Patents by Inventor Katsumi Asada
Katsumi Asada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9678444Abstract: The present invention provides an optical apparatus that deforms a reflecting surface of a mirror, comprising a base plate, a plurality of actuators that are disposed between the base plate and the mirror and are configured to apply a force to the mirror, a detection unit configured to detect vibration generated in the base plate, and a control unit configured to control each actuator based on a result of detection performed by the detection unit such that a deformation of the mirror caused as a result of the vibration generated in the base plate is within an acceptable range.Type: GrantFiled: April 29, 2015Date of Patent: June 13, 2017Assignee: CANON KABUSHIKI KAISHAInventor: Katsumi Asada
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Publication number: 20150316852Abstract: The present invention provides an optical apparatus that deforms a reflecting surface of a mirror, comprising a base plate, a plurality of actuators that are disposed between the base plate and the mirror and are configured to apply a force to the mirror, a detection unit configured to detect vibration generated in the base plate, and a control unit configured to control each actuator based on a result of detection performed by the detection unit such that a deformation of the mirror caused as a result of the vibration generated in the base plate is within an acceptable range.Type: ApplicationFiled: April 29, 2015Publication date: November 5, 2015Inventor: Katsumi Asada
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Patent number: 9052614Abstract: A vibration control apparatus includes a first spring mechanism to support a first object as part of a first system. To control vibration of the first object, a first actuator applies a force to the first object via a command value generated by a first computing based on an output of a detection system. The detection system includes a second spring mechanism to support a second object as part of a second system. A third spring mechanism supports a third object as part of a third system. The first displacement detector detects displacement of the third object relative to the second object. The third object is prevented from being displaced relative to the second object. A second natural frequency of the second system is higher than a first natural frequency of the first system, and a third natural frequency of a third system is higher than the first natural frequency.Type: GrantFiled: October 24, 2011Date of Patent: June 9, 2015Assignee: Canon Kabushiki KaishaInventors: Ryo Nawata, Katsumi Asada
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Publication number: 20120105820Abstract: A vibration control apparatus includes a first spring mechanism to support a first object as part of a first system. To control vibration of the first object, a first actuator applies a force to the first object via a command value generated by a first computing based on an output of a detection system. The detection system includes a second spring mechanism to support a second object as part of a second system. A third spring mechanism supports a third object as part of a third system. The first displacement detector detects displacement of the third object relative to the second object. The third object is prevented from being displaced relative to the second object. A second natural frequency of the second system is higher than a first natural frequency of the first system, and a third natural frequency of a third system is higher than the first natural frequency.Type: ApplicationFiled: October 24, 2011Publication date: May 3, 2012Applicant: CANON KABUSHIKI KAISHAInventors: Ryo Nawata, Katsumi Asada
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Publication number: 20120045723Abstract: The vibration isolation device of the present invention includes a first position feedback control system including a reference body system that is fixed to an object to be isolated from vibration and includes a reference body; a first driving unit that drives the object with respect to a base; and a first compensator that calculates a command value to the first driving unit based on position information obtained from the reference body system. Also, the reference body system includes a second position feedback control system including a second driving unit that drives the reference body with respect to the object; a first measuring unit that measures the position of the reference body relative to the object; and a second compensator that calculates a command value to the second driving unit based on position information obtained from the first measuring unit. Here, the second compensator is a PD compensator.Type: ApplicationFiled: August 11, 2011Publication date: February 23, 2012Applicant: CANON KABUSHIKI KAISHAInventors: Ryo NAWATA, Katsumi ASADA
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Patent number: 7859643Abstract: An apparatus for moving a spherical mirror in which at least three actuators move the spherical mirror, at least five position sensors sense the position of the spherical mirror, and a controller calculates coordinates of a center of curvature of the spherical mirror with three-degrees-of-freedom, based on positions sensed by the at least five position sensors. The controller controls driving of the at least three actuators in accordance with a difference between the calculated coordinates and predetermined coordinates, so that the center of curvature of the spherical mirror is held fixed to the predetermined coordinates.Type: GrantFiled: October 23, 2007Date of Patent: December 28, 2010Assignee: Canon Kabushiki KaishaInventor: Katsumi Asada
