Abstract: A pedestal pad (workpiece supporting table pad) is arranged on the top of a pedestal (workpiece supporting table) for temporarily placing and holding a pre-polished or post-polished wafer (workpiece). This pedestal pad is formed of resin, and at least a surface of the pedestal pad which comes into contact with the wafer is non-absorbable to a fluid. The tissue of the pedestal pad is dense and smooth, and does not have any cavity, such as fine holes, which holds the fluid.

Abstract: A pedestal pad (workpiece supporting table pad) is arranged on the top of a pedestal (workpiece supporting table) for temporarily placing and holding a pre-polished or post-polished wafer (workpiece). This pedestal pad is formed of resin, and at least a surface of the pedestal pad which comes into contact with the wafer is non-absorbable to a fluid. The tissue of the pedestal pad is dense and smooth, and does not have any cavity, such as fine holes, which holds the fluid.

Abstract: A pedestal pad (workpiece supporting table pad) is arranged on the top of a pedestal (workpiece supporting table) for temporarily placing and holding a pre-polished or post-polished wafer (workpiece). This pedestal pad is formed of resin, and at least a surface of the pedestal pad which comes into contact with the wafer is non-absorbable to a fluid. The tissue of the pedestal pad is dense and smooth, and does not have any cavity, such as fine holes, which holds the fluid.

Abstract: A pedestal pad (workpiece supporting table pad) is arranged on the top of a pedestal (workpiece supporting table) for temporarily placing and holding a pre-polished or post-polished wafer (workpiece). This pedestal pad is formed of resin, and at least a surface of the pedestal pad which comes into contact with the wafer is non-absorbable to a fluid. The tissue of the pedestal pad is dense and smooth, and does not have any cavity, such as fine holes, which holds the fluid.

Abstract: A damping chamber is formed in a pressure relaxation device connected to a high pressure fuel pipe. Valve bodies are provided at openings of partitions, and a spring force is applied to the valve bodies by a spring in a valve closing direction. When a high pressure portion reaches an inlet of the damping chamber, the valve body opens to hold and absorb the high pressure portion in the damping chamber. When a low pressure portion reaches the inlet of the damping chamber, the high pressure portion held in the damping chamber is gradually released via a restricted orifice to cancel the low pressure portion, thereby reducing the pressure pulsation of fuel.

Abstract: An engine including an intermediate shaft which is driven by the crankshaft and drives the camshaft. The intermediate shaft directly drives an oil pump arranged above the trans-axle and drives an alternator and compressor through a pulley connected to the intermediate shaft and a belt. The intermediate shaft is arranged shifted in the lateral direction from the plane containing the axes of the cylinders.

Abstract: In a method of controlling the restart of an engine wherein the fuel amount is increased to prevent a restart failure of the engine from occurring at the time of the restart at high temperature, a fuel pressure is raised, a fuel amount is increased, an idling speed is raised and an idle ignition timing is advanced when the temperature of the engine is higher than a preset temperature and it is within a preset time period after the start of the engine, whereby the fuel consumption performance and the idling stabilizing performance are improved.