Abstract: The present invention provides a film deposition system capable of effectively cooling a work having a large volume, and a film deposition method using this system. The film deposition system has, within a vacuum chamber 1, an evaporation source 3 for forming a film on a work 2 and a cooling device 4 for cooling the work 2, characterized in that the work 2 has an internal space 15 communicating with the outside through an opening part 14, and the cooling device 4 is insertable to and drawable from the internal space 15 through the opening part 14 of the work 2 to cool the work 2 from the inside.

Abstract: A vacuum evaporator according to the present invention comprises a vacuum chamber, a rod-like evaporation source provided to be liftable into and out of the vacuum chamber, and a work support means for supporting, relative to the evaporation source lowered into the vacuum chamber, works W arranged to surround the evaporation source. The vacuum chamber is formed of a fixed chamber part and a movable chamber part provided connectably to and disconnectably from the fixed chamber part and mounted with the work support means. Either one movable chamber part is horizontally moved and connected to the fixed chamber part in the state where the evaporation source is raised and retreated out of the vacuum chamber to perform vacuum evaporation treatment. According to such a structure, the maintenance of the vacuum evaporator can be performed without raising or lowering the lower plate or taking out the work support means from the vacuum chamber.

Abstract: In the rod target for an arc evaporation source, of which the outer peripheral surface is used as an evaporation surface, the opposite ends thereof in the longitudinal direction thereof are each formed thicker than the central part thereof. The length of the thicker portion at each of the opposite ends in the longitudinal direction is set to be not less than 75 mm nor more than 200 mm. Work with a uniform film thickness is provided, and the availability of a rod target is improved, thereby preventing the rod target from going to waste.

Abstract: A vacuum evaporator according to the present invention comprises a vacuum chamber, a rod-like evaporation source provided to be liftable into and out of the vacuum chamber, and a work support means for supporting, relative to the evaporation source lowered into the vacuum chamber, works W arranged to surround the evaporation source. The vacuum chamber is formed of a fixed chamber part and a movable chamber part provided connectably to and disconnectably from the fixed chamber part and mounted with the work support means. Either one movable chamber part is horizontally moved and connected to the fixed chamber part in the state where the evaporation source is raised and retreated out of the vacuum chamber to perform vacuum evaporation treatment. According to such a structure, the maintenance of the vacuum evaporator can be performed without raising or lowering the lower plate or taking out the work support means from the vacuum chamber.

Abstract: The present invention provides a film deposition system capable of effectively cooling a work having a large volume, and a film deposition method using this system. The film deposition system has, within a vacuum chamber 1, an evaporation source 3 for forming a film on a work 2 and a cooling device 4 for cooling the work 2, characterized in that the work 2 has an internal space 15 communicating with the outside through an opening part 14, and the cooling device 4 is insertable to and drawable from the internal space 15 through the opening part 14 of the work 2 to cool the work 2 from the inside.

Abstract: In the rod target for an arc evaporation source, of which the outer peripheral surface is used as an evaporation surface, the opposite ends thereof in the longitudinal direction thereof are each formed thicker than the central part thereof. The length of the thicker portion at each of the opposite ends in the longitudinal direction is set to be not less than 75 mm nor more than 200 mm. Work with a uniform film thickness is provided, and the availability of a rod target is improved, thereby preventing the rod target from going to waste.

Abstract: A vertical mill for material such as cement raw materials, clinker, coal, or the like comprises a grinder portion which has rollers arranged to grind the material by their rolling on a rotary table, a separator means which is positioned above the grinder portion and which classifies the ground material conveyed pneumatically from the grinder portion to the separator means by the two opposite forces of centrifugal force of a rotary disk and of fluid resistance of a vortex flow, a plurality of straightening vanes which are mounted between the casing and the inner cone and which adequately regulate the direction of the fluid in the lower portion and in the upper portion in passage between the grinding portion and the separator means, and a casing outside the separator means having the appropriate shape for forming a horizontal vortex flow in the separator means. The aforesaid vertical mill structure improves the classifying efficiency of the separator means.

Abstract: A system for discharging a thermal decomposition residue containing carbon residue and steel wire balls, the discharge system including: a discharge mechanism including a double shaft screw conveyer having respective screws thereof supported at one end thereof and located contiguous to a residue outlet of a thermal decomposition unit, a housing hermetically connected to the residue outlet of the thermal decomposition unit and enclosing the double shaft screw conveyer with ample space on the upper side thereof; a first outlet provided in a front bottom portion of the housing for discharging the carbon residue transferred by lower portions of the double shaft conveyer; a second outlet provided at the discharging free end of the double screw conveyer for discharging the steel wire balls transferred by upper portions of the double screw conveyer; a seal provided in said first outlet for shielding the interior of the housing from ambient atmosphere; and a water-sealer including a water bath, a chute connected to t