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Patent number: 7771065Abstract: An optical unit including a plate, an optical element, a fixing device for partially fixing the optical element against the plate, and a deforming device, located between the plate and the optical element, for applying a deforming force to the optical element to change a surface shape of the optical element. The deforming device includes poles for contacting a back face of the optical element, and actuators for driving the poles against the plate.Type: GrantFiled: April 12, 2006Date of Patent: August 10, 2010Assignee: Canon Kabushiki KaishaInventors: Choshoku Sai, Shigeo Sakino, Katsumi Asada, Hirohito Ito, Shinji Uchida
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Patent number: 7453623Abstract: A mirror apparatus including a reflecting mirror reflecting light, partition walls, the walls and the reflecting mirror defining a plurality of air chambers, and a regulator regulating air pressure in at least one of the air chambers. With this configuration, the front surface of the reflecting mirror is deformed into a smooth shape so as to correct optical aberration.Type: GrantFiled: April 21, 2006Date of Patent: November 18, 2008Assignee: Canon Kabushiki KaishaInventors: Shinji Uchida, Choshoku Sai, Katsumi Asada, Hirohito Ito, Shigeo Sakino
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Patent number: 7443619Abstract: At least one exemplary embodiment is directed to an optical element holding apparatus including a force generating actuator configured to deform the optical element, a measuring device configured to measure a position of the optical element, and a displacement causing actuator configured to position the optical element based on the measured position.Type: GrantFiled: September 19, 2006Date of Patent: October 28, 2008Assignee: Canon Kabushiki KaishaInventors: Shigeo Sakino, Hirohito Ito, Shinji Uchida, Choshoku Sai, Katsumi Asada
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Publication number: 20080100894Abstract: An apparatus for moving a curved-surface mirror is provided. The apparatus includes at least three actuators configured to move the curved-surface mirror, at least five position sensors configured to sense the position of the curved-surface mirror, and a controller configured to calculate coordinates of a center of curvature of the curved-surface mirror with three-degree-of-freedom based on positions sensed by the at least five position sensors, and to control driving of the at least three actuators in accordance with a difference between the calculated coordinates and predetermined coordinates.Type: ApplicationFiled: October 23, 2007Publication date: May 1, 2008Applicant: CANON KABUSHIKI KAISHAInventor: Katsumi Asada
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Patent number: 7297981Abstract: A light-shielding film formed above a substrate has a multilayered thin film structure, in which a thin film not containing nitrogen and a thin film containing nitrogen are alternately arranged. Since the thin film containing nitrogen is formed in the light-shielding film, the stress caused by thermal distortion at the time of an annealing treatment is absorbed by the thin film containing nitrogen. Thus, cracks in an insulating film or a semiconductor film which extend from the light-shielding film can be prevented from occurring.Type: GrantFiled: December 29, 2004Date of Patent: November 20, 2007Assignee: Seiko Epson CorporationInventors: Yuichi Shimizu, Katsumi Asada
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Patent number: 7224432Abstract: A stage device including a movable stage, a plate-like base which supports the stage, and a mass body which moves to cancel a reaction force acting on the base according to a movement of the movable stage. The plate-like base has a plurality of surfaces, and the stage and mass body are supported by different ones of the surfaces of the plate-like base.Type: GrantFiled: May 12, 2005Date of Patent: May 29, 2007Assignee: Canon Kabushiki KaishaInventors: Yasuhito Sasaki, Yoshikazu Miyajima, Hitoshi Sato, Katsumi Asada, Hideo Tanaka
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Publication number: 20070076310Abstract: At least one exemplary embodiment is directed to an optical element holding apparatus including a force generating actuator configured to deform the optical element, a measuring device configured to measure a position of the optical element, and a displacement causing actuator configured to position the optical element based on the measured position.Type: ApplicationFiled: September 19, 2006Publication date: April 5, 2007Applicant: Canon Kabushiki KaishaInventors: Shigeo Sakino, Hirohito Ito, Shinji Uchida, Choshoku Sai, Katsumi Asada
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Publication number: 20060245035Abstract: A mirror apparatus including a reflecting mirror reflecting light, partition walls, the walls and the reflecting mirror defining a plurality of air chambers, and a regulator regulating air pressure in at least one of the air chambers. With this configuration, the front surface of the reflecting mirror is deformed into a smooth shape so as to correct optical aberration.Type: ApplicationFiled: April 21, 2006Publication date: November 2, 2006Applicant: Canon Kabushiki KaishaInventors: Shinji Uchida, Choshoku Sai, Katsumi Asada, Hirohito Ito, Shigeo Sakino
