Abstract: This invention provides a quantitative X-ray analyzing system and process for scanning a sample with a beam of radiation includes an X-ray detector for detecting characteristic X-rays generated when a sample is scanned. A computer processor for processing outputs of the X-ray detector to determine concentration values of elements in the sample corresponding to a scanned pixel position of the sample. A memory stores the concentration values and the processor can then map the elements in background for phase analysis and grouping of the elements in the background by composition based on the contents of the memory wherein each map point is quantitatively operated to find a determined value of each group and in addition the area ratio of each group is found, and then, based on the density of the detected elements and to determine the value of each group, an area ratio is converted to a weight ratio for each group.