet port and an outlet port, and a pair of magnet rotors (54 and 54) rotatable with the pair of pump rotors.
    Type: Grant
    Filed: January 29, 2007
    Date of Patent: August 28, 2012
    Assignee: Ebara Corporation
    Inventors: Takashi Hozumi, Nobuhito Miyashita, Takanori Inada, Kozo Matake, Yoshinori Ojima, Susumu Miyake, Katsuaki Usui
  • Publication number: 20090047142
    Abstract: The present invention relates to a dry vacuum pump unit capable of achieving ultimate pressure of about 1 Pa. The vacuum pump unit includes a main pump (15) disposed at an outside-pressure side, and a booster pump (16) disposed at a vacuum side. The booster pump (16) and the main pump (15) are coupled in series. The booster pump (16) has a higher pumping speed than that of the main pump (15). Each of the main pump (15) and the booster pump (16) includes a pair of pump rotors (52a and 52b), a casing (50) having an inlet port and an outlet port, and a pair of magnet rotors (54 and 54) rotatable with the pair of pump rotors.
    Type: Application
    Filed: January 29, 2007
    Publication date: February 19, 2009
    Applicants: EBARA DENSAN LTD., EBARA CORPORATION
    Inventors: Takashi Hozumi, Nobuhito Miyashita, Takanori Inada, Kozo Matake, Yoshinori Ojima, Susumu Miyake, Katsuaki Usui
  • Patent number: 7360454
    Abstract: A flowmeter can measure a small flow rate of fluid with high measurement precision, can be made small-sized, can deal with a variety of types of chemicals, and can be produced easily at a low cost. The flowmeter includes: a casing having an enlarged portion and being disposed vertically; and a float enclosed in the enlarged portion of the casing and at least partly having a detection surface. The float is to be pushed up by a fluid flowing from below into the casing and flowing upwardly in the casing. The flowmeter also includes at least one displacement sensor, disposed outside the enlarged portion of the casing, for detecting an axial displacement of the float by magnetizing the detection surface of the float.
    Type: Grant
    Filed: May 5, 2006
    Date of Patent: April 22, 2008
    Assignee: Ebara Corporation
    Inventors: Hiroyasu Kawashima, Hiroaki Ogamino, Katsuaki Usui, Toshiharu Nakazawa
  • Publication number: 20070048145
    Abstract: A vacuum evacuation device 2 of the invention comprises a vacuum pump 4,5 for exhausting a gas G2 in a process chamber 21 into which a process gas G1 is introduced and in which a process reaction is performed, to form a vacuum in said process chamber 21; and a control means 6 for performing a first control that regulates the rotational speed of said vacuum pump 4,5 such that a pressure condition in said process chamber 21 reaches a pressure condition suitable for said process reaction during said process reaction, wherein said control means 6 calculates a specified rotational speed for said vacuum pump 4,5 based on process information related to said process reaction, and performs a second control that brings said vacuum pump 4,5 to said specified rotational speed before said first control. The vacuum evacuation device 2 is capable of bringing the pressure in a process chamber 21 to the target pressure in a short period without a vacuum pump 4,5 being overloaded, regardless of the process reaction condition.
    Type: Application
    Filed: August 10, 2006
    Publication date: March 1, 2007
    Inventors: Katsutoshi Ishii, Ken Nakao, Takanobu Asano, Kota Umezawa, Hiroaki Ogamino, Tadashi Urata, Katsuaki Usui, Masafumi Inoue, Shinichi Sekiguchi, Hironobu Yamasaki
  • Publication number: 20060254368
    Abstract: A flowmeter can measure a small flow rate of fluid with high measurement precision, can be made small-sized, can deal with a variety of types of chemicals, and can be produced easily at a low cost. The flowmeter including: a casing having an enlarged portion and disposed vertically; a float, enclosed in the enlarged portion of the casing and at least partly having a detection surface, which is to be pushed up by a fluid flowing from below into the casing and flowing upwardly in the casing; and at least one displacement sensor, disposed outside the enlarged portion of the casing, for detecting an axial displacement of the float by magnetizing the detection surface of the float.