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Publication number: 20060232866Abstract: An optical unit includes a plate having a fixed position, an optical element having a specific optical action, a fixing device for partially fixing the optical element, and a deforming device, located between the plate and the optical element, for applying a deforming force to the optical element to asymmetrically change a surface shape of the optical element.Type: ApplicationFiled: April 12, 2006Publication date: October 19, 2006Applicant: CANON KABUSHIKI KAISHAInventors: Choshoku Sai, Shigeo Sakino, Katsumi Asada, Hirohito Ito, Shinji Uchida
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Publication number: 20050254036Abstract: A stage device includes a movable stage, a base which supports the stage, and a mass body which moves to cancel a reaction force acting on the base as the stage moves. The base has a plurality of surfaces, and the stage and mass body are supported by different ones of the surfaces of the base. In addition, when the mass body is arranged in the base, the stage device can be more downsized.Type: ApplicationFiled: May 12, 2005Publication date: November 17, 2005Applicant: CANON KABUSHIKI KAISHAInventors: Yasuhito Sasaki, Yoshikazu Miyajima, Hitoshi Sato, Katsumi Asada, Hideo Tanaka
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Publication number: 20050156170Abstract: A light-shielding film formed above a substrate has a multilayered thin film structure, in which a thin film not containing nitrogen and a thin film containing nitrogen are alternately arranged. Since the thin film containing nitrogen is formed in the light-shielding film, the stress caused by thermal distortion at the time of an annealing treatment is absorbed by the thin film containing nitrogen. Thus, cracks in an insulating film or a semiconductor film which extend from the light-shielding film can be prevented from occurring.Type: ApplicationFiled: December 29, 2004Publication date: July 21, 2005Applicant: SEIKO EPSON CORPORATIONInventors: Yuichi Shimizu, Katsumi Asada
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Publication number: 20040007219Abstract: To provide a practical and quite novel power generation device that is suitable for the mass-production with high productivity in an extremely low cost manner and with a high energy efficiency and a structure in view of the circumstances of the compact, light-weight and high power, a power generation system comprising an automotive turbocharger having a turbine rotated by a gas flow of exhaust gas and a compressor provided coaxially with the turbine and rotated by rotation of the turbine for compressing and feeding sucked air, a combustion device for mixing the sucked air compressed and fed by the compressor and fuel together and igniting and burning the mixture, a portion for introducing exhaust gas of the combustion device to the turbine to rotate the turbine by the gas flow of exhaust gas, and an output rotary shaft rotated by the turbine and provided to the compressor on the intake air side whereby a power generation device is rotated by the rotation of the output rotary shaft to generate an electric poweType: ApplicationFiled: June 19, 2003Publication date: January 15, 2004Inventor: Katsumi Asada
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Patent number: 5909272Abstract: A stage apparatus has a stationary portion, a movable portion and a linear motor for moving the movable portion in a prescribed direction by applying thrust between the stationary and movable portions. A first supporting member supports the stationary portion with a degree of freedom in the direction of movement, and a second supporting member has an axial supporting member for supporting the stationary portion rigidly in the direction of movement and flexibly in other directions. The second supporting member is isolated from the first supporting member in such a manner that vibration will not be transmitted to the first supporting member. The stage is used to scan a master plate in a scanning-type exposure apparatus, and the first supporting member is joined to a lens barrel table on which a projecting optical system is mounted.Type: GrantFiled: July 31, 1997Date of Patent: June 1, 1999Assignee: Canon Kabushiki KaishaInventors: Eiji Osanai, Mitsuru Inoue, Kazunori Iwamoto, Katsumi Asada, Hiroshi Ito
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Patent number: 5511930Abstract: A precision positioning apparatus suitable for the positioning control system of a semiconductor exposing apparatus such as a stepper has, as its object, the provision of a non-contact type precision positioning apparatus capable of properly correcting the disturbance of posture or vibration based on low rigidityy which is a feature of a non-contact guide mechanism and accomplishing stable, highly accurate positioning at a high speed. The precision positioning apparatus is provided with a base plate, a movable member positioned on the base plate, a driving device for driving the movable member, a detecting device for detecting movement of the movable member, and a device for supplying the driving device with a signal regarding the movement of the movable member on the basis of a reference value and the output value from the detecting device.Type: GrantFiled: March 1, 1993Date of Patent: April 30, 1996Assignee: Canon Kabushiki KaishaInventors: Mikio Sato, Katsumi Asada, Shinji Wakui