Patents by Inventor Katsumi Shibayama

Katsumi Shibayama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11448869
    Abstract: A wafer includes a substrate layer, a first mirror layer having a plurality of two-dimensionally arranged first mirror portions, and a second mirror layer having a plurality of two-dimensionally arranged second mirror portions. A plurality of Fabry-Perot interference filter portions are formed in an effective area, in each of the plurality of Fabry-Perot interference filter portions a gap is formed between the first mirror portion and the second mirror portion. A plurality of dummy filter portions are formed in a dummy area disposed along an outer edge of the substrate layer and surrounding the effective area, in each of the plurality of dummy filter portions an intermediate layer is provided between the first mirror portion and the second mirror portion. At least the second mirror portion is surrounded by the first groove in each of the plurality of Fabry-Perot interference filter portions and the plurality of dummy filter portions.
    Type: Grant
    Filed: November 9, 2018
    Date of Patent: September 20, 2022
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Toshimitsu Kawai, Katsumi Shibayama, Takashi Kasahara, Masaki Hirose, Hiroki Oyama, Yumi Kuramoto
  • Patent number: 11448553
    Abstract: A light detection device includes a Fabry-Perot interference filter provided with a light transmitting region on a predetermined line, a light detector disposed on one side with respect to the Fabry-Perot interference filter on the line, a package having an opening positioned on the other side with respect to the Fabry-Perot interference filter on the line, a light transmitting member provided in the package such that the opening is blocked, and a temperature control element having an endothermic region thermally connected to the Fabry-Perot interference filter and the light detector. The endothermic region is positioned on one side with respect to the light detector on the line.
    Type: Grant
    Filed: March 3, 2017
    Date of Patent: September 20, 2022
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Masaki Hirose, Katsumi Shibayama, Takashi Kasahara, Toshimitsu Kawai, Hiroki Oyama
  • Patent number: 11450695
    Abstract: A semiconductor substrate including a first main surface and a second main surface opposing each other is provided. The semiconductor substrate includes a first semiconductor region of a first conductivity type. The semiconductor substrate includes a plurality of planned regions where a plurality of second semiconductor regions of a second conductivity type forming pn junctions with the first semiconductor region are going to be formed, in a side of the second main surface. A textured region is formed on surfaces included in the plurality of planned regions, in the second main surface. The plurality of second semiconductor regions are formed in the plurality of planned regions after forming the textured region. The first main surface is a light incident surface of the semiconductor substrate.
    Type: Grant
    Filed: April 11, 2019
    Date of Patent: September 20, 2022
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Tomoya Taguchi, Yuki Yoshida, Katsumi Shibayama
  • Patent number: 11422059
    Abstract: An optical inspection device includes: a wafer support unit configured to support a wafer in which a plurality of Fabry-Perot interference filter portions are formed, each of the plurality of filter portions in which a distance between the first mirror portion and the second mirror portion facing each other varies by an electrostatic force, the wafer support unit configured to support the wafer such that a direction in which the first mirror portion and the second mirror portion face each other follows along a reference line; a light emission unit configured to emit light to be incident on each of the plurality of filter portions along the reference line; and a light detection unit configured to detect light transmitted through each of the plurality of filter portions along the reference line. The wafer support unit has a light passage region that allows light to pass along the reference line.
    Type: Grant
    Filed: November 9, 2018
    Date of Patent: August 23, 2022
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Takashi Kasahara, Katsumi Shibayama, Masaki Hirose, Toshimitsu Kawai, Hiroki Oyama, Yumi Kuramoto
  • Patent number: 11294170
    Abstract: A method for removing a foreign substance according to an embodiment includes: a step of preparing a Fabry-Perot interference filter in which a gap is formed between a portion of a first laminate at least including a first mirror portion and a portion of a second laminate at least including a second mirror portion facing each other so that a distance between the first mirror portion and the second mirror portion facing each other varies by an electrostatic force; a step of detecting a foreign substance adhering to a surface of the second laminate; and a step of blowing air in which an airflow peak position is adjusted on the basis of a position of the detected foreign substance onto the surface of the second laminate and thereby removing the foreign substance from the surface of the second laminate.
