Patents by Inventor Katsuhiro Ookawa

Katsuhiro Ookawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230187233
    Abstract: There is provided a substrate processing apparatus comprising a liquid amount detecting part configured to detect a liquid amount of a liquid film formed on a substrate; and a coating state detecting part configured to detect a coating state of the substrate with the liquid film formed thereon.
    Type: Application
    Filed: February 9, 2023
    Publication date: June 15, 2023
    Inventors: Masataka GOSHO, Yuichi DOUKI, Satoshi BIWA, Satoshi OKAMURA, Katsuhiro OOKAWA, Yuichiro KUNUGIMOTO
  • Patent number: 10593571
    Abstract: Provided is a substrate processing apparatus including a liquid processing unit that performs a liquid processing on a substrate; a drying processing unit that performs a drying processing on the substrate in a wet state; a first conveyance unit that conveys the substrate to the liquid processing unit; a second conveyance unit that conveys the substrate in the wet state from the liquid processing unit to the drying processing unit; and a third conveyance unit that conveys the substrate before the liquid processing in the liquid processing unit and to convey the substrate after the drying processing from the drying processing unit. The first and second conveyance units and the drying processing unit are disposed on a side that faces the third conveyance unit, and the liquid processing unit is disposed on a side that faces the first and second conveyance units and is opposite to the third conveyance unit.
    Type: Grant
    Filed: March 23, 2017
    Date of Patent: March 17, 2020
    Assignee: Tokyo Electron Limited
    Inventors: Hiroaki Inadomi, Tooru Nakamura, Kouji Kimoto, Yasuo Kiyohara, Satoshi Okamura, Satoshi Biwa, Nobuya Yamamoto, Katsuhiro Ookawa, Keiichi Yahata, Tetsuro Nakahara
  • Publication number: 20190206702
    Abstract: There is provided a substrate processing apparatus comprising a liquid amount detecting part configured to detect a liquid amount of a liquid film formed on a substrate; and a coating state detecting part configured to detect a coating state of the substrate with the liquid film formed thereon.
    Type: Application
    Filed: January 2, 2019
    Publication date: July 4, 2019
    Inventors: Masataka GOSHO, Yuichi DOUKI, Satoshi BIWA, Satoshi OKAMURA, Katsuhiro OOKAWA, Yuichiro KUNUGIMOTO
  • Publication number: 20180254180
    Abstract: A substrate processing apparatus of an exemplary embodiment includes a liquid processing unit, a detection unit, and a post-processing unit. The liquid processing unit supplies a liquid to a substrate to form a liquid film on the substrate. The detection unit detects the amount of a liquid on the substrate to determine whether the amount of the liquid is acceptable or not. The post-processing unit processes the substrate having the liquid film formed thereon.
    Type: Application
    Filed: March 1, 2018
    Publication date: September 6, 2018
    Inventors: Gentaro Goshi, Keisuke Egashira, Kento Tsukano, Hiroshi Marumoto, Takuro Masuzumi, Katsuhiro Ookawa, Hiromi Kiyose
  • Publication number: 20170287742
    Abstract: Provided is a substrate processing apparatus including a liquid processing unit that performs a liquid processing on a substrate; a drying processing unit that performs a drying processing on the substrate in a wet state; a first conveyance unit that conveys the substrate to the liquid processing unit; a second conveyance unit that conveys the substrate in the wet state from the liquid processing unit to the drying processing unit; and a third conveyance unit that conveys the substrate before the liquid processing in the liquid processing unit and to convey the substrate after the drying processing from the drying processing unit. The first and second conveyance units and the drying processing unit are disposed on a side that faces the third conveyance unit, and the liquid processing unit is disposed on a side that faces the first and second conveyance units and is opposite to the third conveyance unit.
    Type: Application
    Filed: March 23, 2017
    Publication date: October 5, 2017
    Inventors: Hiroaki Inadomi, Tooru Nakamura, Kouji Kimoto, Yasuo Kiyohara, Satoshi Okamura, Satoshi Biwa, Nobuya Yamamoto, Katsuhiro Ookawa, Keiichi Yahata, Tetsuro Nakahara
  • Patent number: 4858029
    Abstract: A video reproducing apparatus is provided for reproducing at a high speed a video signal from a recorded magnetic tape with the use of a field memory for storing video signal in which the writing in and reading out timing of the video signal for the field memory is changed in accordance with the variation of the envelope signal of the video signal extracted by an envelope detector.
    Type: Grant
    Filed: June 26, 1987
    Date of Patent: August 15, 1989
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventor: Katsuhiro Ookawa
  • Patent number: 4827359
    Abstract: A video recording and reproducing apparatus which is designed to store a reproduced signal in a field memory when a level of the signal reproduced from the recorded magnetic tape is larger than a previously established predetermined level and to read out the stored content, including detection, circuit for measuring the recording track width on the basis of an envelope detection signal of the reproduced signal which is obtained when the magnetic head traverses the recording track on said magnetic tape; and a circuit for establishing said predetermined level at a level optimum to the reproduction of the signal on the basis of the measured result.
    Type: Grant
    Filed: December 17, 1986
    Date of Patent: May 2, 1989
    Assignee: Mitsubishi Denki Kabushiki
    Inventors: Katsuhiro Ookawa, Keiji Hatanaka
  • Patent number: 4691250
    Abstract: A magnetic video reproducer outputs a plurality of pilot signals having different frequencies from a servo circuit (18) in a recording mode, to superpose the pilot signals on video signals outputted from a signal circuit (25) and record the same on video tracks provided on a magnetic tape. In shifting a mode from the recording mode to a stop mode including a pause mode, a capstan motor (19) and a reel motor (20) are reversely rotated so that a cue signal is recorded by a cue head (10) on the magnetic tape in the form of a pulse train, whereafter travelling of the magnetic tape is stopped.
    Type: Grant
    Filed: November 15, 1984
    Date of Patent: September 1, 1987
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventor: Katsuhiro Ookawa
  • Patent number: 4691251
    Abstract: A magnetic recording and reproducing apparatus using a pilot signal control system is adapted such that a cue signal (51) is recorded in a cue track (50) provided besides a video signal track (52) when a magnetic tape (7) is temporarily stopped during the recording operation and is moved in the backward direction by a predetermined amount, and when the temporary stop is cancelled and the magnetic tape is moved in the forward direction, the cue signal (51) is reproduced and the recording operation is restarted responsive to the reproduced cue signal. Preferably, after cancellation of the temporary stop until restart of the recording operation, control is made such that coincidence of the frequency and phase of the reproduced pilot signal and those of a pilot signal to be recorded is established.
    Type: Grant
    Filed: October 30, 1984
    Date of Patent: September 1, 1987
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Katsuhiro Ookawa, Toshifumi Fujii, Yoshihiro Nishida