Abstract: A method for manufacturing a silicon carbide semiconductor apparatus is disclosed. According to the method, an element structure is formed on a front surface side of a semiconductor substrate. A rear surface of the semiconductor substrate is grinded or polished in a direction parallel to a flat surface of a table. A front surface of the semiconductor substrate is grinded and polished in a direction parallel to the rear surface after the rear surface of the semiconductor substrate is grinded or polished.

Abstract: A method for manufacturing a silicon carbide semiconductor apparatus is disclosed. According to the method, an element structure is formed on a front surface side of a semiconductor substrate. A rear surface of the semiconductor substrate is grinded or polished in a direction parallel to a flat surface of a table. A front surface of the semiconductor substrate is grinded and polished in a direction parallel to the rear surface after the rear surface of the semiconductor substrate is grinded or polished.

Abstract: A reciprocation control apparatus includes a manifold including delivery and exhaust ports formed therethrough, the manifold being movable between an air delivery/exhaust pipe to a pushing-out cylinder and an air delivery pipe to an air supply. When the manifold is moved to a position in which the delivery and exhaust ports are connected to each other, air is selectively supplied to or exhausted from the head and cap sides of the pushing-out cylinder. Thus, the pushing-out cylinder can easily and simply be controlled in reciprocation. When such a reciprocation control apparatus is incorporated into a ring alignment apparatus, the ring alignment apparatus can easily and simply be switched from one state to another with an automated alignment being carried out to handle a number of ring members.

Abstract: A plurality of piston rings 70 are set at intervals in the axial direction, on the outer circumference of a cylindrical member 6 of a coating jig 5. The coating jig 5 is supported to allow horizontal rotation and conveyed to the coating process by a chain conveyor 40. In the coating process, simultaneously with the rotation of the coating jig 5 by a drive means 51, a pair of coating guns 54 and 55 placed at a position above the coating jig 5, apply a coating to the upper surfaces 70a and the lower surfaces 70b of the piston rings 70 while moving along the axial direction of the coating jig 5.