Abstract: An electro-pneumatic air pressure regulator includes a primary pressure introduction port, a secondary pressure output port, a pilot pressure chamber, a main valve for opening and closing a communicating conduit, a floating piston which actuates the main valve, a nozzle conduit via which the pilot pressure chamber is communicatively connected to the atmosphere, a flapper which includes a leaf spring facing an open end of the nozzle conduit, and an electromagnetic drive system which deforms the leaf spring to vary a position of the flapper relative to the open end of the nozzle conduit in accordance with the magnitude of an analogue input signal. The flapper includes a conical projection which projects toward the open end of the nozzle conduit. A conical recess corresponding to the conical projection is formed on an end face of the nozzle conduit around the open end thereof.

Abstract: A vibration isolation table includes a stationary housing having an opening on a top surface thereof; a primary movable base which is supported by the stationary housing, and includes a bottomed hollow cylindrical portion which extends downwards into the stationary housing, and a flange portion which projects radially outwards from an upper end of the bottomed hollow cylindrical portion; a pressure chamber formed between the flange portion and the top surface of the stationary housing; and a vibration-free movable base on which an object to be isolated from vibration is mounted, the vibration-free movable base having a swingable rod which is inserted into the bottomed hollow cylindrical portion so that a bottom end of the swingable rod is supported by a base of the bottomed hollow cylindrical portion in a manner to allow the swingable rod to swing with respect to the bottomed hollow cylindrical portion.

Abstract: A vibration isolation table includes a stationary housing having an opening on top thereof; a pressure-tight flexible member which closes the opening to form a first pressure chamber in the stationary housing; a primary movable base which is coupled to a central portion of the pressure-tight flexible member, the primary movable base having a bottomed hollow cylindrical member; an intermediate movable base having a swingable rod which is inserted into the bottomed hollow cylindrical member so that a bottom end of the swingable rod is supported thereby to allow the swingable rod to swing with respect to the bottomed hollow cylindrical member; and a vibration-free base on which an object to be isolated from vibration is mounted, a second pressure chamber being formed between the intermediate movable base and the vibration-free base, the second pressure chamber being capable of expanding and contracting vertically.

Abstract: An electro-pneumatic air pressure regulator includes a primary pressure introduction port, a secondary pressure output port, a pilot pressure chamber, a main valve for opening and closing a communicating conduit, a floating piston which actuates the main valve, a nozzle conduit via which the pilot pressure chamber is communicatively connected to the atmosphere, a flapper which includes a leaf spring facing an open end of the nozzle conduit, and an electromagnetic drive system which deforms the leaf spring to vary a position of the flapper relative to the open end of the nozzle conduit in accordance with the magnitude of an analogue input signal. The flapper includes a conical projection which projects toward the open end of the nozzle conduit. A conical recess corresponding to the conical projection is formed on an end face of the nozzle conduit around the open end thereof.

Abstract: A vibration isolation table includes a stationary housing having an opening on a top surface thereof; a primary movable base which is supported by the stationary housing, and includes a bottomed hollow cylindrical portion which extends downwards into the stationary housing, and a flange portion which projects radially outwards from an upper end of the bottomed hollow cylindrical portion; a pressure chamber formed between the flange portion and the top surface of the stationary housing; and a vibration-free movable base on which an object to be isolated from vibration is mounted, the vibration-free movable base having a swingable rod which is inserted into the bottomed hollow cylindrical portion so that a bottom end of the swingable rod is supported by a base of the bottomed hollow cylindrical portion in a manner to allow the swingable rod to swing with respect to the bottomed hollow cylindrical portion.

Abstract: A vibration isolation table includes a stationary housing having an opening on top thereof; a pressure-tight flexible member which closes the opening to form a first pressure chamber in the stationary housing; a primary movable base which is coupled to a central portion of the pressure-tight flexible member, the primary movable base having a bottomed hollow cylindrical member; an intermediate movable base having a swingable rod which is inserted into the bottomed hollow cylindrical member so that a bottom end of the swingable rod is supported thereby to allow the swingable rod to swing with respect to the bottomed hollow cylindrical member; and a vibration-free base on which an object to be isolated from vibration is mounted, a second pressure chamber being formed between the intermediate movable base and the vibration-free base, the second pressure chamber being capable of expanding and contracting vertically.