Patents by Inventor Kaushal Kishore Singh

Kaushal Kishore Singh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing chamber with dielectric barrier discharge lamp assembly
    Patent number: 8582962
    Abstract: A thermal processing chamber with a dielectric barrier discharge (DBD) lamp assembly and a method for using the same are provided. In one embodiment, a thermal processing chamber includes a chamber body and a dielectric barrier discharge lamp assembly. The dielectric barrier discharge lamp assembly further comprises a first electrode, a second electrode and a dielectric barrier. The dielectric barrier discharge lamp assembly is positioned between the first electrode and the second electrode. The dielectric barrier defines a discharge space between the dielectric barrier and the second electrode. A circuit arrangement is coupled to the first and second electrodes, and is adapted to operate the dielectric barrier discharge lamp assembly.
    Type: Grant
    Filed: July 1, 2011
    Date of Patent: November 12, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Joseph Michael Ranish, Kaushal Kishore Singh, Bruce Adams
  • SUBSTRATE PROCESSING CHAMBER WITH DIELECTRIC BARRIER DISCHARGE LAMP ASSEMBLY
    Publication number: 20110263138
    Abstract: A thermal processing chamber with a dielectric barrier discharge (DBD) lamp assembly and a method for using the same are provided. In one embodiment, a thermal processing chamber includes a chamber body and a dielectric barrier discharge lamp assembly. The dielectric barrier discharge lamp assembly further comprises a first electrode, a second electrode and a dielectric barrier. The dielectric barrier discharge lamp assembly is positioned between the first electrode and the second electrode. The dielectric barrier defines a discharge space between the dielectric barrier and the second electrode. A circuit arrangement is coupled to the first and second electrodes, and is adapted to operate the dielectric barrier discharge lamp assembly.
    Type: Application
    Filed: July 1, 2011
    Publication date: October 27, 2011
    Inventors: Joseph Michael Ranish, Kaushal Kishore Singh, Bruce Adams
  • Substrate processing chamber with dielectric barrier discharge lamp assembly
    Patent number: 7978964
    Abstract: A thermal processing chamber with a dielectric barrier discharge (DBD) lamp assembly and a method for using the same are provided. In one embodiment, a thermal processing chamber includes a chamber body and a dielectric barrier discharge lamp assembly. The dielectric barrier discharge lamp assembly further comprises a first electrode, a second electrode and a dielectric barrier. The dielectric barrier discharge lamp assembly is positioned between the first electrode and the second electrode. The dielectric barrier defines a discharge space between the dielectric barrier and the second electrode. A circuit arrangement is coupled to the first and second electrodes, and is adapted to operate the dielectric barrier discharge lamp assembly.
    Type: Grant
    Filed: April 27, 2006
    Date of Patent: July 12, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Joseph Michael Ranish, Kaushal Kishore Singh, Bruce Adams
  • Iridium and iridium oxide electrodes used in ferroelectric capacitors
    Publication number: 20020075631
    Abstract: The present invention provides a capacitor having upper and lower electrodes formed of iridium or iridium oxide or combinations thereof. The electrodes are preferably formed using physical vapor deposition. An insulating layer disposed between the electrodes can be a ferroelectric ceramic such as PZT or PLZT.
    Type: Application
    Filed: December 27, 2000
    Publication date: June 20, 2002
    Applicant: Applied Materials, Inc.
    Inventors: Kaushal Kishore Singh, Farid Abooameri, Visweswaren Sivaramakrishnan, Talex Sajoto, Vicente Lim, Jun Zhao