Patents by Inventor Katsumi Shibayama

Katsumi Shibayama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11054309
    Abstract: An optical module 1A includes a mirror unit 2 including a movable mirror 22 and a fixed mirror 16, a beam splitter unit 3, a light incident unit 4, a first light detector 6, a second light source 7, a second light detector 8, a holding unit 130, a first mirror 51, a second mirror 52, and a third mirror 53. The holding unit 130 holds the first light detector 6, the second light detector 8, and the second light source 7 so as to face that same side, and to be aligned in this order. A length of an optical path between the unit 3 and the detector 6 is shorter than a length of an optical path between the unit 3 and the detector 8, and a length of an optical path between the unit 3 and the source 7.
    Type: Grant
    Filed: July 6, 2018
    Date of Patent: July 6, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Tomofumi Suzuki, Kyosuke Kotani, Tatsuya Sugimoto, Yutaka Kuramoto, Katsumi Shibayama, Noburo Hosokawa
  • Patent number: 11054560
    Abstract: A Fabry-Perot interference filter includes: a substrate having a first surface and a second surface facing each other; a first layer structure disposed on the first surface; and a second layer structure disposed on the second surface, wherein the first layer structure is provided with a first mirror portion and a second mirror portion facing each other with an air gap therebetween, and a distance between the first mirror portion and the second mirror portion is varied, and the second layer structure is formed with a separation region separating at least a part of the second layer structure into one side and another side in a direction along the second surface.
    Type: Grant
    Filed: June 27, 2017
    Date of Patent: July 6, 2021
    Assignee: HAMAMATSU PHOTONICS K.K
    Inventors: Toshimitsu Kawai, Katsumi Shibayama, Takashi Kasahara, Masaki Hirose, Hiroki Oyama, Yumi Teramachi
  • Patent number: 11041755
    Abstract: A method of manufacturing a Fabry-Perot interference filter includes a forming step of forming a first mirror layer having a plurality of first mirror portions, a sacrificial layer having a plurality of portions expected to be removed, and a second mirror layer having a plurality of second mirror portions on a first main surface of a wafer which includes parts corresponding to a plurality of two-dimensionally arranged substrates and is expected to be cut into the plurality of substrates along each of a plurality of lines; a removing step of simultaneously removing the plurality of two-dimensionally arranged portions expected to be removed from the sacrificial layer through etching after the Ruining step; and a cutting step of cutting the wafer into the plurality of substrates along each of the plurality of lines after the removing step.
    Type: Grant
    Filed: May 26, 2017
    Date of Patent: June 22, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Takashi Kasahara, Katsumi Shibayama, Masaki Hirose, Toshimitsu Kawai, Hiroki Oyama, Yumi Kuramoto
  • Patent number: 11035726
    Abstract: A light detection device includes a package including a window, a Fabry-Perot interference filter for transmitting light incident from the window in the package, and a light detector for detecting the light transmitted by the Fabry-Perot interference filter in the package. The Fabry-Perot interference filter includes: a substrate having a first surface on the window side and a second surface on the light detector side; a first layer structure arranged on the first surface, the first layer structure having a first mirror and a second mirror; and a lens unit integrally formed on the second surface side, the lens unit for condensing the light transmitted by the first mirror and the second mirror onto the light detector.
    Type: Grant
    Filed: February 26, 2018
    Date of Patent: June 15, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Takashi Kasahara, Katsumi Shibayama, Masaki Hirose, Toshimitsu Kawai, Hiroki Oyama, Yumi Kuramoto
  • Patent number: 11022492
    Abstract: An optical module 1A includes a mirror unit 2 including a movable mirror 22 and a fixed mirror 16, a beam splitter unit 3, a light incident unit 4, a first light detector 6, a second light source 7, a second light detector 8, a holding unit 130, a first mirror 51, a second mirror 52, and a third mirror 53. The holding unit 130 holds the first light detector 6, the second light detector 8, and the second light source 7 so as to face that same side, and to be aligned in this order. A length of an optical path between the unit 3 and the detector 6 is shorter than a length of an optical path between the unit 3 and the detector 8, and a length of an optical path between the unit 3 and the source 7.
    Type: Grant
    Filed: July 6, 2018
    Date of Patent: June 1, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Tomofumi Suzuki, Kyosuke Kotani, Tatsuya Sugimoto, Yutaka Kuramoto, Katsumi Shibayama, Noburo Hosokawa
  • Patent number: 11022493
    Abstract: A spectrometer includes a light detection element having a substrate made of a semiconductor material, a light passing part provided in the substrate, and a light detection part put in the substrate, a support having a base wall part opposing the light detection element, and side wall parts integrally formed with the base wall part, the light detection element being fixed to the side wall parts, the support being provided with a wiring electrically connected to the light detection part, and a dispersive part provided on a surface of the base wall part on a side of a space. An end part of the wiring is connected to a terminal of the light detection element. An end part of the wiring is positioned on a surface in the base wall part on an opposite side from the side of the space.
