Abstract: A first trench extending in a Y direction is formed in each of a semiconductor substrate located in a cell region and the semiconductor substrate located in an outer peripheral region. A second trench is formed in the semiconductor substrate in the outer peripheral region so as to surround the cell region in a plan view. A p-type body region is formed in the semiconductor substrate in each region. A plurality of p-type floating regions is formed in the semiconductor substrate in the outer peripheral region. A field plate electrode is formed at a lower portion of each of the first trench and the second trench. A gate electrode is formed at an upper portion of the first trench located in the cell region. A floating gate electrode is formed at an upper portion of each of the first trench located in the outer peripheral region and the second trench.

Abstract: The present invention is intended to reduce variations in oscillation wavenumber of a semiconductor laser element due to the influence of circumferential temperatures. The invention includes a semiconductor laser semiconductor laser element, a temperature control part to control a temperature of the semiconductor laser element, a temperature sensor to detect a temperature of the temperature control part, and a temperature control device to control a supply signal to the temperature control part so that a detected temperature obtained from the temperature sensor reaches a predetermined target temperature. The temperature control device changes a target temperature for the temperature control part depending on a supply signal to the temperature control part.

Abstract: An object of the present invention is to provide a dry pump and an exhaust gas treatment method which can improve an effect of inhibiting a reaction product from adhering to the inside of a gas outlet port of the dry pump, a gas exhaust pipe, or the like and can also improve an energy saving effect. To attain the object, the present invention includes the gas exhaust pipe disposed to be connected to the gas outlet port of the dry pump and to a gas inlet port of a detoxification device, and a heat exchanger which heats a diluent gas introduced therein using a heat generated from the dry pump and introduces the heated diluent gas into the gas exhaust pipe to heat a used gas to a temperature of not less than a predetermined value.

Abstract: The present invention relates to an analysis apparatus adapted to analyze a measurement target component contained in a sample by irradiating a measurement cell into which the sample is introduced with pulse-oscillated light, whereby suppressing reduction in wavelength resolution without shortening the pulse width. The analysis apparatus includes multiple light sources adapted to produce pulse oscillations, a light detector adapted to detect light emitted from the light source and transmitted through the measurement cell, and a signal separation part adapted to separate, from a light intensity signal obtained by the light detector, signals corresponding to a part of pulses from the light sources.

Abstract: The present invention is intended to reduce variations in oscillation wavenumber of a semiconductor laser element due to the influence of circumferential temperatures. The invention includes a semiconductor laser semiconductor laser element, a temperature control part to control a temperature of the semiconductor laser element, a temperature sensor to detect a temperature of the temperature control part, and a temperature control device to control a supply signal to the temperature control part so that a detected temperature obtained from the temperature sensor reaches a predetermined target temperature. The temperature control device changes a target temperature for the temperature control part depending on a supply signal to the temperature control part.

Abstract: The present invention is adapted to include: a light source adapted to emit reference light that is light whose wavelength is modulated at a predetermined modulation frequency; a light detector adapted to detect the intensity of measurement target light that is light after the reference light has transmitted through the measurement target component, and the intensity of the reference light; a first calculation part adapted to calculate an intensity ratio logarithm that is the logarithm of the ratio between the intensity of the measurement target light and the intensity of the reference light; a frequency component extraction part adapted to lock-in detect the intensity ratio logarithm with a reference signal having a frequency n times the modulation frequency; and a second calculation part adapted to, on the basis of the result of the detection by the frequency component extraction part, calculate the concentration or absorbance of the measurement target component.

Abstract: The present invention is a spectroscopic analyzer that when measuring the concentration of a predetermined component contained in sample gas in a reduced pressure state lower than atmospheric pressure, obtains the concentration of the predetermined component with accuracy. The spectroscopic analyzer is one that measures the absorbance of the predetermined component contained in the sample gas in a reduced pressure state lower than atmospheric pressure, and calculates the concentration of the predetermined component with use of a calibration curve indicating the relationship between the absorbance of the predetermined component and the concentration of the predetermined component and a relational expression between the pressure of the sample gas at the time of the measurement and the concentration of the predetermined component.

Abstract: A vacuum exhaust system which exhausts gas from chambers and which comprises a plurality of branch channels for the exhaustion of the gas from the chambers, a main pipeline in the form of a confluence of the plurality of branch channels, channel open-close valves fitted to correspond with each of the said plurality of branch channels, a channel-switching valve connecting the main channel and a plurality of selection channels and allowing flow between the main channel and any one of the plurality of selection channels, a first pump which functions as a gas exhaust means in the molecular flow region of the gas and is fitted to one of the plurality of branch channels, and second pumps which function as gas exhaust means in the viscous flow region of the gas and are fitted to the plurality of selection channels.

Abstract: The present invention relates to an analysis apparatus adapted to analyze a measurement target component contained in a sample by irradiating a measurement cell into which the sample is introduced with pulse-oscillated light, whereby suppressing reduction in wavelength resolution without shortening the pulse width. The analysis apparatus includes multiple light sources adapted to produce pulse oscillations, a light detector adapted to detect light emitted from the light source and transmitted through the measurement cell, and a signal separation part adapted to separate, from a light intensity signal obtained by the light detector, signals corresponding to a part of pulses from the light sources.

Abstract: The present invention responds flexibly to and corrects concentration changes that are caused by changes between the temperature when a correction calibration curve is created and the temperature when a test sample is measured, without having to correct the calibration curve.

