Patents by Inventor Katsuya NAKATA

Katsuya NAKATA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus and substrate drying method
    Patent number: 11715648
    Abstract: A substrate processing apparatus performs a drying process for drying a substrate with a liquid film formed on a pattern formation surface thereof, using a processing fluid in a supercritical state. The substrate processing apparatus includes a processing container, a holder, and a processing liquid supply. The processing container accommodates the substrate. The holder holds the substrate inside the processing container. The processing liquid supply supplies a processing fluid into the processing container. Further, the holder includes a base, a plurality of support members, and a lifting mechanism. The base is disposed below the substrate. The plurality of support members are provided on the base, and support the substrate from below. The lifting mechanism moves the plurality of support members up and down.
    Type: Grant
    Filed: July 23, 2020
    Date of Patent: August 1, 2023
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Katsuya Nakata, Shogo Fukui
  • SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE DRYING METHOD
    Publication number: 20210043471
    Abstract: A substrate processing apparatus performs a drying process for drying a substrate with a liquid film formed on a pattern formation surface thereof, using a processing fluid in a supercritical state. The substrate processing apparatus includes a processing container, a holder, and a processing liquid supply. The processing container accommodates the substrate. The holder holds the substrate inside the processing container. The processing liquid supply supplies a processing fluid into the processing container. Further, the holder includes a base, a plurality of support members, and a lifting mechanism. The base is disposed below the substrate. The plurality of support members are provided on the base, and support the substrate from below. The lifting mechanism moves the plurality of support members up and down.
    Type: Application
    Filed: July 23, 2020
    Publication date: February 11, 2021
    Inventors: Katsuya NAKATA, Shogo FUKUI