    Type: Grant
    Filed: November 9, 2018
    Date of Patent: April 5, 2022
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Masaki Hirose, Katsumi Shibayama, Takashi Kasahara, Toshimitsu Kawai, Hiroki Oyama, Yumi Kuramoto
  • Patent number: 11276794
    Abstract: A semiconductor substrate includes first and second main surfaces opposing each other. The semiconductor substrate includes second semiconductor regions in a side of the second main surface. Each of the second semiconductor regions includes a first region including a textured surface, and a second region where a bump electrode is disposed. The second semiconductor regions are two-dimensionally distributed in a first direction and a second direction orthogonal to each other when viewed in a direction orthogonal to the semiconductor substrate. The first region and the second region are adjacent to each other in a direction crossing the first direction and the second direction. The textured surface of the first region is located toward the first main surface in comparison to the surface of the second region in a thickness direction of the semiconductor substrate. The first main surface is a light incident surface of the semiconductor substrate.
    Type: Grant
    Filed: April 11, 2019
    Date of Patent: March 15, 2022
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Tomoya Taguchi, Yuki Yoshida, Katsumi Shibayama
  • Patent number: 11262240
    Abstract: A spectrometer 1A includes a package 2 having a stem 4 and a cap 5, an optical unit 10A disposed on the stem 4, and a lead pin 3 for securing the optical unit 10A to the stem 4. The optical unit 10A includes a dispersive part 21 for dispersing and reflecting light entering from a light entrance part 6 of the cap 5, a light detection element 30 having a light detection part 31 for detecting the light dispersed and reflected by the dispersive part 21, a support 40 for supporting the light detection element 30 such that a space is formed between the dispersive part 21 and the light detection element 30, and a projection 11 protruding from the support 40, the lead pin 3 being secured to the projection 11. The optical unit 10A is movable with respect to the stem 4 in a contact part of the optical unit 10A and the stem 4.
    Type: Grant
    Filed: September 29, 2020
    Date of Patent: March 1, 2022
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Takafumi Yokino, Katsumi Shibayama, Katsuhiko Kato
  • Patent number: 11255730
    Abstract: A light detector includes: a substrate; and a membrane which is supported on a surface of the substrate so that a space is formed between the surface of the substrate and the membrane, in which the membrane includes a first wiring layer and a second wiring layer which are opposite each other with a gap extending along a line having a curved portion interposed therebetween and a resistance layer which is electrically connected to each of the first wiring layer and the second wiring layer and has an electric resistance depending on a temperature, and in which a first edge portion at the side of the line in the first wiring layer and a second edge portion at the side of the line in the second wiring layer respectively continuously extend.
    Type: Grant
    Filed: November 30, 2017
    Date of Patent: February 22, 2022
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Masahiro Yamazaki, Katsumi Shibayama, Ryusuke Kitaura
  • Publication number: 20220050238
    Abstract: A Fabry-Perot interference filter includes: a substrate; a first laminated body including a first mirror portion; a second laminated body including a second mirror portion; an intermediate layer including a defining portion that defines the gap between the first laminated body and the second laminated body; a first electrode formed in a first layer constituting the first laminated body; and a second electrode formed in a second layer constituting the second laminated body. The intermediate layer further includes a covering portion that covers outer edges of a plurality of layers including the first layer among layers constituting the first laminated body; and an extending portion that extends outward from the covering portion. The second laminated body extends to cover a stepped surface formed between the defining portion and the extending portion by the covering portion and an outer end surface of the extending portion.
    Type: Application
    Filed: September 24, 2019
    Publication date: February 17, 2022
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Takashi KASAHARA, Katsumi SHIBAYAMA, Masaki HIROSE, Hiroki OYAMA, Yumi KURAMOTO
  • Patent number: 11239266
    Abstract: A semiconductor substrate includes a first main surface and a second main surface opposing each other. The semiconductor substrate includes a plurality of second semiconductor regions in a side of the second main surface. Each of the second semiconductor regions includes a first region including a textured surface, and a second region where a bump electrode is disposed. An insulating film includes a first insulating film covering surfaces of the second semiconductor regions, and a second insulating film covering peripheries of pad electrodes. The pad electrodes include a first electrode region in contact with the second region, and a second electrode region continuous with the first electrode region. The second electrode region is disposed on at least a part of a region included in the first insulating film and corresponding to the first region. The first main surface is a light incident surface of the semiconductor substrate.
