Abstract: Provided is a prober capable of suppressing the increase in installation area and the increase in device cost, and also improving the throughput, while maintaining the accuracy of the moving position of an alignment device shared by each of measuring units. The prober includes: a plurality of measuring units, each of which has a probe card electrically connected to a test head; a wafer chuck that holds a wafer in which a plurality of chips are formed; an alignment device which performs relative alignment between the probe card and the wafer held by the wafer chuck; a moving device which moves the alignment device among the measuring units; and a positioning and fixing device which is provided for every of the measuring units, and positions and fixes the alignment device which is moved to each of the measuring units.

Abstract: Provided is a prober capable of suppressing the increase in installation area and the increase in device cost, and also improving the throughput, while maintaining the accuracy of the moving position of an alignment device shared by each of measuring units. The prober includes: a plurality of measuring units, each of which has a probe card electrically connected to a test head; a wafer chuck that holds a wafer in which a plurality of chips are formed; an alignment device which performs relative alignment between the probe card and the wafer held by the wafer chuck; a moving device which moves the alignment device among the measuring units; and a positioning and fixing device which is provided for every of the measuring units, and positions and fixes the alignment device which is moved to each of the measuring units.

Abstract: To provide a grinding machine and a centering method for the centers thereof in which the requisite space for the center support rotating mechanism for a workpiece and the in-feed mechanism is reduced to facilitate miniaturization and in which it is easy to secure the space for the supply and discharge of the workpiece and sizing measurement. A motor built-in type main spindle retaining a rotary drive center and a motor built-in type tailstock spindle retaining a tailstock center are swiveled by in-feed means eccentrically supporting them, whereby the rotary drive center and the tailstock center make an in-feed motion with respect to a grinding wheel.

Abstract: To provide a grinding machine and a centering method for the centers thereof in which the requisite space for the center support rotating mechanism for a workpiece and the in-feed mechanism is reduced to facilitate miniaturization and in which it is easy to secure the space for the supply and discharge of the workpiece and sizing measurement. A motor built-in type main spindle retaining a rotary drive center and a motor built-in type tailstock spindle retaining a tailstock center are swiveled by in-feed means eccentrically supporting them, whereby the rotary drive center and the tailstock center make an in-feed motion with respect to a grinding wheel.

Abstract: A positioning system comprises a feeding mechanism having three or more feeding units disposed in a moving direction of a moving body. Each of the feeding units has first and second moving elements for clamping and unclamping the moving body, feeding the moving body in the moving direction from an initial position to a target position, and returning the moving body to the initial position. A memory device stores preselected phase and amplitude values of the first and second moving elements. A calculating device calculates phase and amplitude command values for the first and second moving elements based on the phase and amplitude values stored in the memory device. An output device outputs driving command values to the first and second moving elements based on the calculation result of the calculating device. A control device controls the feeding units to clamp the moving body by all of the feeding units after the moving body has been moved to the target position.

Abstract: A grinding machine comprises a grinding member having a thickness greater than 10 mm and an outer contact surface extending in a thickness direction of the grinding member for contacting a surface of a workpiece. The grinding member is supported by a first rotational shaft for rotation about a first rotational axis. A first moving mechanism reciprocates the first rotational shaft along a first displacement axis. The workpiece is supported by a second rotational shaft for rotation about a second rotational axis perpendicular to the first displacement axis and the first rotational axis. A second moving mechanism moves at least one of the workpiece and the grinding member along a second displacement axis to bring the outer contact surface of the grinding member into linear contact with the surface of the workpiece to grind the workpiece. The linear contact between the outer contact surface of the grinding member and the surface of the workpiece has a contact length greater than 10 mm.

Abstract: A dressing apparatus comprises at least two electrode pieces each having an arcuate inner surface and being arranged around a grinding stone to define a gap therebetween. A gap adjusting mechanism adjusts the gap between the arcuate inner surface of each of the electrodes and the grinding stone and maintains the gap between the arcuate inner surface of each electrode and the grinding stone equal to each other.

Abstract: It is intended to provide a table driving device which does not make a machine unduly large, and moves a table with high accuracy without being affected by deflection components of a nut as caused by rotation of a feed screw. The table driving device includes a guide portion with which a part of a table is movably engaged, a driving motor for rotating a feed screw, a nut threadedly engaged with the feed screw that is disposed in parallel with a moving direction of the table, a nut holder having a nut connecting portion connected to the nut and an engaging portion movably engaged with the guide portion, and moving along the feed screw and the guide portion together with the nut in accordance with the rotation of the feed screw, and a coupling mechanism for coupling the engaging portion of the nut holder to the part of the table that is engaged with the guide portion through balls that can roll in planes perpendicular to the moving direction of the table.

Abstract: An electrolytic combined processing machine includes a grinding wheel spaced apart from and facing a workpiece, a current switching circuit for switching a coarse grinding to a fine grinding of the workpiece by the grinding wheel, and an infeed switching circuit for switching the infeed speed of an infeed table which allows the grinding wheel to relatively approach the workpiece. The switching operation is based on a measurement result obtained from a size measuring unit which measures a processing amount of the workpiece. During fine grinding, the infeed speed of the grinding wheel is the same as the speed of a passivation coating film generated on the workpiece. Workpieces, particularly of brittle materials, can be processed in a state of less processing distortion with improved surface roughness, flatness and efficiency.