Abstract: An object of the present invention is to provide the X-ray tube which improves the workability of the baking for obtaining the ultra-high vacuum of the X-ray tube having a field emission type electron gun and have a stable performance. The X-ray tube comprises a field emission type electron gun chamber, an electron beam aperture, an X-ray target and a vacuum pump, in one body with a vacuum sealing structure (vacuum tube section). The vacuum tube section is attachable and detachable to the electromagnetic lens section in the X-ray tube, thereby it is possible to perform the baking by removing only the vacuum tube section. The fitting portions for positioning are provided at the vacuum tube section and the electromagnetic lens section, and therefore it is a constitution to easily perform an optical axis alignment at a mounting time after the baking.

Abstract: An object of the present invention is to provide the X-ray tube which improves the workability of the baking for obtaining the ultra-high vacuum of the X-ray tube having a field emission type electron gun and have a stable performance. The X-ray tube comprises a field emission type electron gun chamber, an electron beam aperture, an X-ray target and a vacuum pump, in one body with a vacuum sealing structure (vacuum tube section). The vacuum tube section is attachable and detachable to the electromagnetic lens section in the X-ray tube, thereby it is possible to perform the baking by removing only the vacuum tube section. The fitting portions for positioning are provided at the vacuum tube section and the electromagnetic lens section, and therefore it is a constitution to easily perform an optical axis alignment at a mounting time after the baking.

Abstract: In a method of manufacturing a turbine nozzle having a nozzle blade body, a flat plate is prepared. A first support plate for supporting an inner ring side of the turbine nozzle is blanked from the flat plate by using laser beam cutting. A second support plate for supporting an outer ring side of the turbine nozzle is blanked from the flat plate by using laser beam cutting. Each of the first and second support plates in bent so as to form each of the first and second support plates as a ring member. While controlling laser beam based on a program, by the laser beam, the ring-formed first and second support plates are drilled so as to form holes therethrough. At that time, each of the holes has a three-dimensional blade profile, and the three-dimensional blade profile corresponds to a three-dimensional profile of the nozzle blade body. After that, the nozzle blade body is inserted into the holes of the first and second support platen so as to weld the nozzle blade body thereto by using a laser beam.

Abstract: In a method of producing a resin-encapsulated semiconductor device, a lead frame having an semiconductor element bonded thereto and wire-bonded thereto is set as an insert into an injection mold. An epoxy resin molding compound is injected into the mold by an injection molding. In this method, an injection pressure of the injection molding machine is gradually increased in such a manner that a maximum pressure of 30 kg/cm.sup.2 to 300 kg/cm.sup.2 is achieved at the time when 80% to 95% of a total amount of the epoxy resin molding compound to be injected is injected into the mold. Subsequently, the remaining epoxy resin molding compound is injected into the mold at an injection pressure of 20 kg/cm.sup.2 to 100 kg/cm.sup.2. A heating cylinder of the injection molding machine is divided into a plurality of zones which are controlled in the temperature independently. The zone nearest to a nozzle of the heating cylinder is controlled to 65.degree. C.-110.degree. C.