    Type: Grant
    Filed: April 11, 2019
    Date of Patent: February 1, 2022
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Tomoya Taguchi, Yuki Yoshida, Katsumi Shibayama
  • Publication number: 20220026703
    Abstract: An optical filter device includes: a Fabry-Perot interference filter that includes: a first structural body having first and second surfaces; a second structural body having a third surface; a first mirror portion provided to the first structural body; a second mirror portion provided to the second structural body so as to face the first mirror portion via an air gap; a first driving electrode provided to the first structural body; a second driving electrode provided to the second structural body; first and third terminals electrically connected to the first driving electrode; and a second terminal electrically connected to the second driving electrode. A distance between the first driving electrode and the air gap is shorter than a distance between the second surface and the air gap. A resistance measurement unit is electrically connected to the first and third terminals and measures a resistance value of the first driving electrode.
    Type: Application
    Filed: September 30, 2019
    Publication date: January 27, 2022
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Takashi KASAHARA, Katsumi SHIBAYAMA, Masaki HIROSE, Toshimitsu KAWAI, Hiroki OYAMA, Yumi KURAMOTO
  • Publication number: 20220028906
    Abstract: Provided a semiconductor light detection element including: a semiconductor portion having a front surface including a light reception region that receives incident light and photoelectrically converting the incident light incident on the light reception region; a metal portion provided on the front surface; and a carbon nanotube film provided on the light reception region and formed by depositing a plurality of carbon nanotubes. The carbon nanotube film extends over an upper surface of the metal portion from an upper surface of the light reception region.
    Type: Application
    Filed: October 12, 2021
    Publication date: January 27, 2022
    Applicant: Hamamatsu Photonics K.K.
    Inventors: Kazuto Ofuji, Masashi Ito, Katsumi Shibayama, Akira Sakamoto
  • Publication number: 20220003603
    Abstract: Provided is a control device for controlling a Fabry-Perot interference filter having a pair of mirror parts and a pair of driving electrodes. The control device includes: a first driving source that is controlled by using a current as a control parameter, and changes the distance between the pair of mirror parts; a second driving source that is controlled by using a voltage as a control parameter, and changes the distance; and a control unit that controls the first driving source and the second driving source in such a way that the distance is changed by a first driving source in a first region and the distance is changed by the second driving source in at least one part of an region other than the first region when an region including a maximum of the voltage is defined as the first region.
    Type: Application
    Filed: September 9, 2019
    Publication date: January 6, 2022
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Peter SEITZ, Helmut TEICHMANN, Katsumi SHIBAYAMA, Takashi KASAHARA
  • Publication number: 20210403320
    Abstract: A method of manufacturing a semiconductor substrate according to an embodiment includes a first step of forming a groove having a bottom surface and a side surface on which scallops are formed by performing a process including isotropic etching on a main surface of a substrate, a second step of performing at least one of a hydrophilic treatment on the side surface of the groove and a degassing treatment on the groove, and a third step of removing the scallops formed on the side surface of the groove and planarizing the side surface by performing anisotropic wet etching in a state where the bottom surface of the recess is present.
    Type: Application
    Filed: October 30, 2019
    Publication date: December 30, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Nao INOUE, Jo ITO, Go TANAKA, Atsuya IIMA, Daiki SUZUKI, Katsumi SHIBAYAMA
  • Publication number: 20210396579
    Abstract: A spectroscopic sensor includes a wiring substrate having a main surface, a light detector disposed on the main surface of the wiring substrate, a Fabry-Perot interference filter, a spacer which is provided on the main surface of the wiring substrate and supports the Fabry-Perot interference filter so that the Fabry-Perot interference filter and the light detector are separated from each other, and a stein connected to a ground potential. A second current path which has a smaller electric resistance than that of an arbitrary first current path which extends from the Fabry-Perot interference filter to the light detector via the spacer and the wiring substrate is formed between the Fabry-Perot interference filter and the stein.
