Abstract: A center pipe is used in a plasma torch including a base portion and an electrode to supply cooling water into the electrode. The center pipe includes a pipe body and a contact piece. The pipe body has a tube-like shape with a cooling water channel therein. The pipe body is electrically conductive and configured to be electrically connected to an external power source via the base portion. The contact piece is arranged radially outside the pipe body at an intermediate position between a base end surface and a tip end surface of the pipe body. The contact piece is electrically conductive and energizes the electrode through contact with an internal circumferential surface of the electrode. The base end surface is disposed outside the electrode when the center pipe is inserted into the electrode. The pipe body is configured to be electrically connected to the electrode via the contact piece.

Abstract: A replacement part unit for a plasma torch includes an electrode, an insulation guide, and a nozzle. The insulation guide includes a hole into which the electrode is inserted. The insulation guide is coupled to the electrode by press-fitting or adhesion. The nozzle includes a hole into which the insulation guide is inserted. The nozzle is coupled to the insulation guide by press-fitting or adhesion.

Abstract: A replacement part unit for a plasma torch includes an electrode, an insulation guide, and a nozzle. The insulation guide includes a hole into which the electrode is inserted. The insulation guide is coupled to the electrode by press-fitting or adhesion. The nozzle includes a hole into which the insulation guide is inserted. The nozzle is coupled to the insulation guide by press-fitting or adhesion.

Abstract: A resin insulation guide is used in a plasma torch including an electrode and a nozzle into which the electrode is inserted. The insulation guide is used to couple the electrode and the nozzle, and includes a first internal circumferential surface formed on an inside of the insulation guide, a second internal circumferential surface formed on the inside of the insulation guide, a communication channel, and a heat resistant coating formed on the first internal circumferential surface. The second internal circumferential surface has an inner diameter smaller than an inner diameter of the first internal circumferential surface. The communication channel communicates a space inside the first internal circumferential surface to an outside of the insulation guide, and extends in a direction inclined with respect to an axial direction of the insulation guide.

Abstract: A center pipe is used in a plasma torch including a base portion and an electrode to supply cooling water into the electrode. The center pipe includes a pipe body and a contact piece. The pipe body has a tube-like shape with a cooling water channel therein. The pipe body is electrically conductive and configured to be electrically connected to an external power source via the base portion. The contact piece is arranged radially outside the pipe body at an intermediate position between a base end surface and a tip end surface of the pipe body. The contact piece is electrically conductive and energizes the electrode through contact with an internal circumferential surface of the electrode. The base end surface is disposed outside the electrode when the center pipe is inserted into the electrode. The pipe body is configured to be electrically connected to the electrode via the contact piece.

Abstract: A center pipe is used in a plasma torch for plasma cutting including a base portion and an electrode. The center pipe is inserted into the electrode and supplies cooling water into the electrode. The center pipe includes a pipe body and a contact piece. The pipe body is electrically connected to an electrical power source outside of the plasma torch via the base portion. The pipe body includes a cooling water channel therein. The pipe body is formed with an electrically conductive body. The contact piece is provided on the external circumferential surface of the pipe body and energizes the electrode through contact with the internal circumferential surface of the electrode. The contact piece has elasticity to produce a counterforce when pressed in the radial direction of the pipe body. The contact piece is formed with an electrically conductive body.

Abstract: A plurality of cutout members are cut out from a plate blank by a plasma arc generated from a plasma torch by a method including a piercing step and a cutting step. In the piercing step, an aperture is formed on an outer peripheral side of a cutout member by maintaining the plasma torch at a first height from the plate blank on the outer peripheral side of the cutout member while the plasma arc is generated from the plasma torch and by moving the plasma torch relative to the plate blank in a horizontal direction. In the cutting step, a continuous cutting groove is formed along an outer contour of the cutout member by setting the plasma torch at a second height lower than the first height and by moving the plasma torch in the horizontal direction along an incision part and a processing line continuing to the incision part.

Abstract: A resin insulation guide is used in a plasma torch including an electrode and a nozzle into which the electrode is inserted. The insulation guide is used to couple the electrode and the nozzle, and includes a first internal circumferential surface formed on an inside of the insulation guide, a second internal circumferential surface formed on the inside of the insulation guide, a communication channel, and a heat resistant coating formed on the first internal circumferential surface. The second internal circumferential surface has an inner diameter smaller than an inner diameter of the first internal circumferential surface. The communication channel communicates a space inside the first internal circumferential surface to an outside of the insulation guide, and extends in a direction inclined with respect to an axial direction of the insulation guide.

