Abstract: In an apparatus for measuring shapes of both sides of a plate, a measuring apparatus body includes a reference plane of a longitudinal surface plate disposed in an almost vertical state at one end on a metallic bed, a holding mechanism for holding a plate to be measured in almost parallel therewith, and a displacement gauge scanning column. The displacement gauge scanning column includes a first air slide for mounting a first (second) displacement gauge and a second air slide for mounting a third displacement gauge, and is moved in a horizontal axis direction along a pair of V grooves. Moreover, the first (second) air slide is moved in a vertical axis direction. A shape of one of plate surfaces of the plate to be measured is measured by the scan of the first (second) displacement gauge, and at the same time, a shape of the other surface of the plate surface is measured by the scan of the third displacement gauge.

Abstract: In an apparatus for measuring shapes of both sides of a plate, a measuring apparatus body includes a reference plane of a longitudinal surface plate disposed in an almost vertical state at one end on a metallic bed, a holding mechanism for holding a plate to be measured in almost parallel therewith, and a displacement gauge scanning column. The displacement gauge scanning column includes a first air slide for mounting a first (second) displacement gauge and a second air slide for mounting a third displacement gauge, and is moved in a horizontal axis direction along a pair of V grooves. Moreover, the first (second) air slide is moved in a vertical axis direction. A shape of one of plate surfaces of the plate to be measured is measured by the scan of the first (second) displacement gauge, and at the same time, a shape of the other surface of the plate surface is measured by the scan of the third displacement gauge.

Abstract: A coarse/fine movement aligning apparatus of this invention includes a coarse movmeent driver for coarsely moving an object to be aligned, a fine adjustment for finely adjusting the object to be aligned, a position detector for detecting the position of the object to be aligned, a coarse/fine movement controller for selectively and simultaneously operating the coarse movment driver and the fine adjustment on the basis of a difference between the detection position obtained by the position detector and the target position of the object to be aligned, and an ultrafine movement controller for ultrafinely operating the fine adjustment to cause the object to be aligned to coincide with the target position.

Abstract: A polishing apparatus comprising a tool for polishing a surface of a workpiece, a table for supporting a workpiece, a piezoelectric element for minutely driving the table, a load detector for detecting the load applied from the tool to the workpiece supported on the table, and a load controller for controlling the drive means in accordance with the load detected by the detector. The piezoelectric element moves the table minutely in the same direction as, or the direction opposite to, the direction in which said tool applies a load to the workpiece.

Abstract: An apparatus and method for finishing an X-ray mirror, having a substantially cylindrical mirror body and a reflecting mirror surface on the inner surface of the mirror body, includes a support post supporting the mirror body, and a male member which is inserted into an unfinished mirror body. The male member includes a chamber therein, an outer circumferential surface shaped in correspondence with the reflecting mirror surface, and a number of fine holes open to the outer circumferential surface. The male member is supported by a support section so that the outer circumferential surface faces the reflecting mirror surface with a required gap. An abrasive solution containing free abrasive grains is ejected toward the reflecting mirror surface from the outer circumferential surface of the male member through the fine holes, thereby polishing the reflecting mirror surface.

Abstract: Table equipment which comprises a frame, a table that can fix an object and move relative to the frame, a table guide for guiding the movable table on the frame, in a line inclined to the horizontal plane, a power source for driving the table along the table guide, a power drive connection for drivingly connected the driving power source with the table, and a force applying member applying to the table a force which counterbalances the gravity at the table and the object mounted thereon, the force applying member having a counterweight smaller than the total weight of the movable table and the mounted object.

Abstract: An X-ray mirror apparatus includes a substantially cylindrical mirror body and a pair of light shielding members provided at both open ends of the mirror body. The inner surface of the mirror body constitutes a reflecting mirror surface having a surface of revolution. Each light shielding member has a light shielding plate arranged at the opened end of the mirror body to block it, and an annular slit allowing passage of X-rays entering onto and reflected on the reflecting mirror surface. A cylindrical fitting member is fixed to the light shielding plate to be coaxial with the slit. The fitting member is fitted on the opened end portion of the mirror body, thereby positioning the light shielding member so that the slit is located coaxial with the axis of the reflecting mirror surface.

Abstract: In a rotating mirror scanner, a polygonal mirror is fixed between a pair of journals of a spindle. A rotor is fixed on the spindle, and a rotor magnet constituting a magnetic thrust bearing is fixed to one end of the spindle. One bearing of a dynamic pressure type and a ring-shaped stator magnet which constitutes the magnetic thrust bearing are both fixed in a hollow housing having an opening. The spindle is inserted into the housing through the opening thereof so that the outer peripheral surface of the rotor magnet faces the inner peripheral surface of the stator magnet, and that one journal is fitted in the one bearing. Thus, the spindle is set in the housing. A cover having the other bearing is fitted in the opening of the housing so that the other journal is supported by the other bearing.

Abstract: A precise feeding table apparatus which comprises an XY-table assembly including a Y-table and an X-table mounted thereon. Electric motors for supplying a driving force to feed the X- and Y-tables are set on a base of the table apparatus. A driving shaft of the electric motor for the Y-table takes the form of a ball screw to cause a guide carriage supported by the driving shaft to make a minute reciprocation. A moment derived from the reciprocation of the guide carraige is not directly transmitted to the Y-table. A connection rod moving jointly with the guide carriage is connected to an output shaft fitted to the Y-table by means of a coupling including a fluid bearing. The fluid bearing supports the connecting rod in contactless relationship, thereby preventing the vibrations and moments of the connecting rod from being transmitted to the output shaft.

Abstract: A bearing device comprising a rotatable shaft, a spherical body fixed to said shaft, a bearing body having a spherical concave bearing face corresponding to said spherical body, and a radial bearing for supporting said shaft at a position spaced apart from said bearing body.