    Type: Application
    Filed: May 5, 2006
    Publication date: November 16, 2006
    Inventors: Hiroyasu Kawashima, Hiroaki Ogamino, Katsuaki Usui, Toshiharu Nakazawa
  • Publication number: 20040213686
    Abstract: A multishaft electric motor has a plurality of juxtaposed rotors having respective permanent magnets disposed therearound, and a plurality of sets of armature elements disposed fully circumferentially around the rotors, respectively, the permanent magnets of adjacent two of the rotors having a plurality of pairs of unlike magnetic poles for magnetically coupling the rotors through the armature elements between the permanent magnets. A positive-displacement vacuum pump includes a casing, a pair of pump rotors rotatably disposed in the casing in confronting relation to each other, and a two-shaft electric motor coupled to the pump rotors for rotating the pump rotors in opposite directions. The two-shaft electric motor may comprise a pair of juxtaposed rotors and a pair of sets of armature elements disposed fully circumferentially around the rotors, respectively.
    Type: Application
    Filed: May 24, 2004
    Publication date: October 28, 2004
    Applicant: EBARA CORPORATION
    Inventors: Yoshinori Ojima, Kozo Matake, Genichi Sato, Yasushi Hisabe, Masami Nagayama, Katsuaki Usui, Hiroaki Ogamino
  • Patent number: 6761542
    Abstract: A multishaft electric motor has a plurality of juxtaposed rotors having respective permanent magnets disposed therearound, and a plurality of sets of armature elements disposed fully circumferentially around the rotors, respectively, the permanent magnets of adjacent two of the rotors having a plurality of pairs of unlike magnetic poles for magnetically coupling the rotors through the armature elements between the permanent magnets. A positive-displacement vacuum pump includes a casing, a pair of pump rotors rotatably disposed in the casing in confronting relation to each other, and a two-shaft electric motor coupled to the pump rotors for rotating the pump rotors in opposite directions. The two-shaft electric motor may comprise a pair of juxtaposed rotors and a pair of sets of armature elements disposed fully circumferentially around the rotors, respectively.
    Type: Grant
    Filed: July 16, 2002
    Date of Patent: July 13, 2004
    Assignee: Ebara Corporation
    Inventors: Yoshinori Ojima, Kozo Matake, Genichi Sato, Yasushi Hisabe, Masami Nagayama, Katsuaki Usui, Hiroaki Ogamino
  • Publication number: 20020172599
    Abstract: A multishaft electric motor has a plurality of juxtaposed rotors having respective permanent magnets disposed therearound, and a plurality of sets of armature elements disposed fully circumferentially around the rotors, respectively, the permanent magnets of adjacent two of the rotors having a plurality of pairs of unlike magnetic poles for magnetically coupling the rotors through the armature elements between the permanent magnets. A positive-displacement vacuum pump includes a casing, a pair of pump rotors rotatably disposed in the casing in confronting relation to each other, and a two-shaft electric motor coupled to the pump rotors for rotating the pump rotors in opposite directions. The two-shaft electric motor may comprise a pair of juxtaposed rotors and a pair of sets of armature elements disposed fully circumferentially around the rotors, respectively.
    Type: Application
    Filed: July 16, 2002
    Publication date: November 21, 2002
    Applicant: EBARA CORPORATION
    Inventors: Yoshinori Ojima, Kozo Matake, Genichi Sato, Yasushi Hisabe, Masami Nagayama, Katsuaki Usui, Hiroaki Ogamino
  • Patent number: 6474949
    Abstract: An apparatus for and a method of evacuating a vacuum chamber (process chamber) or the like of a semiconductor fabrication facility, for example. The evacuating apparatus has a vacuum chamber to be evacuated, a discharge pipe connecting the vacuum chamber to an atmospheric port, a vacuum pump connected to the discharge pipe and operable at a variable rotational speed, and a controller for controlling the rotational speed of the vacuum pump.
    Type: Grant
    Filed: November 20, 2000
    Date of Patent: November 5, 2002
    Assignee: Ebara Corporation
    Inventors: Satoshi Arai, Katsuaki Usui, Takahiro Isozaki
  • Patent number: 6447271
    Abstract: A multishaft electric motor has a plurality of juxtaposed rotors having respective permanent magnets disposed therearound, and a plurality of sets of armature elements disposed fully circumferentially around the rotors, respectively, the permanent magnets of adjacent two of the rotors having a plurality of pairs of unlike magnetic poles for magnetically coupling the rotors through the armature elements between the permanent magnets. A positive-displacement vacuum pump includes a casing, a pair of pump rotors rotatably disposed in the casing in confronting relation to each other, and a two-shaft electric motor coupled to the pump rotors for rotating the pump rotors in opposite directions. The two-shaft electric motor may comprise a pair of juxtaposed rotors and a pair of sets of armature elements disposed fully circumferentially around the rotors, respectively.
