Patents by Inventor Katsushi Yoshioka
Katsushi Yoshioka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7105074Abstract: A substrate treating apparatus is provided for eliminating wasteful consumption of a treating solution in a treating mode in which the treating solution is delivered in a strip form to a substrate from a treating solution delivery nozzle sweeping over the substrate. In a first aspect of the invention, collecting vessels are arranged around a developing cup surrounding a wafer supported by a wafer holder. The collecting vessels collect part of a developer delivered from a discharge opening of a developer delivery nozzle outwardly of a surface of the wafer. In a second aspect of the invention, collecting vessels are arranged below a developer delivery nozzle, with collecting openings of the collecting vessels opposed to a discharge opening or openings of the delivery nozzle. The collecting vessels are moved longitudinally of the discharge openings according to a position of the developer delivery nozzle relative to the wafer.Type: GrantFiled: July 22, 2002Date of Patent: September 12, 2006Assignee: Dainippon Screen Mfg. Co., Ltd.Inventors: Osamu Tamada, Tsuyoshi Mitsuhashi, Minobu Matsunaga, Katsushi Yoshioka, Kenji Sugimoto, Kaoru Aoki, Moritaka Yano, Satoshi Yamamoto, Masakazu Sanada, Takashi Nagao, Mitsumasa Kodama
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Patent number: 6893171Abstract: A substrate treating apparatus disclosed herein realizes improved throughput. The substrate treating apparatus according to this invention includes an antireflection film forming block, a resist film forming block and a developing block arranged in juxtaposition. Each block includes chemical treating modules, heat-treating modules and a single main transport mechanism. The main transport mechanism transports substrates within each block. Transfer of the substrates between adjacent blocks is carried out through substrate rests. The main transport mechanism of each block is not affected by movement of the main transport mechanisms of the adjoining blocks. Consequently, the substrates may be transported efficiently to improve the throughput of the substrate treating apparatus.Type: GrantFiled: April 16, 2003Date of Patent: May 17, 2005Assignee: Dainippon Screen Mfg. Co., Ltd.Inventors: Yoshiteru Fukutomi, Kenji Sugimoto, Takashi Ito, Takeo Okamoto, Yukihiko Inagaki, Katsushi Yoshioka, Tsuyoshi Mitsuhashi
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Patent number: 6832863Abstract: A series of substrate transport paths for transporting substrates is arranged on upper and lower stories. Substrates are transferable between the substrate transport path on the first story and the substrate transport path on the second story. The paths include a going-only path for transporting the substrates forward, and a return-only path for transporting the substrates in the opposite direction, these paths being arranged on the upper and lower stories. An indexer connects one end of the substrate transport path on one story to one end of the substrate transport path on the other story. An interface connects the other end of the substrate transport path on one story to the other end of the substrate transport path on the other story. This construction efficiently reduces a waiting time due to interference between the substrates transported along the going-only path and the substrates transported along the return-only path.Type: GrantFiled: June 9, 2003Date of Patent: December 21, 2004Assignee: Dainippon Screen Mfg. Co., Ltd.Inventors: Kenji Sugimoto, Minobu Matsunaga, Masakazu Sanada, Katsushi Yoshioka, Kaoru Aoki, Moritaka Yano, Satoshi Yamamoto, Tsuyoshi Mitsuhashi, Takashi Nagao, Mitsumasa Kodama
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Patent number: 6827782Abstract: A chemical treating apparatus for performing a predetermined treatment of a principal surface of a substrate by delivering a treating solution thereto. The apparatus includes a treating solution delivery nozzle for delivering the treating solution to the principal surface of a substrate. The nozzle has a treating solution reservoir adjacent a tip end thereof for storing the treating solution. A temperature control device holds the treating solution reservoir to control the temperature of the treating solution in the treating solution reservoir through heat exchange with the treating solution.Type: GrantFiled: January 28, 2003Date of Patent: December 7, 2004Assignee: Dainippon Screen Mfg. Co., Ltd.Inventors: Shigehiro Goto, Katsushi Yoshioka, Minobu Matsunaga
