Abstract: A substrate processing system includes: a carry-in/out section in which a cassette accommodating a plurality of substrates is carried in/out; a batch processing section in which a wafer lot including the plurality of substrates is collectively processed in a state where each of the plurality of substrates stand upright; a single-wafer processing section in which the plurality of substrates included in the wafer lot are processed one by one in a horizontal state; and an interface section that delivers the plurality of substrates from the batch processing section to the single-wafer processing section. The interface section includes: a standby table that horizontally holds a substrate in a state of being in contact with pure water; and a transfer mechanism that delivers the substrate from the batch processing section to the standby table.

Abstract: A lead-free piezoelectric ceramic composition including an alkali niobate/tantalate perovskite oxide main phase having piezoelectric properties and a different metal oxide. The mole ratio (Na/K) between Na (sodium) and K (potassium) in the main phase is 0.40<(Na/K)<3.0. The main phase has a crystal structure in which (i) first spots corresponding to a primitive lattice period and (ii) second spots corresponding to the lattice period two times the primitive lattice period and being weaker than the first spots appear in an electron beam diffraction image entering from the <100> direction with the main phase represented as a pseudo-cubic crystal system. Also, the area ratio of a crystal phase reflecting the second spots in the main phase is 33% or less, and the maximum grain size of crystals reflecting the second spots in the main phase is 25 nm or less.

Abstract: A lead-free piezoelectric ceramic composition including an alkali niobate/tantalate perovskite oxide main phase having piezoelectric properties and a different metal oxide subphase. The mole ratio (Na/K) between Na (sodium) and K (potassium) in the main phase assumes a value in a range represented by 0.40<(Na/K)<3.0. The main phase has a crystal structure in which (i) first spots corresponding to a primitive lattice period and (ii) second spots corresponding to the lattice period two times the primitive lattice period and being weaker than the first spots appear in an electron beam diffraction image entering from the <100> direction with the main phase represented as a pseudo-cubic crystal system.

Abstract: A lead-free piezoelectric ceramic composition includes a first crystal phase made of an alkali niobate/tantalate type perovskite oxide having piezoelectric properties, and a second crystal phase made of an M-Ti—O spinel compound (where the element M is a monovalent to quadrivalent element).

Abstract: A lead-free piezo-electric porcelain composition which contains a main phase having voids and which is formed of a first crystal phase composed of an alkali niobate/tantalate-based perovskite oxide having piezo-electric characteristics; and a sub-phase containing a second crystal phase composed of an A2B6O13-based compound (where the element A is a monovalent element and the element B is one or more divalent to hexavalent elements). The sub-phase fills voids present in the main phase.

Abstract: A lead-free piezoelectric ceramic composition mainly includes a first crystal phase (KNN phase) and a second crystal phase (NTK phase). In the first crystal phase (KNN phase), a plurality of crystal grains formed of an alkali niobate/tantalate perovskite oxide having piezoelectric characteristics is bound to each other in a deposited state. The second crystal phase (NTK phase) is formed of a compound containing titanium (Ti) and fills spaces between the crystal grains in the first crystal phase.

Abstract: A lead-free piezoelectric ceramic composition including an alkali niobate/tantalate perovskite oxide main phase having piezoelectric properties and a different metal oxide. The mole ratio (Na/K) between Na (sodium) and K (potassium) in the main phase is 0.40<(Na/K)<3.0. The main phase has a crystal structure in which (i) first spots corresponding to a primitive lattice period and (ii) second spots corresponding to the lattice period two times the primitive lattice period and being weaker than the first spots appear in an electron beam diffraction image entering from the <100> direction with the main phase represented as a pseudo-cubic crystal system. Also, the area ratio of a crystal phase reflecting the second spots in the main phase is 33% or less, and the maximum grain size of crystals reflecting the second spots in the main phase is 25 nm or less.

Abstract: A lead-free piezoelectric ceramic composition including an alkali niobate/tantalate perovskite oxide main phase having piezoelectric properties and a different metal oxide subphase. The mole ratio (Na/K) between Na (sodium) and K (potassium) in the main phase assumes a value in a range represented by 0.40<(Na/K)<3.0. The main phase has a crystal structure in which (i) first spots corresponding to a primitive lattice period and (ii) second spots corresponding to the lattice period two times the primitive lattice period and being weaker than the first spots appear in an electron beam diffraction image entering from the <100> direction with the main phase represented as a pseudo-cubic crystal system.

Abstract: A lead-free piezoelectric ceramic composition includes a first crystal phase made of an alkali niobate/tantalate type perovskite oxide having piezoelectric properties, and a second crystal phase made of an M-Ti—O spinel compound (where the element M is a monovalent to quadrivalent element).

Abstract: A lead-free piezo-electric porcelain composition which contains a main phase having voids and which is formed of a first crystal phase composed of an alkali niobate/tantalate-based perovskite oxide having piezo-electric characteristics; and a sub-phase containing a second crystal phase composed of an A2B6O13-based compound (where the element A is a monovalent element and the element B is one or more divalent to hexavalent elements). The sub-phase fills voids present in the main phase.

Abstract: A lead-free piezoelectric ceramic composition mainly includes a first crystal phase (KNN phase) and a second crystal phase (NTK phase). In the first crystal phase (KNN phase), a plurality of crystal grains formed of an alkali niobate/tantalate perovskite oxide having piezoelectric characteristics is bound to each other in a deposited state. The second crystal phase (NTK phase) is formed of a compound containing titanium (Ti) and fills spaces between the crystal grains in the first crystal phase.

Abstract: The present invention is directed to a capacitive differential pressure detector comprising a diaphragm disposed between two electrodes. In a first embodiment, each of the electrodes comprises two conductive plates with an insulator disposed therebetween. Step-like portions are formed in the conductive plate nearest the diaphragm. In a second embodiment, the plate nearest the diaphragm is insulative with a conductive film formed thereon. In a third embodiment, at least one groove is formed in the plate nearest the diaphragm. The groove is formed in a surface of the plate which faces the diaphragm. The groove also intersects a pressure guide hole. In a fourth embodiment, a substrate is disposed on a surface of the plate farthest from said diaphragm. In a fifth embodiment, an insulating layer has the same coefficient of thermal expansion as the conductive plates. In a sixth embodiment, the diaphragm is etched in order to form a circular flexible part, a centrally disposed displacing part, and a bonding part.

Abstract: An X-ray photography cassette incorporating an automatic peeler for removing the film from the cassette. The cassette includes a frame and a front plate mounted on the frame and with a rear cover coupled to the frame through hinges. Intensifying screens are positioned adjacent the front and rear cover. A peeling member is elastically coupled to one of the frame or rear cover and extending into a recess or cut-out portion formed in the intensifying screen. A space is provided between the peeling member and the other intensifying screen for receiving the film.