    Type: Grant
    Filed: December 11, 2000
    Date of Patent: September 10, 2002
    Assignee: Ebara Corporation
    Inventors: Yoshinori Ojima, Kozo Matake, Genichi Sato, Yasushi Hisabe, Masami Nagayama, Katsuaki Usui, Hiroaki Ogamino
  • Publication number: 20010000722
    Abstract: A multishaft electric motor has a plurality of juxtaposed rotors having respective permanent magnets disposed therearound, and a plurality of sets of armature elements disposed fully circumferentially around the rotors, respectively, the permanent magnets of adjacent two of the rotors having a plurality of pairs of unlike magnetic poles for magnetically coupling the rotors through the armature elements between the permanent magnets. A positive-displacement vacuum pump includes a casing, a pair of pump rotors rotatably disposed in the casing in confronting relation to each other, and a two-shaft electric motor coupled to the pump rotors for rotating the pump rotors in opposite directions. The two-shaft electric motor may comprise a pair of juxtaposed rotors and a pair of sets of armature elements disposed fully circumferentially around the rotors, respectively.
    Type: Application
    Filed: December 11, 2000
    Publication date: May 3, 2001
    Applicant: EBARA CORPORATION
    Inventors: Yoshinori Ojima, Kozo Matake, Genichi Sato, Yasushi Hisabe, Masami Nagayama, Katsuaki Usui, Hiroaki Ogamino
  • Patent number: 6183218
    Abstract: A multishaft electric motor has a plurality of juxtaposed rotors having respective permanent magnets disposed therearound, and a plurality of sets of armature elements disposed fully circumferentially around the rotors, respectively, the permanent magnets of adjacent two of the rotors having a plurality of pairs of unlike magnetic poles for magnetically coupling the rotors through the armature elements between the permanent magnets. A positive-displacement vacuum pump includes a casing, a pair of pump rotors rotatably disposed in the casing in confronting relation to each other, and a two-shaft electric motor coupled to the pump rotors for rotating the pump rotors in opposite directions. The two-shaft electric motor may comprise a pair of juxtaposed rotors and a pair of sets of armature elements disposed fully circumferentially around the rotors, respectively.
    Type: Grant
    Filed: July 30, 1998
    Date of Patent: February 6, 2001
    Assignee: Ebara Corporation
    Inventors: Yoshinori Ojima, Kozo Matake, Genichi Sato, Yasushi Hisabe, Masami Nagayama, Katsuaki Usui, Hiroaki Ogamino
  • Patent number: 6164945
    Abstract: A rotor has an interior free from invasion of water and is resistant to deformation from applied stresses normally encountered during the operation of a vacuum pump. The rotor comprises a rotor shell formed to conform to an outline of lobes and side-plates for covering transverse ends of the rotor shell. A rotation shaft is secured to the side-plates. A hollow section is formed by the rotor shell and the side-plates which is under a vacuum environment.
    Type: Grant
    Filed: January 3, 2000
    Date of Patent: December 26, 2000
    Assignee: Ebara Corporation
    Inventors: Yoshimitsu Ishibashi, Katsuaki Usui, Satoshi Arai
  • Patent number: 6088508
    Abstract: A vacuum pump for use in an evacuating system for a semiconductor fabrication apparatus is operated at a steady rotational speed to evacuate the semiconductor fabrication apparatus. Then, in response to a signal indicative of an operating state of the semiconductor fabrication apparatus which does not need to be evacuated, the rotational speed of the vacuum pump is reduced to an idling rotational speed, thereby to lower electric energy consumption by the vacuum pump.
    Type: Grant
    Filed: August 28, 1998
    Date of Patent: July 11, 2000
    Assignee: Ebara Corporation
    Inventors: Yoshimitsu Ishibashi, Katsuaki Usui
  • Patent number: 5816782
    Abstract: A multistage positive-displacement vacuum pump which is preferably used in the fabrication of semiconductor devices and can be operated from atmospheric pressure. The vacuum pump comprises a pump casing, a pump assembly housed in the pump casing and comprising a pair of pump rotors rotatable in synchronism with each other and arranged in multiple stages, and an intermediate pressure chamber provided between a preceding stage and a subsequent stage in the pump casing. The shaft portions of the pump rotors located between the preceding and subsequent stages are located in the intermediate pressure chamber.