    Type: Application
    Filed: August 23, 2019
    Publication date: December 23, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Hiroki OYAMA, Katsumi SHIBAYAMA, Takashi KASAHARA, Masaki HIROSE, Toshimitsu KAWAI, Yumi KURAMOTO
  • Patent number: 11205676
    Abstract: Provided a semiconductor light detection element including: a semiconductor portion having a front surface including a light reception region that receives incident light and photoelectrically converting the incident light incident on the light reception region; a metal portion provided on the front surface; and a carbon nanotube film provided on the light reception region and formed by depositing a plurality of carbon nanotubes. The carbon nanotube film extends over an upper surface of the metal portion from an upper surface of the light reception region.
    Type: Grant
    Filed: March 1, 2018
    Date of Patent: December 21, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Kazuto Ofuji, Masashi Ito, Katsumi Shibayama, Akira Sakamoto
  • Publication number: 20210387852
    Abstract: The damascene wiring structure includes a base including a main surface provided with a groove, an insulating layer including a first portion provided on an inner surface of the groove and a second portion provided on the main surface, a metal layer provided on the first portion, a wiring portion embedded in the groove, and a cap layer provided to cover the second portion, an end portion of the metal layer, and the wiring portion. A surface of a boundary part between the first portion and the second portion includes an inclined surface inclined with respect to a direction perpendicular to the main surface. The end portion of the metal layer enters between the cap layer and the inclined surface, and in the end portion, a first surface along the cap layer and a second surface along the inclined surface form an acute angle.
    Type: Application
    Filed: October 30, 2019
    Publication date: December 16, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Daiki SUZUKI, Nao INOUE, Katsumi SHIBAYAMA
  • Publication number: 20210372854
    Abstract: A light detection device includes a Fabry-Perot interference filter, a light detector, a spacer that has a placement surface on which a portion outside a light transmission region in a bottom surface of the interference filter is placed, and an adhesive member that adheres the interference filter and the spacer to each other. Elastic modulus of the adhesive member is smaller than elastic modulus of the spacer. At least a part of a lateral surface of the interference filter is located on the placement surface such that a part of the placement surface of the spacer is disposed outside the lateral surface. The adhesive member is disposed in a corner portion formed by the lateral surface of the interference filter and the part of the placement surface of the spacer and contacts each of the lateral surface and the part of the placement surface.
    Type: Application
    Filed: August 10, 2021
    Publication date: December 2, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Masaki HIROSE, Katsumi SHIBAYAMA, Takashi KASAHARA, Toshimitsu KAWAI, Takehiko YASHIRO, Mitsushi MINENO, Shigeru SUZUKI
  • Publication number: 20210364681
    Abstract: A suction method is provided as a method of performing, by using a suction collet, suction of a Fabry-Perot interference filter including a substrate and a laminated structure that is provided on the substrate and that includes a main surface facing the side opposite to the substrate, the method including a first step of arranging the suction collet so as to face the main surface, a second step of bringing the suction collet into contact with the Fabry-Perot interference filter after the first step, and a third step of suctioning the Fabry-Perot interference filter by using the suction collet after the second step.
    Type: Application
    Filed: November 9, 2018
    Publication date: November 25, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Masaki HIROSE, Katsumi SHIBAYAMA, Takashi KASAHARA, Toshimitsu KAWAI, Hiroki OYAMA, Yumi KURAMOTO
  • Publication number: 20210362351
    Abstract: A suction method is provided as a method of performing, by using a suction collet, suction of a Fabry-Perot interference filter including: a substrate; a laminated structure that is provided on the substrate and that includes a main surface facing a side opposite to the substrate; and a thinned portion that is located outside the laminated structure when viewed in a direction intersecting the main surface and that is recessed to a side of the substrate with respect to the main surface, the method including: a first step of arranging the suction collet so as to face the main surface; a second step of bringing the suction collet into contact with the Fabry-Perot interference filter after the first step; and a third step of suctioning the Fabry-Perot interference filter by using the suction collet after the second step.
    Type: Application
    Filed: November 9, 2018
    Publication date: November 25, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Masaki HIROSE, Katsumi SHIBAYAMA, Takashi KASAHARA, Toshimitsu KAWAI, Hiroki OYAMA, Yumi KURAMOTO