Patents by Inventor Katsunori Onishi
Katsunori Onishi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11598086Abstract: An H-beam joint structure for joining ends of H-beam steel materials adjacent to each other. The steel materials have a flange and a web. The joint structure includes: a transmission plate arranged parallel to a front surface of the web on at least one side of the web of the H-beam and the steel material, and welded to a back surface of the flange; and a coupling plate provided in close contact with the transmission plate to connect the H-beam and the steel material. A web of the H-beam, the web of the steel material and the transmission plate are bolted via the coupling plate. As a result, there is provided an H-beam joint structure which has a joining strength equivalent to a conventional joint structure for an H-beam, and also which can easily be constructed to have less parts and make front surfaces of the flanges flat.Type: GrantFiled: October 11, 2018Date of Patent: March 7, 2023Assignee: BUILDING SYSTEM DESIGN CO., LTD.Inventor: Katsunori Onishi
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Publication number: 20200318342Abstract: An H-beam joint structure for joining ends of H-beam steel materials adjacent to each other. The steel materials have a flange and a web. The joint structure includes: a transmission plate arranged parallel to a front surface of the web on at least one side of the web of the H-beam and the steel material, and welded to a back surface of the flange; and a coupling plate provided in close contact with the transmission plate to connect the H-beam and the steel material. A web of the H-beam, the web of the steel material and the transmission plate are bolted via the coupling plate. As a result, there is provided an H-beam joint structure which has a joining strength equivalent to a conventional joint structure for an H-beam, and also which can easily be constructed to have less parts and make front surfaces of the flanges flat.Type: ApplicationFiled: October 11, 2018Publication date: October 8, 2020Inventor: Katsunori ONISHI
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Patent number: 10741668Abstract: The present disclosure relates to semiconductor structures and, more particularly, to replacement metal gate structures and methods of manufacture. The structure includes at least one short channel device including a dielectric material, a workfunction metal, and a capping material, and a long channel device comprising the dielectric material, the workfunction metal and fluorine free gate conductor material.Type: GrantFiled: July 19, 2017Date of Patent: August 11, 2020Assignee: GLOBALFOUNDRIES INC.Inventors: Bala Haran, Ruilong Xie, Balaji Kannan, Katsunori Onishi, Vimal K. Kamineni
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Patent number: 10658363Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a cut inside a replacement metal gate trench to mitigate n-p proximity effects and methods of manufacture. The structure described herein includes: a first device; a second device, adjacent to the first device; a dielectric material, of the first device and the second device, including a cut within a trench between the first device and the second device; and a common gate electrode shared with the first device and the second device, the common gate electrode provided over the dielectric material and contacting underlying material within the cut.Type: GrantFiled: September 6, 2019Date of Patent: May 19, 2020Assignee: GLOBALFOUNDRIES INC.Inventors: Balaji Kannan, Ayse M. Ozbek, Tao Chu, Bala Haran, Vishal Chhabra, Katsunori Onishi, Guowei Xu
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Publication number: 20200056370Abstract: A coupling structure in which two structure members (1, 2) are connected to each other. The structure members integrally have projecting parts (32, 42) projecting from one side part (A side or B side) thereof, respectively. The two structure members are close to each other, and the projecting parts overlap the side parts of the counterpart structure members (2, 1) so as to be positioned on sides opposite to each other, respectively. The projecting parts and the side parts of the counterpart structure members are each fixed by bolt joint. Thus, mainly, it is possible to provide a coupling in which the number of components used for connecting the structure members to each other is reduced, projection from (flange parts of) the structure members is eliminated, and construction is easily performed.Type: ApplicationFiled: March 6, 2018Publication date: February 20, 2020Inventors: Miki HEBIISHI, Katsunori ONISHI
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Publication number: 20190393221Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a cut inside a replacement metal gate trench to mitigate n-p proximity effects and methods of manufacture. The structure described herein includes: a first device; a second device, adjacent to the first device; a dielectric material, of the first device and the second device, including a cut within a trench between the first device and the second device; and a common gate electrode shared with the first device and the second device, the common gate electrode provided over the dielectric material and contacting underlying material within the cut.Type: ApplicationFiled: September 6, 2019Publication date: December 26, 2019Inventors: Balaji KANNAN, Ayse M. OZBEK, Tao CHU, Bala HARAN, Vishal CHHABRA, Katsunori ONISHI, Guowei XU
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Patent number: 10446550Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a cut inside a replacement metal gate trench to mitigate n-p proximity effects and methods of manufacture. The structure described herein includes: a first device; a second device, adjacent to the first device; a dielectric material, of the first device and the second device, including a cut within a trench between the first device and the second device; and a common gate electrode shared with the first device and the second device, the common gate electrode provided over the dielectric material and contacting underlying material within the cut.Type: GrantFiled: October 13, 2017Date of Patent: October 15, 2019Assignee: GLOBALFOUNDRIES INC.Inventors: Balaji Kannan, Ayse M. Ozbek, Tao Chu, Bala Haran, Vishal Chhabra, Katsunori Onishi, Guowei Xu
