Patents by Inventor Katsuyuki Sugita
Katsuyuki Sugita has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11914407Abstract: The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ?P between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.Type: GrantFiled: April 16, 2020Date of Patent: February 27, 2024Assignee: FUJIKIN INCORPORATEDInventors: Kaoru Hirata, Keisuke Ideguchi, Shinya Ogawa, Katsuyuki Sugita, Masaaki Nagase, Kouji Nishino, Nobukazu Ikeda, Hiroyuki Ito
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Publication number: 20230359228Abstract: A flow rate control device 100 includes a control valve 6 provided in a flow path 1, a flow rate measurement unit 2, 3 for measuring fluid flow rate controlled by the control valve 6, and a controller 7. The controller 7 is configured so as to control the opening/closing operation of the control valve 6 to match the measurement integral flow rate based on the signal outputted from the flow rate measurement unit (Vn+Vd) to the target integral flow rate Vs.Type: ApplicationFiled: July 3, 2023Publication date: November 9, 2023Applicant: FUJIKIN INCORPORATEDInventors: Katsuyuki SUGITA, Kouji NISHINO, Naofumi YASUMOTO, Kaoru HIRATA, Shinya OGAWA, Keisuke IDEGUCHI
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Patent number: 11733721Abstract: A flow rate control device 100 includes a control valve 6 provided in a flow path 1, a flow rate measurement unit 2, 3 for measuring fluid flow rate controlled by the control valve 6, and a controller 7. The controller 7 is configured so as to control the opening/closing operation of the control valve 6 to match the measurement integral flow rate based on the signal outputted from the flow rate measurement unit (Vn+Vd) to the target integral flow rate Vs.Type: GrantFiled: February 15, 2019Date of Patent: August 22, 2023Assignee: FUJIKIN INCORPORATEDInventors: Katsuyuki Sugita, Kouji Nishino, Naofumi Yasumoto, Kaoru Hirata, Shinya Ogawa, Keisuke Ideguchi
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Publication number: 20230152263Abstract: To provide a driving device including a piezoelectric element deterioration detection circuit and a deterioration detection method that enable detection of deterioration of the piezoelectric element used in the driving device, without stopping a normal operation of the driving device.Type: ApplicationFiled: April 20, 2020Publication date: May 18, 2023Applicant: FUJIKIN INCORPORATEDInventors: Atsushi HIDAKA, Katsuyuki SUGITA, Takatoshi NAKATANI, Kouji NISHINO, Nobukazu IKEDA
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Publication number: 20230129479Abstract: A flow rate control device (8) includes a control valve (6) having a valve element and a piezoelectric element for moving the valve element, and an arithmetic processing circuit (7) for controlling an operation of the control valve, wherein the arithmetic processing circuit is configured to receive an external command signal SE corresponding to a target flow rate when opening the control valve from a closed state so that a gas flows at the target flow rate, and to generate an internal command signal E1 output to a driving circuit for determining a voltage applied to the piezoelectric element based on the external command signal, the internal command signal is a signal that rises with time from zero and converges to a value of the external command signal, and is generated such that a slope at the time of initial rise and a slope immediately before convergence are smaller than a slope therebetween.Type: ApplicationFiled: January 19, 2021Publication date: April 27, 2023Applicant: FUJIKIN INCORPORATEDInventors: Katsuyuki SUGITA, Kouji NISHINO, Kaoru HIRATA, Shinya OGAWA, Keisuke IDEGUCHI
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Publication number: 20230021102Abstract: A flow rate control device 100 includes a flow rate control valve 8 having a valve element 8a and a piezoelectric element 8b for moving the valve element, and a control circuit 9 for controlling an operation of the flow rate control valve 8, wherein, in order to perform a pulsed fluid supply, the control circuit 9 is configured so as to open-loop control an applied voltage to the piezoelectric element so that it approaches the target voltage after once applying a voltage V1 exceeding a target voltage V0 corresponding to a target displacement of the piezoelectric element, when a pulsed flow rate setting signal is given.Type: ApplicationFiled: December 3, 2020Publication date: January 19, 2023Applicant: FUJIKIN INCORPORATEDInventors: Katsuyuki SUGITA, Ryousuke DOHI, Koji KAWADA, Kouji NISHINO, Nobukazu IKEDA
