Abstract: A coated sliding member 10 for use under an environment where it is in contact with lubricant, comprising: a base material 12; and a first hard carbon layer 14 having a thickness of 3 ?m or more formed on a surface of the base material by a vacuum arc method using carbon and consisting of diamond-like carbon, containing substantially no hydrogen and being configured only of carbon, and a second hard carbon layer 15 formed on a surface of the first hard carbon layer by a vacuum arc method using carbon and consisting of diamond-like carbon, containing substantially no hydrogen and being configured only of carbon and nitrogen, the film thickness of the second hard carbon layer being 3 to 35% of the film thickness of the first hard carbon layer.

Abstract: The present invention provides a piston ring having excellent abrasion resistance to an aluminum alloy cylinder or cylinder liner formed of a mating material and is therefore capable of decreasing abrasion of the mating material. An exemplary piston ring has a hard carbon coating formed on an outer peripheral surface, and the hard carbon coating contains 0.5 atom % or more to less than 5 atom % of tungsten (W).

Abstract: A combination of a cylinder 62 of an internal combustion engine and a piston ring 40 for sliding an inner periphery of the cylinder, wherein at least a sliding face of the cylinder is composed of an aluminum alloy including 8 mass % to 22 mass % of Si and at least one or more particles selected from the group consisting of Si, Al2O3 and SiO2 particles each having a diameter of 3 ?m or more, and at least an outer periphery of the piston ring is coated with a hard carbon coating 14 composed only of hydrogen and carbon.

Abstract: A coated sliding member 10 for use under an environment where it is in contact with lubricant, comprising: a base material 12; and a first hard carbon layer 14 having a thickness of 3 ?m or more formed on a surface of the base material by a vacuum arc method using carbon and consisting of diamond-like carbon, containing substantially no hydrogen and being configured only of carbon, and a second hard carbon layer 15 formed on a surface of the first hard carbon layer by a vacuum arc method using carbon and consisting of diamond-like carbon, containing substantially no hydrogen and being configured only of carbon and nitrogen, the film thickness of the second hard carbon layer being 3 to 35% of the film thickness of the first hard carbon layer.

Abstract: In a member having a hydrogen-containing, amorphous carbon coating having a relatively smooth surface, similarly amorphous, fine carbon particles are dispersed in the hydrogen-containing, amorphous carbon coating to have improved cracking resistance while keeping smoothness on the surface and hardness in the entire coating. Specifically, fine particles discharged from a carbon cathode of an arc evaporation source by arc discharge are introduced into the coating, so that similarly amorphous, fine carbon particles are dispersed in the hydrogen-containing, amorphous carbon coating.

Abstract: The present invention provides a piston ring having excellent abrasion resistance to an aluminum alloy cylinder or cylinder liner formed of a mating material and is therefore capable of decreasing abrasion of the mating material. An exemplary piston ring has a hard carbon coating formed on an outer peripheral surface, and the hard carbon coating contains 0.5 atom % or more to less than 5 atom % of tungsten (W).

Abstract: A piston ring that may be mounted to a piston made of an aluminum alloy that slides with a cylinder liner containing Fe as a main component is disclosed. The piston ring is formed to have hard carbon coatings containing no hydrogen formed on an outer periphery and at least one side surface of the piston ring, the hard carbon coating formed on the outer periphery having no columnar structure, and the hard carbon coating formed on the side surface having a columnar structure extending in a direction intersecting with the side surface.

Abstract: A combination of a cylinder 62 of an internal combustion engine and a piston ring 40 for sliding an inner periphery of the cylinder, wherein at least a sliding face of the cylinder is composed of an aluminum alloy including 8 mass % to 22 mass % of Si and at least one or more particles selected from the group consisting of Si, Al2O3 and SiO2 particles each having a diameter of 3 ?m or more, and at least an outer periphery of the piston ring is coated with a hard carbon coating 14 composed only of hydrogen and carbon.

Abstract: An arc plasma source 101 for evaporating a cathode material of a cathode 22 by arc discharge controlled by a magnetic field, comprising a magnetic field forming mechanism 42 arranged outside the cathode for forming a magnetic field M in parallel to the center axis of the cathode near an evaporation surface 22a; a supporting mechanism 26 for supporting the cathode; a cooling mechanism 61 for cooling the cathode; and a tapered ring 64 being truncated cone shaped and having a through-hole into which the cathode penetrates along the axial direction of the through-hole, the tapered ring being arranged to be tapered toward the evaporation surface of the cathode; wherein the tapered ring is made of a ferromagnetic material and the front end of the tapered ring is positioned coplanar with the evaporation surface of the cathode or is positioned posterior to the evaporation surface in use.

