Patents by Inventor Katsumi Shimaji

Katsumi Shimaji has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus
    Patent number: 5701627
    Abstract: A single transport path for transporting a substrate between the cassettes and a plurality of processing units, is arranged between the cassette storing means and the processing means. Hence, it is possible to skip some processing units or to change the order of the processing units easily, with simplifying the construction of the apparatus. Furthermore, the single transport path causes to reduce the space for transporting the substrate.
    Type: Grant
    Filed: September 27, 1996
    Date of Patent: December 30, 1997
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Yoshio Matsumura, Katsumi Shimaji