Abstract: A vehicle control apparatus acquires a first collision risk based on a relative distance and a relative speed between an obstacle ahead of a vehicle and the vehicle, outputs a first control instruction for autonomously applying a braking force to the vehicle based on the first collision risk, acquires a second collision risk into which the first collision risk is updated after the braking force is autonomously applied to the vehicle, outputs a second control instruction for autonomously applying a force regarding steering to the vehicle based on the second collision risk, and outputs a third control instruction for controlling the braking force to be generated on a wheel portion of the vehicle based on the second collision risk after the force regarding the steering is autonomously applied to the vehicle.

Abstract: An information processing apparatus for processing information on semiconductor treatment apparatus includes an abnormality information display device which displays information on an abnormality in semiconductor treatment apparatus, a countermeasure information receiving device which receives countermeasure information on countermeasure, a countermeasure information storing device which stores the countermeasure information matched with abnormality identification information, an output device which outputs the countermeasure and abnormality identification information via communication device to outside, a countermeasure item display device which displays countermeasure item candidates, a countermeasure item storing device which stores countermeasure item selected from the candidates matched with the abnormality identification information, a countermeasure item transmitting device which transmits the countermeasure item and abnormality identification information via the communication device to outside, a coun

Abstract: An information processing apparatus for processing information on semiconductor treatment apparatus includes an abnormality information display device which displays information on an abormality in semiconductor treatment apparatus, a countermeasure information receiving device which receives countermeasure information on countermeasure, a countermeasure information storing device which stores the countermeasure information matched with abnormality identification information, an output device which outputs the countermeasure and abnormality identification information via communication device to outside, a countermeasure item display device which displays countermeasure item candidates, a countermeasure item storing device which stores countermeasure item selected from the candidates matched with the abnormality identification information, a countermeasure item transmitting device which transmits the countermeasure item and abnormality identification information via the communication device to outside, a count

Abstract: Upon performing a remote maintenance/diagnosis of a manufacturing equipment, data deriving from the manufacturing equipment that is a subject of the remote maintenance/diagnosis, data deriving from a manufacture related equipment other than the manufacturing equipment, and data regarding a manufacturing execution are collected as data used for the remote maintenance/diagnosis. The data collected as the data used for the remote maintenance/diagnosis is transmitted to a remote center that performs the maintenance/diagnosis of the manufacturing equipment.

Abstract: A maintenance/diagnosis data storage server includes: a data storing unit that obtains maintenance/diagnosis data pertaining to equipment that is connected to a first network, from the equipment via a first firewall, and stores the maintenance/diagnosis data; a request receiving unit that receives a data access request in which to request an access to the maintenance/diagnosis data, from a client provided for obtaining data and connected to a second network, via a second firewall; an authenticating unit that authenticates the data access request based on authentication information; and a data transmitting unit that transmits the maintenance/diagnosis data stored in the data storing unit to the client via the second firewall in a case where the authenticating unit authenticates the data access request is valid.

Abstract: Upon performing a remote maintenance/diagnosis of a manufacturing equipment, data deriving from the manufacturing equipment that is a subject of the remote maintenance/diagnosis, data deriving from a manufacture related equipment other than the manufacturing equipment, and data regarding a manufacturing execution are collected as data used for the remote maintenance/diagnosis. The data collected as the data used for the remote maintenance/diagnosis is transmitted to a remote center that performs the maintenance/diagnosis of the manufacturing equipment.

Abstract: A control system structured by a plurality of controller units for individually controlling a plurality of processing units for performing predetermined processes to a substrate, and a control unit including a server unit having a memory for reading and storing the process data generated by each control unit and a client unit having an editing section for reading the stored process data from the server unit and editing this process data and a display section for displaying the edited data.