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Patent number: 6752543Abstract: A manifold communicatively connects a plurality of coating processing units with an air conditioning unit. The manifold is formed by branching a common pipe into a plurality of distributing pipes. The air conditioning unit performs temperature control to set air passing through a branch point of the manifold to a temperature slightly lower than a target temperature in processing units. Secondary heaters secondarily heat air passing through joints between the distributing pipes and the processing units to the target temperature thereby supplying accurately temperature-controlled air to processing parts. Air from the air conditioning unit is diverted thereby suppressing the height of the overall apparatus. Thus, a substrate processing apparatus capable of inhibiting the height of the overall apparatus from remarkable increase also when vertically stacking processing parts in multiple stages and supplying temperature-controlled air to the processing parts with sufficient accuracy.Type: GrantFiled: April 30, 2003Date of Patent: June 22, 2004Assignee: Dainippon Screen Mfg. Co. Ltd.Inventors: Yoshiteru Fukutomi, Katsushi Yoshioka, Yukihiko Inagaki
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Publication number: 20040005149Abstract: A series of substrate transport paths for transporting substrates is arranged on upper and lower stories. The substrates are transferable between the substrate transport path on the first story and the substrate transport path on the second story. The substrate transport paths define a going-only path for transporting the substrates forward, and a return-only path for transporting the substrates in the opposite direction, the going-only path and return-only path being arranged on the upper and lower stories. An indexer connects one end of the substrate transport path on one story to one end of the substrate transport path on the other story. An interface connects the other end of the substrate transport path on one story to the other end of the substrate transport path on the other story.Type: ApplicationFiled: June 9, 2003Publication date: January 8, 2004Applicant: Dainippon Screen Mfg. Co.,Ltd.Inventors: Kenji Sugimoto, Minobu Matsunaga, Masakazu Sanada, Katsushi Yoshioka, Kaoru Aoki, Moritaka Yano, Satoshi Yamamoto, Tsuyoshi Mitsuhashi, Takashi Nagao, Mitsumasa Kodama
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Publication number: 20030217695Abstract: A manifold communicatively connects a plurality of coating processing units with an air conditioning unit. The manifold is formed by branching a common pipe into a plurality of distributing pipes. The air conditioning unit performs temperature control to set air passing through a branch point of the manifold to a temperature slightly lower than a target temperature in processing units. Secondary heaters secondarily heat air passing through joints between the distributing pipes and the processing units to the target temperature thereby supplying accurately temperature-controlled air to processing parts. Air from the air conditioning unit is diverted thereby suppressing the height of the overall apparatus. Thus, a substrate processing apparatus capable of inhibiting the height of the overall apparatus from remarkable increase also when vertically stacking processing parts in multiple stages and supplying temperature-controlled air to the processing parts with sufficient accuracy.Type: ApplicationFiled: April 30, 2003Publication date: November 27, 2003Applicant: Dainippon Screen Mfg. Co., Ltd.Inventors: Yoshiteru Fukutomi, Katsushi Yoshioka, Yukihiko Inagaki
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Publication number: 20030213431Abstract: A substrate treating apparatus disclosed herein realizes improved throughput. The substrate treating apparatus according to this invention includes an antireflection film forming block, a resist film forming block and a developing block arranged in juxtaposition. Each block includes chemical treating modules, heat-treating modules and a single main transport mechanism. The main transport mechanism transports substrates within each block. Transfer of the substrates between adjacent blocks is carried out through substrate rests. The main transport mechanism of each block is not affected by movement of the main transport mechanisms of the adjoining blocks. Consequently, the substrates may be transported efficiently to improve the throughput of the substrate treating apparatus.Type: ApplicationFiled: April 16, 2003Publication date: November 20, 2003Applicant: Dainippon Screen Mfg. Co., Ltd.Inventors: Yoshiteru Fukutomi, Kenji Sugimoto, Takashi Ito, Takeo Okamoto, Yukihiko Inagaki, Katsushi Yoshioka, Tsuyoshi Mitsuhashi
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Publication number: 20030141314Abstract: A chemical treating apparatus for performing a predetermined treatment of a principal surface of a substrate by delivering a treating solution thereto. The apparatus includes a treating solution delivery nozzle for delivering the treating solution to the principal surface of a substrate. The nozzle has a treating solution reservoir adjacent a tip end thereof for storing the treating solution. A temperature control device holds the treating solution reservoir to control the temperature of the treating solution in the treating solution reservoir through heat exchange with the treating solution.Type: ApplicationFiled: January 28, 2003Publication date: July 31, 2003Applicant: Dainippon Screen Mfg. Co., Ltd.Inventors: Shigehiro Goto, Katsushi Yoshioka, Minobu Matsunaga
