Patents by Inventor Katsuhira Itakura

Katsuhira Itakura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer holder, heater unit having the wafer holder, and wafer prober having the heater unit
    Publication number: 20070023320
    Abstract: A wafer holder hardly deformable under high load and capable of effectively preventing a contact failure with a wafer and further capable of preventing temperature increase of a driving system of a wafer prober is provided. In a wafer holder having a chuck top and a supporter, variation in thickness of the chuck top from a wafer-mounting surface to a contact surface with the supporter, and variation in thickness of the supporter from a bottom surface to a contact surface with the chuck top are both set to at most 50 ?m. When the supporter is of a structure having a circular tube portion and a base portion separate from each other, variation in thickness of the circular tube portion from a contact surface with the chuck top to a contact surface with the base portion, and variation in thickness of the base portion from a bottom surface to a contact surface with the circular tube portion are preferably both set to at most 25 ?m.
    Type: Application
    Filed: July 25, 2006
    Publication date: February 1, 2007
    Inventors: Katsuhira Itakura, Masuhiro Natsuhara, Tomoyuki Awazu, Hirohiko Nakata, Kenji Shinma