    Type: Grant
    Filed: October 14, 2019
    Date of Patent: June 1, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Takafumi Yokino, Katsumi Shibayama
  • Publication number: 20210159255
    Abstract: A semiconductor substrate includes a first main surface and a second main surface opposing each other. The semiconductor substrate includes a plurality of second semiconductor regions in a side of the second main surface. Each of the second semiconductor regions includes a first region including a textured surface, and a second region where a bump electrode is disposed. An insulating film includes a first insulating film covering surfaces of the second semiconductor regions, and a second insulating film covering peripheries of pad electrodes. The pad electrodes include a first electrode region in contact with the second region, and a second electrode region continuous with the first electrode region. The second electrode region is disposed on at least a part of a region included in the first insulating film and corresponding to the first region. The first main surface is a light incident surface of the semiconductor substrate.
    Type: Application
    Filed: April 11, 2019
    Publication date: May 27, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Tomoya TAGUCHI, Yuki YOSHIDA, Katsumi SHIBAYAMA
  • Publication number: 20210159351
    Abstract: A semiconductor substrate includes first and second main surfaces opposing each other. The semiconductor substrate includes second semiconductor regions in a side of the second main surface. Each of the second semiconductor regions includes a first region including a textured surface, and a second region where a bump electrode is disposed. The second semiconductor regions are two-dimensionally distributed in a first direction and a second direction orthogonal to each other when viewed in a direction orthogonal to the semiconductor substrate. The first region and the second region are adjacent to each other in a direction crossing the first direction and the second direction. The textured surface of the first region is located toward the first main surface in comparison to the surface of the second region in a thickness direction of the semiconductor substrate. The first main surface is a light incident surface of the semiconductor substrate.
    Type: Application
    Filed: April 11, 2019
    Publication date: May 27, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Tomoya TAGUCHI, Yuki YOSHIDA, Katsumi SHIBAYAMA
  • Publication number: 20210131870
    Abstract: A method of manufacturing a Fabry-Perot interference filter includes a forming step of forming a first thinned region, a first mirror layer, a sacrificial layer, and a second mirror layer are formed on a first main surface of a wafer, and the first thinned region in which at least one of the first mirror layer, the sacrificial layer, and the second mirror layer is partially thinned along each of a plurality of lines is formed; a cutting step of cutting the wafer into a plurality of substrates along each of the plurality of lines by forming a modified region within the wafer along each of the plurality of lines through irradiation of a laser light, after the forming step; and a removing step of removing a portion from the sacrificial layer through etching, between the forming step and the cutting step or after the cutting step.
    Type: Application
    Filed: December 18, 2020
    Publication date: May 6, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Takashi KASAHARA, Katsumi SHIBAYAMA, Masaki HIROSE, Toshimitsu KAWAI, Hiroki OYAMA, Yumi KURAMOTO
  • Publication number: 20210132364
    Abstract: A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The mirror device 20 is provided with a light passage portion 24 that constitutes a first portion of an optical path between the beam splitter unit 3 and the fixed mirror 16. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a second portion of the optical path between the beam splitter unit 3 and the fixed mirror 16. A second surface 21b of the base 21 and a third surface 13a of the optical function member 13 are joined to each other.
    Type: Application
    Filed: July 6, 2018
    Publication date: May 6, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Tomofumi SUZUKI, Kyosuke KOTANI, Tatsuya SUGIMOTO, Yutaka KURAMOTO, Katsumi SHIBAYAMA, Noburo HOSOKAWA, Hirokazu YAMAMOTO, Takuo KOYAMA
  • Publication number: 20210118921
    Abstract: A semiconductor substrate includes a first main surface and a second main surface opposing each other. The semiconductor substrate includes a first semiconductor region of a first conductivity type, and a plurality of second semiconductor regions constituting pn junctions with the first semiconductor region. The semiconductor substrate includes the plurality of second semiconductor in a side of the second main surface. Each of the plurality of second semiconductor regions includes a first region including a textured surface, and a second region including no textured surface. A thickness of the first region at a deepest position of recesses of the textured surface is smaller than a distance between a surface of the second region and the deepest position in a thickness direction of the semiconductor substrate. The first main surface is a light incident surface of the semiconductor substrate.
    Type: Application
    Filed: April 11, 2019
    Publication date: April 22, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Tomoya TAGUCHI, Yuki YOSHIDA, Katsumi SHIBAYAMA
  • Publication number: 20210116297
    Abstract: A light detection device includes a package including a window, a Fabry-Perot interference filter for transmitting light incident from the window in the package, and a light detector for detecting the light transmitted by the Fabry-Perot interference filter in the package. The Fabry-Perot interference filter includes: a substrate having a first surface on the window side and a second surface on the light detector side; a first layer structure arranged on the first surface, the first layer structure having a first mirror and a second mirror, and a lens unit integrally formed on the second surface side, the lens unit for condensing the light transmitted by the first mirror and the second mirror onto the light detector.
