Abstract: An object of the present invention is to provide a work vehicle that can be controlled automatically. The work vehicle includes HST's for feeding power for traveling to at least either front wheels or rear wheels mounted on a traveling vehicle body, traveling levers for operating driving of at least either the front wheels or the rear wheel, traveling links operably coupling the traveling levers with the HST's, traveling drive sections for driving either the traveling levers or the traveling links, and a traveling control section configured to activate the traveling drive sections in response to receipt of a traveling instruction for the traveling levers in the automatic control mode for automatically controlling the traveling vehicle body.

Abstract: An information processing apparatus for processing information on semiconductor treatment apparatus includes an abnormality information display device which displays information on an abnormality in semiconductor treatment apparatus, a countermeasure information receiving device which receives countermeasure information on countermeasure, a countermeasure information storing device which stores the countermeasure information matched with abnormality identification information, an output device which outputs the countermeasure and abnormality identification information via communication device to outside, a countermeasure item display device which displays countermeasure item candidates, a countermeasure item storing device which stores countermeasure item selected from the candidates matched with the abnormality identification information, a countermeasure item transmitting device which transmits the countermeasure item and abnormality identification information via the communication device to outside, a coun

Abstract: An information processing apparatus for processing information on semiconductor treatment apparatus includes an abnormality information display device which displays information on an abormality in semiconductor treatment apparatus, a countermeasure information receiving device which receives countermeasure information on countermeasure, a countermeasure information storing device which stores the countermeasure information matched with abnormality identification information, an output device which outputs the countermeasure and abnormality identification information via communication device to outside, a countermeasure item display device which displays countermeasure item candidates, a countermeasure item storing device which stores countermeasure item selected from the candidates matched with the abnormality identification information, a countermeasure item transmitting device which transmits the countermeasure item and abnormality identification information via the communication device to outside, a count

Abstract: Upon performing a remote maintenance/diagnosis of a manufacturing equipment, data deriving from the manufacturing equipment that is a subject of the remote maintenance/diagnosis, data deriving from a manufacture related equipment other than the manufacturing equipment, and data regarding a manufacturing execution are collected as data used for the remote maintenance/diagnosis. The data collected as the data used for the remote maintenance/diagnosis is transmitted to a remote center that performs the maintenance/diagnosis of the manufacturing equipment.

Abstract: A maintenance/diagnosis data storage server includes: a data storing unit that obtains maintenance/diagnosis data pertaining to equipment that is connected to a first network, from the equipment via a first firewall, and stores the maintenance/diagnosis data; a request receiving unit that receives a data access request in which to request an access to the maintenance/diagnosis data, from a client provided for obtaining data and connected to a second network, via a second firewall; an authenticating unit that authenticates the data access request based on authentication information; and a data transmitting unit that transmits the maintenance/diagnosis data stored in the data storing unit to the client via the second firewall in a case where the authenticating unit authenticates the data access request is valid.

Abstract: Upon performing a remote maintenance/diagnosis of a manufacturing equipment, data deriving from the manufacturing equipment that is a subject of the remote maintenance/diagnosis, data deriving from a manufacture related equipment other than the manufacturing equipment, and data regarding a manufacturing execution are collected as data used for the remote maintenance/diagnosis. The data collected as the data used for the remote maintenance/diagnosis is transmitted to a remote center that performs the maintenance/diagnosis of the manufacturing equipment.

Abstract: A control system structured by a plurality of controller units for individually controlling a plurality of processing units for performing predetermined processes to a substrate, and a control unit including a server unit having a memory for reading and storing the process data generated by each control unit and a client unit having an editing section for reading the stored process data from the server unit and editing this process data and a display section for displaying the edited data.