Patents by Inventor Kayo KAMASAKI

Kayo KAMASAKI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PLATING MACHINE WITH TREATMENT UNITS ARRANGED ON CIRCUMFERENCE
    Publication number: 20220341053
    Abstract: The plating machine 1 comprises a plurality of treatment units 14 and a conveying means 13 that conveys a wafer W to the plurality of treatment units 14, wherein the conveying means 13 includes an arm 31 that is provided, on one end side, with a plating tool 32 that holds the wafer W, and an arm rotation drive unit 33 that rotates the arm 31 around another end side of the arm 31, and the plurality of treatment units 14 is arranged at predetermined intervals on a rotation trajectory of the plating tool 32.
    Type: Application
    Filed: April 12, 2022
    Publication date: October 27, 2022
    Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
    Inventors: Shiro HARA, Fumito IMURA, Sommawan KHUMPUANG, Yuuki ISHIDA, Toshihiro KIKUNO, Takafumi YOSHINAGA, Kayo KAMASAKI, Mitsuhiko FUKUYAMA, Tetuya MORIZONO