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Patent number: 10354928Abstract: A method of controlling NFET and PFET gate heights across different gate widths with chamfering and the resulting device are provided. Embodiments include forming an ILD over a fin; forming cavities in the ILD, each with similar or different widths; forming a high-K dielectric layer over the ILD and in each cavity; forming a pWF metal layer over the dielectric layer in one cavity; recessing the pWF metal layer to a height above the fin; forming an nWF metal layer in the cavities over the dielectric and pWF metal layers; recessing the nWF metal layer to a height above the pWF metal layer; forming a barrier layer over the dielectric and nWF metal layers; filling the cavities with a low-resistive metal; and recessing the barrier and dielectric layers to a height above the nWF metal layer; and concurrently etching the low-resistive metal.Type: GrantFiled: July 18, 2018Date of Patent: July 16, 2019Assignee: GLOBALFOUNDRIES INC.Inventors: Suraj Kumar Patil, Katsunori Onishi, Pei Liu, Chih-Chiang Chang
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Publication number: 20190131424Abstract: The present disclosure relates to methods for forming IC structures having recessed gate spacers and related IC structures. A method may include: forming a first and second dummy gate over a fin, each dummy gate having gate spacers disposed on sidewalls thereof such that an opening is disposed between a first gate spacer and a second gate spacer, the opening exposing a source/drain region; recessing the first and second gate spacers; forming an etch stop layer within the opening such that the etch stop layer extends vertically along the recessed first and second gate spacers; forming a dielectric fill over the etch stop layer to substantially fill the opening; replacing the first and second dummy gates with first and second RMG structures; recessing the first and second RMG structures; and forming a gate cap layer over the first and second RMG structures.Type: ApplicationFiled: November 2, 2017Publication date: May 2, 2019Inventors: Guowei Xu, Suraj K. Patil, Hui Zang, Katsunori Onishi, Keith H. Tabakman
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Publication number: 20190115346Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a cut inside a replacement metal gate trench to mitigate n-p proximity effects and methods of manufacture. The structure described herein includes: a first device; a second device, adjacent to the first device; a dielectric material, of the first device and the second device, including a cut within a trench between the first device and the second device; and a common gate electrode shared with the first device and the second device, the common gate electrode provided over the dielectric material and contacting underlying material within the cut.Type: ApplicationFiled: October 13, 2017Publication date: April 18, 2019Inventors: Balaji KANNAN, Ayse M. OZBEK, Tao CHU, Bala HARAN, Vishal CHHABRA, Katsunori ONISHI, Guowei XU
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Publication number: 20190096679Abstract: Structures for a field-effect transistor and methods for forming a structure for a field-effect transistor. A gate cavity is formed in a dielectric layer that includes a bottom surface and a plurality sidewalls that extend to the bottom surface. A gate dielectric layer is formed at the sidewalls and the bottom surface of the gate cavity. A work function metal layer is deposited on the gate dielectric layer at the sidewalls and the bottom surface of the gate cavity. A fill metal layer is deposited inside the gate cavity after the work function metal layer is deposited. The fill metal layer is formed in direct contact with the work function metal layer.Type: ApplicationFiled: September 22, 2017Publication date: March 28, 2019Inventors: Balaji Kannan, Bala Haran, Vimal K. Kamineni, Sungkee Han, Neal Makela, Suraj K. Patil, Pei Liu, Chih-Chiang Chang, Katsunori Onishi, Keith Kwong Hon Wong, Ruilong Xie, Chanro Park, Min Gyu Sung
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Patent number: 10242982Abstract: A method includes forming a first plurality of gate structures. A second plurality of gate structures is formed. A first spacer is formed on each of the first and second pluralities of gate structures. A first cavity is defined between the first spacers of a first pair of the first plurality of gate structures. A second cavity is defined between the first spacers of a second pair of the second plurality of gate structures. A second spacer is selectively formed in the second cavity on the first spacer of each of the gate structures of the second pair without forming the second spacer in the first cavity. A first contact is formed contacting the first spacers in the first cavity. A second contact is formed contacting the second spacers in the second cavity.Type: GrantFiled: March 10, 2017Date of Patent: March 26, 2019Assignee: GLOBALFOUNDRIES Inc.Inventors: Ruilong Xie, Katsunori Onishi, Tek Po Rinus Lee
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Publication number: 20190027578Abstract: The present disclosure relates to semiconductor structures and, more particularly, to replacement metal gate structures and methods of manufacture. The structure includes at least one short channel device including a dielectric material, a workfunction metal, and a capping material, and a long channel device comprising the dielectric material, the workfunction metal and fluorine free gate conductor material.Type: ApplicationFiled: July 19, 2017Publication date: January 24, 2019Inventors: Bala HARAN, Ruilong XIE, Balaji KANNAN, Katsunori ONISHI, Vimal K. KAMINENI