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Publication number: 20230011244Abstract: A pressure control device 20 includes a pressure control valve 25, a flow resistance 23 provided downstream of the pressure control valve, for restricting a gas flow, a first pressure sensor 21 for measuring a gas pressure between the pressure control valve and the flow resistance, a second pressure sensor 22 for measuring a gas pressure downstream of the flow resistance, and an arithmetic control circuit 26 connected to the first pressure sensor and the second pressure sensor. The pressure control device is configured to control the gas pressure downstream of the flow resistance by adjusting an opening degree of the pressure control valve based on an output of the second pressure sensor regardless of an output of the first pressure sensor control, and calculate the flow rate of the gas downstream of the flow resistance based on the output of the first pressure sensor and the output of the second pressure sensor.Type: ApplicationFiled: December 3, 2020Publication date: January 12, 2023Applicant: FUJIKIN INCORPORATEDInventors: Kaoru HIRATA, Kouji NISHINO, Katsuyuki SUGITA, Shinya OGAWA, Keisuke IDEGUCHI
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Patent number: 11416011Abstract: A pressure-type flow rate control device includes a restriction part; a control valve provided upstream of the restriction part; an upstream pressure sensor for detecting pressure between the restriction part and the control valve; and an arithmetic processing circuit connected to the control valve and the upstream pressor sensor. The device is configured to perform flow rate control by controlling the control valve according to an output of the upstream pressure sensor. The arithmetic processing circuit performs an operation of closing the control valve in order to reduce a flow rate of a fluid flowing through the restriction part, and performs an operation of closing the control valve by feedback control in which a target value is an exponential function more gradual than the pressure drop characteristic data when a gas flows out of the restriction part.Type: GrantFiled: March 20, 2018Date of Patent: August 16, 2022Assignee: FUJIKIN INCORPORATEDInventors: Katsuyuki Sugita, Kaoru Hirata, Nobukazu Ikeda, Kouji Nishino, Masahiko Takimoto, Takahiro Imai, Shinya Ogawa
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Patent number: 11402250Abstract: The liquid level meter according to the present invention includes a resistive temperature detector, a temperature measuring body located above it, a temperature detecting unit detecting temperatures of the resistive temperature detector and the temperature measuring body, a current controlling unit determining a current value to be flowed through the resistive temperature detector so that the resistive temperature detector and the temperature measuring body become a predetermined temperature difference, a power supply unit supplying the current of the determined current value to the resistive temperature detector, and a liquid level detecting unit detecting a position of a liquid level.Type: GrantFiled: December 22, 2017Date of Patent: August 2, 2022Assignee: FUJIKIN INCORPORATEDInventors: Atsushi Hidaka, Takatoshi Nakatani, Satoru Yamashita, Katsuyuki Sugita, Kaoru Hirata, Masaaki Nagase, Kouji Nishino, Nobukazu Ikeda
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Patent number: 11391608Abstract: A self-diagnosis method of a flow rate control device includes: a step (a) for measuring a pressure drop characteristic after a pressure control valve (6) has been changed to a closed state from a state where a fluid flows from the upstream side of the pressure control valve with the opening of a flow rate control valve (8) is larger than a restriction part; a step (b) for measuring the pressure drop characteristic after the pressure control valve has been changed to the closed state from a state where the fluid flows from the upstream side of the flow rate control valve to the downstream side with the opening of the flow rate control valve is smaller than the restriction part; a step (c) for determining whether there is an abnormality by comparing the pressure drop characteristic measured in step (a) with a corresponding reference pressure drop characteristic; a step (d) for determining whether there is an abnormality by comparing the pressure drop characteristic measured in step (b) with a corresponding refType: GrantFiled: November 20, 2018Date of Patent: July 19, 2022Assignee: FUJIKIN INCORPORATEDInventors: Katsuyuki Sugita, Ryousuke Dohi, Kaoru Hirata, Koji Kawada, Nobukazu Ikeda, Kouji Nishino
