Patents by Inventor Katuhiko KAWASUMI

Katuhiko KAWASUMI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    Publication number: 20110256685
    Abstract: A film structure including at least one film is formed on a face of a semiconductor substrate and then a first mask with a pattern is formed on the film structure. A second mask is formed so as to cover the first mask over a bevel region. The film structure is etched using the first and second masks and thereafter the remaining first and second masks are removed away.
    Type: Application
    Filed: April 13, 2011
    Publication date: October 20, 2011
    Applicant: ELPIDA MEMORY, INC
    Inventors: Takahiro SUZUKI, Kouta NOSAKA, Katuyuki OKAMASU, Akira MURAKAMI, Katuhiko KAWASUMI