Abstract: A replacement part unit for a plasma torch includes an electrode, an insulation guide, and a nozzle. The insulation guide includes a hole into which the electrode is inserted. The insulation guide is coupled to the electrode by press-fitting or adhesion. The nozzle includes a hole into which the insulation guide is inserted. The nozzle is coupled to the insulation guide by press-fitting or adhesion.

Abstract: A center pipe is used in a plasma torch for plasma cutting including a base portion and an electrode. The center pipe is inserted into the electrode and supplies cooling water into the electrode. The center pipe includes a pipe body and a contact piece. The pipe body is electrically connected to an electrical power source outside of the plasma torch via the base portion. The pipe body includes a cooling water channel therein. The pipe body is formed with an electrically conductive body. The contact piece is provided on the external circumferential surface of the pipe body and energizes the electrode through contact with the internal circumferential surface of the electrode. The contact piece has elasticity to produce a counterforce when pressed in the radial direction of the pipe body. The contact piece is formed with an electrically conductive body.

Abstract: A plurality of cutout members are cut out from a plate blank by a plasma arc generated from a plasma torch by a method including a piercing step and a cutting step. In the piercing step, an aperture is formed on an outer peripheral side of a cutout member by maintaining the plasma torch at a first height from the plate blank on the outer peripheral side of the cutout member while the plasma arc is generated from the plasma torch and by moving the plasma torch relative to the plate blank in a horizontal direction. In the cutting step, a continuous cutting groove is formed along an outer contour of the cutout member by setting the plasma torch at a second height lower than the first height and by moving the plasma torch in the horizontal direction along an incision part and a processing line continuing to the incision part.

Abstract: A stage for a substrate temperature control apparatus having high reliability at low cost by preventing thermal deformation of a plate while employing a material other than ceramics as a material of the plate. The stage is used for mounting a substrate in the substrate temperature control apparatus for controlling a temperature of the substrate, and the stage includes: a plate having a first surface facing the substrate and a second surface opposite to the first surface; and a planar heater bonded to the second surface of the plate, wherein surface treatment is performed in a first thickness on the first surface of the plate, and the surface treatment is performed in a second thickness thinner than the first thickness or no surface treatment is performed on a predetermined area of the second surface of the plate.

Abstract: A stage for a substrate temperature control apparatus having high responsibility at low cost by preventing thermal deformation of a plate while employing a material other than ceramics as a material of the plate. The stage for a substrate temperature control apparatus is a stage to be used for mounting a substrate in the substrate temperature control apparatus for controlling a temperature of the substrate, and the stage includes: a plate having a first surface facing the substrate and a second surface opposite to the first surface; and a planar heater bonded to the second surface of the plate, wherein surface treatment is performed in a first thickness on the first surface of the plate, and the surface treatment is performed in a second thickness thinner than the first thickness or no surface treatment is performed on a predetermined area of the second surface of the plate.

Abstract: A film-like temperature sensor for more accurately measuring the temperatures at plural locations on the surface of a semiconductor wafer comprises a base film made of an insulating material; plural thin-film thermal elements for sensing temperature; plural thin-film leads, connected to the thermal elements; and plural thin-film terminals connected to the ends of the leads. The thermal elements, leads, and terminals are integrally formed either on the surface or in the thickness of the base film. The base film has a flat shape like a paddle, and comprises a head portion to be attached to the surface of a semiconductor wafer, and a strip-shaped tail portion extending outwardly of the semiconductor wafer. The plural thermal elements are arranged on the head portion in the form of either a concentric circle, spiral, matrix, or raster, and the plural terminals are arranged on the tail portion.

Abstract: A film-like temperature sensor for more accurately measuring the temperatures at plural locations on the surface of a semiconductor wafer comprises a base film made of an insulating material; plural thin-film thermal elements for sensing temperature; plural thin-film leads, connected to the thermal elements; and plural thin-film terminals connected to the ends of the leads. The thermal elements, leads, and terminals are integrally formed either on the surface or in the thickness of the base film. The base film has a flat shape like a paddle, and comprises a head portion to be attached to the surface of a semiconductor wafer, and a strip-shaped tail portion extending outwardly of the semiconductor wafer. The plural thermal elements are arranged on the head portion in the form of either a concentric circle, spiral, matrix, or raster, and the plural terminals are arranged on the tail portion.