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Publication number: 20180323113Abstract: A method of controlling NFET and PFET gate heights across different gate widths with chamfering and the resulting device are provided. Embodiments include forming an ILD over a fin; forming cavities in the ILD, each with similar or different widths; forming a high-K dielectric layer over the ILD and in each cavity; forming a pWF metal layer over the dielectric layer in one cavity; recessing the pWF metal layer to a height above the fin; forming an nWF metal layer in the cavities over the dielectric and pWF metal layers; recessing the nWF metal layer to a height above the pWF metal layer; forming a barrier layer over the dielectric and nWF metal layers; filling the cavities with a low-resistive metal; and recessing the barrier and dielectric layers to a height above the nWF metal layer; and concurrently etching the low-resistive metal.Type: ApplicationFiled: July 18, 2018Publication date: November 8, 2018Inventors: Suraj Kumar PATIL, Katsunori ONISHI, Pei LIU, Chih-Chiang CHANG
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Publication number: 20180261595Abstract: A method includes forming a first plurality of gate structures. A second plurality of gate structures is formed. A first spacer is formed on each of the first and second pluralities of gate structures. A first cavity is defined between the first spacers of a first pair of the first plurality of gate structures. A second cavity is defined between the first spacers of a second pair of the second plurality of gate structures. A second spacer is selectively formed in the second cavity on the first spacer of each of the gate structures of the second pair without forming the second spacer in the first cavity. A first contact is formed contacting the first spacers in the first cavity. A second contact is formed contacting the second spacers in the second cavity.Type: ApplicationFiled: March 10, 2017Publication date: September 13, 2018Inventors: Ruilong Xie, Katsunori Onishi, Tek Po Rinus Lee
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Patent number: 10056303Abstract: A method of controlling NFET and PFET gate heights across different gate widths with chamfering and the resulting device are provided. Embodiments include forming an ILD over a fin; forming cavities in the ILD, each with similar or different widths; forming a high-K dielectric layer over the ILD and in each cavity; forming a pWF metal layer over the dielectric layer in one cavity; recessing the pWF metal layer to a height above the fin; forming an nWF metal layer in the cavities over the dielectric and pWF metal layers; recessing the nWF metal layer to a height above the pWF metal layer; forming a barrier layer over the dielectric and nWF metal layers; filling the cavities with a low-resistive metal; and recessing the barrier and dielectric layers to a height above the nWF metal layer; and concurrently etching the low-resistive metal.Type: GrantFiled: April 21, 2017Date of Patent: August 21, 2018Assignee: GLOBALFOUNDRIES INC.Inventors: Suraj Kumar Patil, Katsunori Onishi, Pei Liu, Chih-Chiang Chang
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Publication number: 20170338325Abstract: We disclose a semiconductor device, comprising a semiconductor substrate; at least one gate structure disposed above the semiconductor substrate, wherein the gate structure comprises a gate structure cavity partially filled with at least one metal layer; and an ultraviolet (UV) cured high density plasma (HDP) nitride cap layer in the gate structure cavity above the at least one metal layer. We also disclose at least one method and at least one system by which the semiconductor device may be formed. The UV cured HDP nitride cap layer may be substantially free of voids or seams, and as a result, the semiconductor device may have a reduced Vt shift relative to comparable semiconductor devices known in the art.Type: ApplicationFiled: May 20, 2016Publication date: November 23, 2017Applicant: GLOBALFOUNDRIES INC.Inventors: Huy Cao, Chih-Chiang Chang, Katsunori Onishi, Songkram Srivathanakul
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Patent number: 9761679Abstract: A performance optimized CMOS FET structure and methods of manufacture are disclosed. The method includes forming source and drain regions for a first type device and a second type device. The method further includes lowering the source and drain regions for the first type device, while protecting the source and drain regions for the second type device. The method further includes performing silicide processes to form silicide regions on the lowered source and drain regions for the first type device and the source and drain regions for the second type device.Type: GrantFiled: March 15, 2016Date of Patent: September 12, 2017Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Paul Chang, Katsunori Onishi, Jian Yu
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Patent number: 9735058Abstract: A performance optimized CMOS FET structure and methods of manufacture are disclosed. The method includes forming source and drain regions for a first type device and a second type device. The method further includes lowering the source and drain regions for the first type device, while protecting the source and drain regions for the second type device. The method further includes performing silicide processes to form silicide regions on the lowered source and drain regions for the first type device and the source and drain regions for the second type device.Type: GrantFiled: July 15, 2016Date of Patent: August 15, 2017Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Paul Chang, Katsunori Onishi, Jian Yu
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Publication number: 20160322258Abstract: A performance optimized CMOS FET structure and methods of manufacture are disclosed. The method includes forming source and drain regions for a first type device and a second type device. The method further includes lowering the source and drain regions for the first type device, while protecting the source and drain regions for the second type device. The method further includes performing silicide processes to form silicide regions on the lowered source and drain regions for the first type device and the source and drain regions for the second type device.Type: ApplicationFiled: July 15, 2016Publication date: November 3, 2016Inventors: Paul CHANG, Katsunori ONISHI, Jian YU