Abstract: The disclosed substrate support includes a first region, a second region, a first electrode, and a second electrode. The first region is configured to hold a substrate placed thereon. The second region is provided to surround the first region and configured to hold an edge ring placed thereon. The first electrode is provided in the first region to receive a first electrical bias. The second electrode is provided in at least the second region to receive a second electrical bias. The second electrode extends below the first electrode to face the first electrode within the first region.

Abstract: The fuel injection device includes a plunger, operatively connected, to a cam driven by an engine, having control groups for use in communicating with an outer circumferential surface and an end surface of a fuel injection nozzle. The fuel injection device further includes a timing sleeve fitted outwardly of the plunger, for opening or closing the control groups and an actuator for driving a timing rod connected to the timing sleeve in such a way as to move the timing sleeve up and down against the plunger. Finally, the fuel injection device includes a control device for outputting a signal for performing moving-up or moving-down of the timing sleeve to the actuator, and inputting a signal from a source of operation information.

Abstract: A disk rotatably driving device which has a disk of a magnetic material and a turntable formed with an element base on the upper surface of the disk, fixed to a rotatably driving shaft, a pole section formed on the element base for magnetically attracting the hub of a magnetic material formed at the center of the disk, a driving pin fixed to one end of a leaf spring fixed to the lower surface of the turntable, projected from the through hole of the turntable to rotatably drive the hub, and a nonmagnetic pole formed at a predetermined position of the element base at an axially symmetrical position with respect to the through hole thereof. Thus, the magnetic balance is improved to prevent a chucking mistake from occurring in a simple structure by providing the nonmagnetic pole of substantially the same shape as the through hole for the driving pin at the element base at an axially symmetrical position with respect to the through hole.

Abstract: A magnetic disk supporting device for a magnetic recording and playback apparatus including an annular table, an annular yoke and a generally annular leaf spring which are disposed one upon another and surround an upright shaft extending from a disk driving unit, and a disk drive pin upstanding from the leaf spring, extending through the yoke and the table and having an upper end projecting above the table. A bush surrounds the shaft adjacent to the top thereof and is secured thereto. The table, yoke and leaf spring are fitted about the bush and held together by the bus0. The table has a plurality of bosses which position it relative to the leaf spring. The table is formed from a magnetic material.