Patents by Inventor Katsuhiro Ishiba

Katsuhiro Ishiba has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mask data generation method, mask data generation system, and recording medium
    Patent number: 9972491
    Abstract: According to one embodiment, there is provided a mask data generation method. The mask data generation method includes obtaining depth information about a pattern depth of a hole included in design information about a semiconductor device. The mask data generation method includes obtaining a first correction rule used to correct, in terms of the pattern depth, a process conversion difference between a resist pattern and a processed pattern. The mask data generation method includes determining temporary mask data including a lithography target pattern by applying a first process conversion difference correction processing to a dimension of hole pattern arranged in design layout data based on the depth information and the first correction rule.
    Type: Grant
    Filed: September 4, 2014
    Date of Patent: May 15, 2018
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Tsuyoshi Morisaki, Satoshi Usui, Katsuhiro Ishiba