    Type: Grant
    Filed: September 2, 1997
    Date of Patent: October 6, 1998
    Assignee: Ebara Corporation
    Inventors: Masami Nagayama, Katsuaki Usui, Hiroaki Ogamino
  • Patent number: 5814913
    Abstract: A multishaft electric motor has a plurality of juxtaposed rotors having respective permanent magnets disposed therearound, and a plurality of sets of armature elements disposed fully circumferentially around the rotors, respectively, the permanent magnets of adjacent two of the rotors having a plurality of pairs of unlike magnetic poles for magnetically coupling the rotors through the armature elements between the permanent magnets. A positive-displacement vacuum pump includes a casing, a pair of pump rotors rotatably disposed in the casing in confronting relation to each other, and a two-shaft electric motor coupled to the pump rotors for rotating the pump rotors in opposite directions. The two-shaft electric motor may comprise a pair of juxtaposed rotors and a pair of sets of armature elements disposed fully circumferentially around the rotors, respectively.
    Type: Grant
    Filed: April 20, 1995
    Date of Patent: September 29, 1998
    Assignee: Ebara Corporation
    Inventors: Yoshinori Ojima, Kozo Matake, Genichi Sato, Yasushi Hisabe, Masami Nagayama, Katsuaki Usui, Hiroaki Ogamino
  • Patent number: 5779453
    Abstract: A vacuum pump has a pump casing having a suction side where a suction port is located and a discharge side where a discharge port is located, a pump assembly housed in the pump casing and comprising a pair of pump rotors rotatable in synchronism with each other and having respective shafts, and a brushless direct-current motor mounted on the pump casing at a suction side of the pump casing. The motor has a pair of motor rotors comprising respective sets of permanent magnets which are mounted respectively on the shafts, a pair of cans surrounding outer circumferential and end surfaces of the motor rotors in sealing relation to the pump assembly, a motor stator mounted on the cans and housed in a water-cooled motor frame.
    Type: Grant
    Filed: January 3, 1997
    Date of Patent: July 14, 1998
    Assignee: Ebara Corporation
    Inventors: Masami Nagayama, Katsuaki Usui, Kozo Matake, Yoshinori Ojima, Genichi Sato, Yasushi Hisabe
  • Patent number: 5641054
    Abstract: A magnetic levitation conveyor apparatus has levitation electromagnets, linear motors, and displacement sensors which are disposed outside of a tunnel, and a carriage of simple structure which is movable in the tunnel. The carriage is of canned structure for preventing gases from being generated. The carriage of canned structure allows the tunnel to have a reduced cross-sectional area and to be filled with a highly purified atmosphere such as of a high vacuum. The tunnel has substantially orthogonal branches at a branched point. In the branched point, the carriage can move, while being lifted out of contact with the tunnel partition, with a directional change from a main conveyor passage into a branched conveyor passage. The magnetic levitation conveyor apparatus is highly practical as it can control the carriage to be lifted and moved as described above.
    Type: Grant
    Filed: March 7, 1995
    Date of Patent: June 24, 1997
    Assignee: Ebara Corporation
    Inventors: Satoshi Mori, Masao Matsumura, Yoichi Kanemitsu, Takeshi Yoshioka, Masaaki Kajiyama, Fumio Kondo, Yuji Shirao, Masato Eguchi, Hiroyuki Shinozaki, Yukio Ikeda, Masayoshi Hirose, Masaru Nakaniwa, Norio Kimura, Katsuaki Usui, Katsuyuki Aoki
  • Patent number: 4943214
    Abstract: A two-shaft rotary machine for use in a vacuum pump system includes rotors having a specific profile whereby any vibration and noise generated by the machine is minimized and its efficiency is increased. The number of lobes of each rotor is three or more. The tip and root portions of each rotor are defined by circular arcs, respectively, which are made smoothly continuous with each other through an involute curve. The ratio of the diameter of the tip circle to the diameter of the root circle is selected to fall within a range which is given by a specific expression.
    Type: Grant
    Filed: December 15, 1989
    Date of Patent: July 24, 1990
    Assignee: Ebara Corporation
    Inventors: Yoshihiro Niimura, Ritsuo Kikuta, Katsuaki Usui