Abstract: A glass film laminate includes a supporting member and a glass film laminated to each other. The supporting member protrudes from the glass film, and has a peeling start portion at which at least one corner portion of the glass film is exposed from the supporting member. The peeling start portion is provided with a distance from a side of the supporting member.

Abstract: A glass film laminate comprises a supporting member and a glass film laminated to each other. The supporting member protrudes from the glass film, and comprises a peeling start portion at which at least one corner portion of the glass film is exposed from the supporting member. The peeling start portion is provided with a distance from a side of the supporting member.

Abstract: Provided is a glass roll (15) manufactured by winding a glass film (10) having a thickness of 0.5 to 300 ?m and a density of less than 2.45 g/cm3 in a roll shape with a view to suppressing the damage of a glass film at an inner layer portion of a glass roll when the glass roll is manufactured by winding a long glass film having a thickness of 0.5 to 300 ?m.

Abstract: A wafer transport apparatus comprises a wafer loading shuttle unit 30 and a wafer unloading shuttle unit 40, positioned on both sides of vacuum cassettes 20 provided in batch processing ion implantation equipment. Each shuttle unit has shuttle cassettes 31, 41 having wafer supports corresponding to wafer holding racks. Each shuttle cassette is configured so that movement between a transfer position for transferring wafers to and from the cassette unit and a standby position is possible. The wafer holding racks support the wafers at a central area thereof. The wafer supports support the wafer on both sides along the diameter of the wafer at points away from the central area.