Abstract: In a member having a hydrogen-containing, amorphous carbon coating having a relatively smooth surface, similarly amorphous, fine carbon particles are dispersed in the hydrogen-containing, amorphous carbon coating to have improved cracking resistance while keeping smoothness on the surface and hardness in the entire coating. Specifically, fine particles discharged from a carbon cathode of an arc evaporation source by arc discharge are introduced into the coating, so that similarly amorphous, fine carbon particles are dispersed in the hydrogen-containing, amorphous carbon coating.

Abstract: A sliding member is characterized in that a sliding surface of the sliding member is coated with an amorphous hard carbon film, and a surface of the amorphous hard carbon film has a ten-point mean roughness of equal to or less than 0.7 micrometers and an initial wear height in a range of 0.07 to 0.14 micrometers.

Abstract: An arc plasma source 101 for evaporating a cathode material of a cathode 22 by arc discharge controlled by a magnetic field, comprising a magnetic field forming mechanism 42 arranged outside the cathode for forming a magnetic field M in parallel to the center axis of the cathode near an evaporation surface 22a; a supporting mechanism 26 for supporting the cathode; a cooling mechanism 61 for cooling the cathode; and a tapered ring 64 being truncated cone shaped and having a through-hole into which the cathode penetrates along the axial direction of the through-hole, the tapered ring being arranged to be tapered toward the evaporation surface of the cathode; wherein the tapered ring is made of a ferromagnetic material and the front end of the tapered ring is positioned coplanar with the evaporation surface of the cathode or is positioned posterior to the evaporation surface in use.

Abstract: A sliding member is characterized in that a sliding surface of the sliding member is coated with an amorphous hard carbon film, and a surface of the amorphous hard carbon film has a ten-point mean roughness of equal to or less than 0.7 micrometers and an initial wear height in a range of 0.07 to 0.14 micrometers.

Abstract: Double-sided polishing equipment configured to polish a rectangular substrate, comprising a carrier having a pocket configured to accommodate a rectangular substrate, a lateral linear moving mechanism configured to move the carrier, first and second polishing pads with first and second rotational axes, respectively, offset from centers of the pads, the polishing surfaces of the first and second polishing pads being parallel. The equipment further includes at least one elevating mechanism coupled to at least one of the polishing pads, first and second rotary drive mechanisms coupled to each of the first and second polishing pads, respectively; and configured to rotate the first and second pads about the first and second rotational axes. A polishing-agent supplying device is present and configured to supply polishing agent to a plane where a substrate that is accommodated in the pocket to accommodate the substrate comes into contact with the polishing pads.

Abstract: Double-sided polishing equipment configured to polish a rectangular substrate, comprising a carrier having a pocket configured to accommodate a rectangular substrate, a lateral linear moving mechanism configured to move the carrier, first and second polishing pads with first and second rotational axes, respectively, offset from centers of the pads, the polishing surfaces of the first and second polishing pads being parallel. The equipment further includes at least one elevating mechanism coupled to at least one of the polishing pads, first and second rotary drive mechanisms coupled to each of the first and second polishing pads, respectively; and configured to rotate the first and second pads about the first and second rotational axes. A polishing-agent supplying device is present and configured to supply polishing agent to a plane where a substrate that is accommodated in the pocket to accommodate the substrate comes into contact with the polishing pads.

Abstract: A valve lifter, in which an amorphous hard carbon film is coated at least on the surface that slides against a cam, is characterized in that the surface of a base material (substrate) has an arithmetic mean roughness of Ra 0.01 to 0.03 micrometers, and the maximum length of the scratch on the base surface is made to be equal to or shorter than 250 micrometers.

Abstract: A valve lifter, in which an amorphous hard carbon film is coated at least on the surface that slides against a cam, is characterized in that the surface of a base material (substrate) has an arithmetic mean roughness of Ra 0.01 to 0.03 micrometers, and the maximum length of the scratch on the base surface is made to be equal to or shorter than 250 micrometers.