Abstract: The disclosed substrate support includes a first region, a second region, a first electrode, and a second electrode. The first region is configured to hold a substrate placed thereon. The second region is provided to surround the first region and configured to hold an edge ring placed thereon. The first electrode is provided in the first region to receive a first electrical bias. The second electrode is provided in at least the second region to receive a second electrical bias. The second electrode extends below the first electrode to face the first electrode within the first region.

Abstract: The invention relates to cleaning method and cleaning apparatus of air-conditioner used in the operation for cleaning and removing the contamination of the heat exchanger (condenser, evaporator) for composing an air-conditioner, for example, one-package type air-conditioner and separate type air-conditioner, and more particularly to an air-conditioner cleaning method and its cleaning apparatus capable of securely cleaning and removing the dirt sticking to the heat exchanger to the deepest parts, by keeping the open side of the spraying guide body in contact with the cleaning parts of the heat exchanger for composing an air-conditioner, connecting detergent feed means to the closed side of the spraying guide body through an injection pipe, spraying the detergent supplied from the detergent feed means to the area enclosed by the spraying guide body, and cleaning and removing the dirt sticking to the heat exchanger by the foamy detergent, while preventing splash-back of the detergent.

Abstract: A fluid operated pump displacement control system is provided wherein a self pressure is defined as a first control signal, and characterized in that an arbitrary switchable second control signal different from the first control signal is added to the first control signal, and a displacement is adapted to be switched to a displacement corresponding to a value of the second control signal as added to the first control signal. Further, a fluid operated pump displacement control system is provided comprising a control circuit connected to respective displacement control devices of variable displacement pumps and adapted to be operated by discharge pressure fluid from a discrete control pump.