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Patent number: 6558053Abstract: A substrate processing apparatus includes a coating section, a developing section, a heat-treating section and a transport mechanism. The coating section has first processing units each for performing a coverage process to supply a photoresist solution to a substrate and cover a surface of the substrate with the photoresist solution, a second processing unit for spinning the substrate, after the coverage process, at high speed to make the photoresist solution into a film, dry the photoresist film, and clean the substrate. All substrates are processed with the same coating conditions to suppress differences in quality among the substrates. The first and second processing units perform the respective processes concurrently to improve the throughput of substrate processing.Type: GrantFiled: April 18, 2002Date of Patent: May 6, 2003Assignee: Dainippon Screen Mfg. Co., Ltd.Inventors: Kazuhito Shigemori, Masakazu Sanada, Minobu Matsunaga, Katsushi Yoshioka, Kenji Sugimoto, Kaoru Aoki, Moritaka Yano, Satoshi Yamamoto, Tsuyoshi Mitsuhashi, Takashi Nagao, Mitsumasa Kodama, Yukihiko Inagaki, Yoshihisa Yamada
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Publication number: 20030017665Abstract: A substrate treating apparatus is provided for eliminating wasteful consumption of a treating solution in a treating mode in which the treating solution is delivered in a strip form to a substrate from a treating solution delivery nozzle sweeping over the substrate. In a first aspect of the invention, collecting vessels are arranged around a developing cup surrounding a wafer supported by a wafer holder. The collecting vessels collect part of a developer delivered from a discharge opening of a developer delivery nozzle outwardly of a surface of the wafer. In a second aspect of the invention, collecting vessels are arranged below a developer delivery nozzle, with collecting openings of the collecting vessels opposed to a discharge opening or openings of the delivery nozzle. The collecting vessels are moved longitudinally of the discharge openings according to a position of the developer delivery nozzle relative to the wafer.Type: ApplicationFiled: July 22, 2002Publication date: January 23, 2003Applicant: Dainippon Screen Mfg. Co., Ltd.Inventors: Osamu Tamada, Tsuyoshi Mitsuhashi, Minobu Matsunaga, Katsushi Yoshioka, Kenji Sugimoto, Kaoru Aoki, Moritaka Yano, Satoshi Yamamoto, Masakazu Sanada, Takashi Nagao, Mitsumasa Kodama
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Publication number: 20020152958Abstract: A substrate processing apparatus includes a coating section, a developing section, a heat-treating section and a transport mechanism. The coating section has first processing units each for performing a coverage process to supply a photoresist solution to a substrate and cover a surface of the substrate with the photoresist solution, a second processing unit for spinning the substrate, after the coverage process, at high speed to make the photoresist solution into a film, dry the photoresist film, and clean the substrate. All substrates are processed with the same coating conditions to suppress differences in quality among the substrates. The first and second processing units perform the respective processes concurrently to improve the throughput of substrate processing.Type: ApplicationFiled: April 18, 2002Publication date: October 24, 2002Applicant: Dainippon Screen Mfg. Co., Ltd.Inventors: Kazuhito Shigemori, Masakazu Sanada, Minobu Matsunaga, Katsushi Yoshioka, Kenji Sugimoto, Kaoru Aoki, Moritaka Yano, Satoshi Yamamoto, Tsuyoshi Mitsuhashi, Takashi Nagao, Mitsumasa Kodama, Yukihiko Inagaki, Yoshihisa Yamada
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Patent number: 6149727Abstract: A spin holder has a disk-like supporting portion, and a circular wall portion for supporting the back side of a substrate is formed inside the periphery of the top surface of the disk-like supporting portion. A circular groove is formed near the periphery of the top surface of the disk-like supporting portion, the circular groove surrounding the outside of the circular wall portion. An O ring is fitted into the circular groove. The top surface of the circular wall portion on the spin holder supports the back side of the substrate and the O ring comes in close contact with the back side of the substrate. Even if a vacuum leakage occurs between the circular wall portion and the back side of the substrate due to suction force created by a vacuum suction source, the O ring keeps the hermetic state in the space between the circular wall portion and the O ring. This prevents mist around the spin holder from being drawn toward the suction surface between the O ring and the substrate.Type: GrantFiled: October 5, 1998Date of Patent: November 21, 2000Assignee: Dainippon Screen Mfg. Co., Ltd.Inventors: Katsushi Yoshioka, Hiroyuki Ogura, Takuya Sanari
