Abstract: A microscopic area scanning apparatus is provided with at least three hollow cylindrical piezoelectric elements each driven in three XYZ directions by one of divided electrodes. Three or more hollow cylindrical piezoelectric elements are arranged on a circumference of a common plane. Balls are each axially provided at a free end of the hollow cylindrical piezoelectric element. Ball retainers rotatably and slidably support a respective ball in contact therewith. A sample stage is fixed to the ball retainers. A table fixes the hollow cylindrical piezoelectric elements on the circumference of the common plane. Thus, the microscopic area scanning apparatus can realize both a wide X-Y scanning range and a high Z-direction resonant frequency without utilizing an elastic hinge.

Abstract: A scanning near-field optic/atomic-force microscope comprises a holder for holding a sample immersed in a liquid, and a plate disposed over the holder for covering a surface of the liquid and for transmitting therethrough a laser light. A probe has an optical propagation body terminating in a distal end, and a light reflecting element disposed thereon, and the probe is immersed in the liquid. A light source emits a light which is introduced into the optical propagation body of the probe, which guides the light through the probe and out the distal end thereof to irradiate the sample. A detecting device detects information from the light irradiated on the sample and converts the information to an electric signal. A laser source irradiates the light reflecting element of the probe with a laser light for detecting a bending amount of the probe resulting from an interaction between the sample and the probe. An angle adjusting mechanism adjusts an optical axis of the laser light transmitted through the plate.

Abstract: In a method of making a cantilever for atomic force micoscopes, to provide a method of manufacturing a high-resolution cantilever having a sharpened metal needle by introducing an electrolytic polishing process. In the method of making a cantilever, an erect metal structure, an electrode layer and an electric insulation layer are formed, and they are subjected to the electrolytic polishing process to allow a large number of erect metal structures formed on a silicon wafer to be formed into sharpened metal needles at a time. The cantilever having a sharpened metal needle manufactured by the method of this invention makes it possible to measure with high resolution specimen surface with deep grooves and holes and high projections that cannot be measured by the conventional cantilever having a pyramidal needle.