Abstract: A crossed-field triode discharge type ion generating apparatus, containing a vacuum container, a magnetic field generating unit, a positive pole having a hollow part, a first negative pole, a second negative pole having an ion injecting hole, a control electrode, and a means of giving the highest electric potential among ones for all the electrodes to the positive pole and higher electric potential than ones for the first negative pole and the second negative pole to the control electrode, has at least either of the control electrode or the second negative pole constructed out of a cylinder possessing a through hole coaxial with the hollow part of the positive pole and a platelike part provided on one end of the cylinder, the cylinder being provided with a part made of at least one kind of metal belonging to a group of metals including vanadium, chrome, niobium, molybdenum, tantalum and tungsten and at least one of the control electrode, the first negative pole or the second negative pole being also provided

Abstract: Plasma apparatus comprises a vacuum vessel, a device for creating an open-ended magnetic field containing a plasma, a plurality of electrostatic plugs disposed at the open-ended portions of the magnetic field.

Abstract: An ion generating apparatus comprises a cylindrical vacuum vessel within which an anode and cathodes are disposed. The anode is provided with an inner tubular hollow portion and the cathodes are located near both end openings of the anode. The apparatus further comprises means for applying a voltage between the anode and the cathodes, a magnetic field generator, means for supplying operating gas into the hollow portion of the anode, and an evacuating device. At least one of the cathodes is provided with a through hole at the central portion thereof. The apparatus further comprises a control electrode stretched in the hollow portion in parallel with but apart from the central axis of the hollow portion.