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Publication number: 20220197316Abstract: The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ?P between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.Type: ApplicationFiled: April 16, 2020Publication date: June 23, 2022Applicant: FUJIKIN INCORPORATEDInventors: Kaoru HIRATA, Keisuke IDEGUCHI, Shinya OGAWA, Katsuyuki SUGITA, Masaaki NAGASE, Kouji NISHINO, Nobukazu IKEDA, Hiroyuki ITO
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Patent number: 11346457Abstract: A piezoelectric element-driven valve 1 including a main body, a valve element, piezoelectric actuators, a plurality of cylindrical actuator boxes arranged in series, a cylindrical outer connecting jig detachably connecting the adjacent actuator boxes and having an opening for drawing out wiring, a plurality of piezoelectric actuators accommodated in the actuator box respectively in the same direction, and a cylindrical inner connecting jig slidably accommodated in the outer connecting jig and having an opening for positioning the adjacent piezoelectric actuators and drawing out wiring.Type: GrantFiled: January 28, 2021Date of Patent: May 31, 2022Assignee: FUJIKIN INCORPORATEDInventors: Ryousuke Dohi, Kaoru Hirata, Katsuyuki Sugita, Koji Kawada, Kouji Nishino, Nobukazu Ikeda
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Patent number: 11269362Abstract: A flow rate control method performed using a flow rate control device 100 comprising a first control valve 6 provided in a flow path, a second control valve 8 provided downstream of the first control valve, and a pressure sensor 3 for measuring fluid pressure downstream of the first control valve, the method comprising steps of: (a) closing the opening of the first control valve from a state in which, while controlling the opening of the first control valve based on an output of the pressure sensor so as to be the first flow rate, maintaining the opening of the second control valve in an open state, and flowing a fluid at the first flow rate; and (b) based on the output of the pressure sensor, the pressure remaining downstream of the first control valve is controlled by adjusting the opening of the second control valve, and flowing the fluid at the second flow rate downstream of the second control valve.Type: GrantFiled: April 19, 2019Date of Patent: March 8, 2022Assignee: FUJIKIN INCORPORATEDInventors: Kaoru Hirata, Shinya Ogawa, Katsuyuki Sugita, Kouji Nishino, Nobukazu Ikeda
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Patent number: 11226641Abstract: A fluid control device includes a main body block including a first flow passage, and a second flow passage, a first and second fluid control units installed on an installation surface of the main body block. The first and second flow passages include a first portion extending along a first direction and a second flow passage portion orthogonal to the first direction. The second portion is formed of a hole extending from a side surface of the main body block and a sealing member.Type: GrantFiled: October 12, 2017Date of Patent: January 18, 2022Assignee: FUJIKIN INCORPORATEDInventors: Kaoru Hirata, Katsuyuki Sugita, Takahiro Imai, Shinya Ogawa, Kouji Nishino, Nobukazu Ikeda
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Patent number: 11226257Abstract: A fluid controller is provided having a flow path through which a fluid can flow, a closed space separated from the flow path by an isolation member, and a leak port capable of communicating the closed space with an external part. An anomaly detection device for detecting an anomaly has a pressure sensor detachably fixed to the leak port, a pressure sensor for detecting the pressure in the closed space, a processing module for executing a predetermined information processing, and an detachable mechanism for blocking the leak port from the external part in the state of being fixed. The processing module determines an anomaly of the fluid controller by comparing a detection value detected by the pressure sensor to a predetermined threshold, and transmits a discrimination result of the anomaly of the fluid controller to a server.Type: GrantFiled: February 6, 2018Date of Patent: January 18, 2022Assignee: Fujikin Inc.Inventors: Akihiro Harada, Kouji Nishino, Ryousuke Dohi, Koji Kawada, Katsuyuki Sugita, Nobukazu Ikeda, Michio Yamaji, Tsutomu Shinohara, Ryutaro Tanno, Yuto Kawauchi