Abstract: The present invention responds flexibly to and corrects concentration changes that are caused by changes between the temperature when a correction calibration curve is created and the temperature when a test sample is measured, without having to correct the calibration curve.

Abstract: The present invention is adapted to make light beams emitted from a light source enter a photodetector both when interposing an optical element having known characteristics and when not interposing the optical element, and acquire a first output value and a second output value that are the output values of the photodetector with respect to each of light beams that respectively have predetermined multiple wavenumbers and are included in the incident light beams, and obtain an arithmetic expression for calculating intensity of incident light beams from an output value of the photodetector, using parameters that are a ratio between the first output value and the second output value at each of the predetermined wavenumbers and the wavenumber transmission or reflection characteristic of the optical element.

Abstract: The present invention is adapted to include: a light source adapted to emit reference light that is light whose wavelength is modulated at a predetermined modulation frequency; a light detector adapted to detect the intensity of measurement target light that is light after the reference light has transmitted through the measurement target component, and the intensity of the reference light; a first calculation part adapted to calculate an intensity ratio logarithm that is the logarithm of the ratio between the intensity of the measurement target light and the intensity of the reference light; a frequency component extraction part adapted to lock-in detect the intensity ratio logarithm with a reference signal having a frequency n times the modulation frequency; and a second calculation part adapted to, on the basis of the result of the detection by the frequency component extraction part, calculate the concentration or absorbance of the measurement target component.

Abstract: A vacuum exhaust system which exhausts gas from chambers and which comprises a plurality of branch channels for the exhaustion of the gas from the chambers, a main pipeline in the form of a confluence of the plurality of branch channels, channel open-close valves fitted to correspond with each of the said plurality of branch channels, a channel-switching valve connecting the main channel and a plurality of selection channels and allowing flow between the main channel and any one of the plurality of selection channels, a first pump which functions as a gas exhaust means in the molecular flow region of the gas and is fitted to one of the plurality of branch channels, and second pumps which function as gas exhaust means in the viscous flow region of the gas and are fitted to the plurality of selection channels.

Abstract: The present invention is a spectroscopic analyzer that when measuring the concentration of a predetermined component contained in sample gas in a reduced pressure state lower than atmospheric pressure, obtains the concentration of the predetermined component with accuracy. The spectroscopic analyzer is one that measures the absorbance of the predetermined component contained in the sample gas in a reduced pressure state lower than atmospheric pressure, and calculates the concentration of the predetermined component with use of a calibration curve indicating the relationship between the absorbance of the predetermined component and the concentration of the predetermined component and a relational expression between the pressure of the sample gas at the time of the measurement and the concentration of the predetermined component.

Abstract: An object of the present invention is to provide a dry pump and an exhaust gas treatment method which can improve an effect of inhibiting a reaction product from adhering to the inside of a gas outlet port of the dry pump, a gas exhaust pipe, or the like and can also improve an energy saving effect. To attain the object, the present invention includes the gas exhaust pipe disposed to be connected to the gas outlet port of the dry pump and to a gas inlet port of a detoxification device, and a heat exchanger which heats a diluent gas introduced therein using a heat generated from the dry pump and introduces the heated diluent gas into the gas exhaust pipe to heat a used gas to a temperature of not less than a predetermined value.

Abstract: The present invention is adapted to make light beams emitted from a light source enter a photodetector both when interposing an optical element having known characteristics and when not interposing the optical element, and acquire a first output value and a second output value that are the output values of the photodetector with respect to each of light beams that respectively have predetermined multiple wavenumbers and are included in the incident light beams, and obtain an arithmetic expression for calculating intensity of incident light beams from an output value of the photodetector, using parameters that are a ratio between the first output value and the second output value at each of the predetermined wavenumbers and the wavenumber transmission or reflection characteristic of the optical element.

Abstract: An inverter cover for covering an inverter provided in a front space which is formed in front of a vehicle room in a longitudinal direction of the vehicle, by partitioning the vehicle room with a vehicle body panel, includes: a body part for covering an upper face of the inverter; and an extended part extended rearward from the body part so as to be positioned between a connecting part which is provided in a rear part of the inverter and to which a harness is connected, and an edge part which is protruded frontward from the vehicle body panel.

Abstract: An inverter cover for covering an inverter provided in a front space which is formed in front of a vehicle room in a longitudinal direction of the vehicle, by partitioning the vehicle room with a vehicle body panel, includes: a body part for covering an upper face of the inverter; and an extended part extended rearward from the body part so as to be positioned between a connecting part which is provided in a rear part of the inverter and to which a harness is connected, and an edge part which is protruded frontward from the vehicle body panel.

Abstract: A spectrophotometer is provided, including a light source for irradiating light into a sample gas, a photodetector for detecting light transmitted through the sample gas, an optical filter, and an operation device for calculating a concentration of an actual gas to be measured, contained in the sample gas based on a detection signal value obtained from the photodetector. The operation device calculates the concentration of the actual gas based on function ? for associating a concentration of a substitute gas with the actual gas obtained from a reference instrument, function ? for associating a relation between a light absorption of the actual gas and the substitute gas in the reference instrument, with a relation between a light absorption of the actual gas the substitute gas in a calibration instrument, and a function indicating a relation between the concentration of the substitute gas and the detection signal value.