Abstract: In a processing machine 1, an X-axis control unit 33X, in each control cycle Tc, controls the position of an X-axis table 9X in the X-direction by feedback. The Z-axis control unit 33Z, in each control cycle Tc, acquires an up-close detection value of the position of the Z-axis table 9Z in the Z-direction, computes a second deviation based on a difference between the acquired detection value and a target position, and controls a Z-axis drive source 23z so that the second deviation is reduced. The Z-axis control unit 33Z, in each control cycle Tc, acquires an up-close detection value of a first error comprised of a deviation of the X-axis table 9 in the Z-direction, and increases or reduces the second deviation based on the detection value of the first error so that at least a portion of an error in a relative position of a workpiece 103 and a tool 101 in the Z-direction originating from the first error is cancelled by movement of the Z-axis table 9Z in the Z-direction.

Abstract: A machining apparatus including a distributor which generates a movement command for a motor; a position detector which detects a working position of the motor; and a motor controller which controls a corresponding motor based on the movement command, with the output of the position detector being fedback to the motor controller. During a scanning measurement control, in place of a machining tool, a probe sensor capable of measuring a distance relative to a work is attached, and while input of the movement command to the motor controller is interrupted, a measurement result obtained by the probe sensor is fedback to the motor controller. The detection result obtained by the position detector is superimposed on the measurement result and outputted as information on a shape of the work.

Abstract: There is provided a finite type rolling guide deviation correcting method and system capable of detecting the deviation in relative position between a rolling guide and a movable body if the deviation in relative position increases, and automatically carrying out a correcting operation for returning the deviation in relative position to a normal positional relationship. The finite type rolling guide deviation correcting method corrects a relative positional relationship between a finite type rolling guide for guiding a reciprocating motion of a movable body and the movable body.

Abstract: There is provided a finite type rolling guide deviation correcting method and system capable of detecting the deviation in relative position between a rolling guide and a movable body if the deviation in relative position increases, and automatically carrying out a correcting operation for returning the deviation in relative position to a normal positional relationship. The finite type rolling guide deviation correcting method corrects a relative positional relationship between a finite type rolling guide for guiding a reciprocating motion of a movable body and the movable body.

Abstract: A linear motor drive apparatus has a fixed element (22) having a guide mechanism (23), a movable element (21) guided by the guide mechanism (23) so as to move along a reference plane (P), parallel rows of first magnets (30, 31) disposed in parallel to both sides of the reference plane (P) and mounted to the fixed element 22, and parallel rows of second magnets (26, 27) disposed in parallel to both sides of the reference plane (P) and mounted to the movable element (21), wherein the parallel rows of first magnets (30, 31) has planar symmetry with respect to the reference plane (P), and wherein a steel plate (40) is provided so as to be parallel to the reference plane (P) at an intersection part of the movable element (21) with the reference plane (P), the steel plate (4) having a narrowed end part.

Abstract: A linear motor device includes a primary linear motor member and a secondary linear motor member shaped of teeth of a comb with a plurality of projecting portions arranged at predetermined intervals. Recesses defined between the projecting portions are filled up with filler members for flattening a surface of the secondary linear motor member facing the primary linear motor member. Therefore, it is possible to remove chips from the surface easily. Since the filler members are made of low magnetical permeability material, the magnetic shielding between the neighboring projecting portion can be maintained. A linear motor device for a machine tool includes a bar type secondary linear motor member having both ends supported by an immovable member of the machine tool and a cylindrical primary linear motor member attached to a movable member of the machine tool.

Abstract: A spindle 51 capable of controlling quantitatively the rotational angle around the center axial line itself is mounted with a turning tool 50; the spindle 51 and a workpiece are allowed to be relatively dislocated by an axial control along at least a plane perpendicular to the rotation axial line of the spindle 51 in such a manner that the relative movement locus L of the spindle center Cs to the workpiece conforms to a geometry to be machined and a required front rake angle .beta. is set, thereby allowing a mutual interpolation motion between the spindle and the workpiece to be performed; and the rotational angle of the spindle 51 is synchronously controlled with a required interrelation to the above-mentioned axial control, whereby the direction of the cutting edge of the turning tool 50 to the machined face of the workpiece is kept at a required direction at the full rotational angle position of the spindle 50 with the required front rake angle .beta.