Patents by Inventor Katsuhiro SHIMATAKE

Katsuhiro SHIMATAKE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method
    Patent number: 11126094
    Abstract: A liquid crystal exposure apparatus that exposes a substrate with an illumination light via a projection optical system is equipped with: a substrate holder that holds the substrate; a substrate encoder system that includes head units and scales, and acquires the position information of the substrate holder on the basis of the output of the head units; and a drive section that relatively moves one of the head units and the scales on the substrate holder with respect to the other.
    Type: Grant
    Filed: December 10, 2019
    Date of Patent: September 21, 2021
    Assignee: NIKON CORPORATION
    Inventors: Yasuo Aoki, Atsushi Hara, Takachika Shimoyama, Toru Kawaguchi, Katsuhiro Shimatake, Iori Noda
  • EXPOSURE APPARATUS, MANUFACTURING METHOD OF FLAT-PANEL DISPLAY, DEVICE MANUFACTURING METHOD, AND EXPOSURE METHOD
    Publication number: 20200183291
    Abstract: A liquid crystal exposure apparatus that exposes a substrate with an illumination light via a projection optical system is equipped with: a substrate holder that holds the substrate; a substrate encoder system that includes head units and scales, and acquires the position information of the substrate holder on the basis of the output of the head units; and a drive section that relatively moves one of the head units and the scales on the substrate holder with respect to the other.
    Type: Application
    Filed: December 10, 2019
    Publication date: June 11, 2020
    Applicant: NIKON CORPORATION
    Inventors: Yasuo AOKI, Atsushi HARA, Takachika SHIMOYAMA, Toru KAWAGUCHI, Katsuhiro SHIMATAKE, Iori NODA
  • EXPOSURE APPARATUS, MANUFACTURING METHOD OF FLAT-PANEL DISPLAY, DEVICE MANUFACTURING METHOD, AND EXPOSURE METHOD
    Publication number: 20180356739
    Abstract: A liquid crystal exposure apparatus that exposes a substrate with an illumination light via a projection optical system is equipped with: a substrate holder that holds the substrate; a substrate encoder system that includes head units and scales, and acquires the position information of the substrate holder on the basis of the output of the head units; and a drive section that relatively moves one of the head units and the scales on the substrate holder with respect to the other.
    Type: Application
    Filed: September 29, 2016
    Publication date: December 13, 2018
    Applicant: NIKON CORPORATION
    Inventors: Yasuo AOKI, Atsushi HARA, Takachika SHIMOYAMA, Toru KAWAGUCHI, Katsuhiro SHIMATAKE, Iori NODA