    Type: Application
    Filed: February 26, 2018
    Publication date: April 22, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Takashi KASAHARA, Katsumi SHIBAYAMA, Masaki HIROSE, Toshimitsu KAWAI, Hiroki OYAMA, Yumi KURAMOTO
  • Publication number: 20210082972
    Abstract: A semiconductor substrate including a first main surface and a second main surface opposing each other is provided. The semiconductor substrate includes a first semiconductor region of a first conductivity type. The semiconductor substrate includes a plurality of planned regions where a plurality of second semiconductor regions of a second conductivity type forming pn junctions with the first semiconductor region are going to be formed, in a side of the second main surface. A textured region is formed on surfaces included in the plurality of planned regions, in the second main surface. The plurality of second semiconductor regions are formed in the plurality of planned regions after forming the textured region. The first main surface is a light incident surface of the semiconductor substrate.
    Type: Application
    Filed: April 11, 2019
    Publication date: March 18, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Tomoya TAGUCHI, Yuki YOSHIDA, Katsumi SHIBAYAMA
  • Patent number: 10935419
    Abstract: A light detection device includes: a package including an opening configured to allow light to enter therefrom; a light transmitting unit arranged on an inner surface of the package so as to close the opening; a Fabry-Perot interference filter arranged in the package and configured to transmit light transmitted by the light transmitting unit; and a light detector arranged in the package and configured to detect the light transmitted by the Fabry-Perot interference filter. The light transmitting unit is integrally configured by including: a band pass filter arranged in the package and configured to transmit the light to be incident on the Fabry-Perot interference filter; and at least one lens unit configured to condense the light to be incident on the Fabry-Perot interference filter.
    Type: Grant
    Filed: March 5, 2018
    Date of Patent: March 2, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Masaki Hirose, Katsumi Shibayama, Takashi Kasahara, Toshimitsu Kawai, Hiroki Oyama, Yumi Kuramoto
  • Patent number: 10908022
    Abstract: A method of manufacturing a Fabry-Perot interference filter includes a forming step of forming a first thinned region, a first mirror layer, a sacrificial layer, and a second mirror layer are formed on a first main surface of a wafer, and the first thinned region in which at least one of the first mirror layer, the sacrificial layer, and the second mirror layer is partially thinned along each of a plurality of lines is formed; a cutting step of cutting the wafer into a plurality of substrates along each of the plurality of lines by forming a modified region within the wafer along each of the plurality of lines through irradiation of a laser light, after the forming step; and a removing step of removing a portion from the sacrificial layer through etching, between the forming step and the cutting step or after the cutting step.
    Type: Grant
    Filed: May 1, 2017
    Date of Patent: February 2, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Takashi Kasahara, Katsumi Shibayama, Masaki Hirose, Toshimitsu Kawai, Hiroki Oyama, Yumi Kuramoto
  • Patent number: 10900834
    Abstract: The Fabry-Perot interference filter includes: a substrate having a first surface, a first laminate having a first mirror portion disposed on the first surface, a second laminate having a second mirror portion facing the first mirror portion with an air gap interposed therebetween, and an intermediate layer defining the air gap between the first and second laminate. The substrate has an outer edge portion positioned outside an outer edge of the intermediate layer when viewed from a direction perpendicular to the first surface. The second laminate further includes a covering portion covering the intermediate layer and a peripheral edge portion positioned on the first surface in the outer edge portion. The second mirror portion, the covering portion, and the peripheral edge portion are integrally formed so as to be continuous with each other. The peripheral edge portion is thinned along an outer edge of the outer edge portion.
    Type: Grant
    Filed: May 1, 2017
    Date of Patent: January 26, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Takashi Kasahara, Katsumi Shibayama, Masaki Hirose, Toshimitsu Kawai, Hiroki Oyama, Yumi Kuramoto
  • Patent number: D910471
    Type: Grant
    Filed: September 9, 2019
    Date of Patent: February 16, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Takafumi Yokino, Katsumi Shibayama, Katsuhiko Kato
  • Patent number: D911194
    Type: Grant
    Filed: September 9, 2019
    Date of Patent: February 23, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Takafumi Yokino, Katsumi Shibayama, Katsuhiko Kato
  • Patent number: D913132
    Type: Grant
    Filed: September 9, 2019
    Date of Patent: March 16, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Takafumi Yokino, Katsumi Shibayama, Katsuhiko Kato
  • Patent number: D913826
    Type: Grant
    Filed: September 9, 2019
    Date of Patent: March 23, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Takafumi Yokino, Katsumi Shibayama, Katsuhiko Kato