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Patent number: 5792259Abstract: A velocity adjusting plate is provided above a substrate processing part in the interior of a substrate processing apparatus which is isolated from the external air. Thus, a downflow which is formed by conditioned air in the interior of the apparatus is separated into downflows having high and low velocities to be supplied to the substrate processing part and the periphery of the substrate processing part respectively. Consequently, the former downflow has a velocity which is suitable for controlling the temperature-humidity on the substrate surface and preventing the substrate from adhesion of particles and fine grains of a processing solution scattered from the substrate, while the latter downflow is suppressed to the minimum velocity which is necessary for preventing dusts and particles from creeping up by dispersion. Thus, it is possible to reduce consumption of air which is adjusted in temperature-humidity while isolating the interior of the apparatus from the external air.Type: GrantFiled: November 21, 1996Date of Patent: August 11, 1998Assignee: Dainippon Screen Mfg. Co., Ltd.Inventors: Katsushi Yoshioka, Yoshiteru Fukutomi, Kenji Sugimoto
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Patent number: 5762709Abstract: A substrate spin coating apparatus for forming a coating film on the upper surface of a spinning substrate includes a spin chuck for supporting and spinning the substrate while holding same substantially in horizontal posture. A scatter preventive cup surrounds lateral and lower regions of the spin chuck, and defines an opening in an upper central region thereof for allowing entry of air flows. An exhaust vent is provided for downwardly exhausting the air flows, and a nozzle is provided for supplying a coating solution through the opening of the scatter preventive cup to the upper surface of the substrate. The scatter preventive cup includes an air passage formed in a bottom region thereof and opening toward a lower surface of the substrate. An air flow adjusting unit is connected to the air passage for adjusting an air flow to a predetermined temperature and supplying the adjusted air flow to the air passage.Type: GrantFiled: July 16, 1996Date of Patent: June 9, 1998Assignee: Dainippon Screen Mfg. Co., Ltd.Inventors: Kenji Sugimoto, Katsushi Yoshioka, Seiichiro Okuda, Tsuyoshi Mitsuhashi
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Patent number: 5677000Abstract: A substrate spin treating method and apparatus having a cup cleaner device for cleaning a scatter preventive cup, which cleaner device does not require attaching and/or detaching of a cleaning jig. The cleaner device is driven through engagement with a spin chuck which operates at a low torque that is provided for normal substrate spin treating operation. During the normal spin treating operation, only the spin chuck is driven by a rotary shaft, with the cup cleaner device being disengaged from the spin chuck and its driving rotary shaft. For a cup cleaning operation, the spin chuck and scatter preventive cup are vertically moved relative to each other to place the cup cleaner device at a cup cleaning height and to drivingly connect the cup cleaner device to the rotary shaft through a torque transmitter.Type: GrantFiled: August 19, 1996Date of Patent: October 14, 1997Assignee: Dainippon Screen Mfg. Co., Ltd.Inventors: Katsushi Yoshioka, Yoshiteru Fukutomi, Tsuyoshi Mitsuhashi, Kenji Sugimoto
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Patent number: 5376216Abstract: A plurality of substrate holding members and a substrate pressing member are disposed on a rotation stage at a peripheral portion. The substrate pressing member includes a magnet and is pivotally supported by the rotation stage. A ring-shaped permanent magnet is located below the rotation stage and forms a ring around the rotation axis of the rotation stage. When a substrate mounted on the rotation stage is rotated and processed, the ring-shaped permanent magnet is positioned in the vicinity of the magnet of the substrate pressing member. This creates a magnetic force between the magnets, causing the substrate pressing member to pivot so that the substrate pressing member contacts the edge of the substrate with a predetermined amount of pressure.Type: GrantFiled: March 30, 1994Date of Patent: December 27, 1994Assignee: Dainippon Screen Mfg. Co., Ltd.Inventors: Katsushi Yoshioka, Koji Nakagawa, Masayuki Itaba, Nobuyasu Hiraoka, Masafumi Takeoka