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Patent number: 11216016Abstract: A flow rate control method for raising a flow rate performed in a flow control device having a first control valve, a second control valve downstream of the first control valve, and a pressure sensor for measuring a pressure between the first and the second control valves, comprises a step (a) of determining a pressure remaining downstream of the first control valve in a state of closing the second control valve, and a step (b) of controlling the pressure remaining downstream of the first control valve by adjusting the opening degree of the second control valve based on the output of the pressure sensor to flow the fluid downstream the second control valve at the first flow rate.Type: GrantFiled: June 19, 2019Date of Patent: January 4, 2022Assignee: FUJIKIN INCORPORATEDInventors: Kaoru Hirata, Shinya Ogawa, Katsuyuki Sugita, Kouji Nishino, Nobukazu Ikeda
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Patent number: 11137779Abstract: The fluid controller includes a fluid control module and an external control module. The fluid control module includes a control valve on a flow channel, a valve driver circuit that drives the control valve, a fluid meter on a flow channel, and a first processor that processes a signal output from the fluid meter. The external control module includes a second processor that processes a signal output from the first processor. The second processor outputs a valve control signal according to the signal of the fluid meter output from the first processor, the valve control signal is directly input to the valve driver circuit without through the first processor, and the valve driver circuit outputs a voltage that drives the control valve according to the valve control signal from the second processor.Type: GrantFiled: April 21, 2017Date of Patent: October 5, 2021Assignee: FUJIKIN INCORPORATEDInventors: Kaoru Hirata, Katsuyuki Sugita, Yohei Sawada, Masahiko Takimoto, Kouji Nishino
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Publication number: 20210239230Abstract: A piezoelectric element-driven valve 1 including a main body, a valve element, piezoelectric actuators, a plurality of cylindrical actuator boxes arranged in series, a cylindrical outer connecting jig detachably connecting the adjacent actuator boxes and having an opening for drawing out wiring, a plurality of piezoelectric actuators accommodated in the actuator box respectively in the same direction, and a cylindrical inner connecting jig slidably accommodated in the outer connecting jig and having an opening for positioning the adjacent piezoelectric actuators and drawing out wiring.Type: ApplicationFiled: January 28, 2021Publication date: August 5, 2021Applicant: FUJIKIN INCORPORATEDInventors: Ryousuke DOHI, Kaoru HIRATA, Katsuyuki SUGITA, Koji KAWADA, Kouji NISHINO, Nobukazu IKEDA
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Publication number: 20210240208Abstract: A flow rate control method performed in a flow control device 100 having a first control valve 6 provided in the flow path, a second control valve 8 provided downstream of the first control valve, and a pressure sensor 3 for measuring a fluid pressure upstream of the first control valve and downstream of the second control valve, comprises, at the time of flow rate raise, a step (a) of determining a pressure remaining downstream of the first control valve by using a pressure sensor in a state of closing the second control valve, and a step (b) of controlling the pressure remaining downstream of the first control valve by adjusting the opening degree of the second control valve on the basis of the output from the pressure sensor, and flowing a fluid at the first flow rate downstream the second control valve.Type: ApplicationFiled: June 19, 2019Publication date: August 5, 2021Applicant: FUJIKIN INCORPORATEDInventors: Kaoru HIRATA, Shinya OGAWA, Katsuyuki SUGITA, Kouji NISHINO, Nobukazu IKEDA
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Patent number: 11079774Abstract: A flow rate control device (100) comprises: a pressure control valve (6) provided in a flow path; a flow rate control valve (8) provided downstream side of the pressure control valve; and a first pressure sensor (3) for measuring pressure on the downstream side of the pressure control valve and on the upstream side of the flow rate control valve. The flow rate control valve has a valve element (13) seated on/separated from a valve seat (12); a piezoelectric element (10b) for moving the valve element so as be seated on/separated from the valve seat; and a strain sensor (20) provided on a side surface of the piezoelectric element. The pressure control valve (6) is configured to control the pressure control valve (6) on the basis of a signal output from the first pressure sensor (3), and to control the driving of the piezoelectric element of the flow rate control valve (8) based on a signal output from the strain sensor (20).Type: GrantFiled: November 20, 2018Date of Patent: August 3, 2021Assignee: FUJIKIN INCORPORATEDInventors: Katsuyuki Sugita, Ryousuke Dohi, Kaoru Hirata, Koji Kawada, Nobukazu Ikeda, Kouji Nishino