Abstract: There are provided a reflective photomask blank and a reflective photomask which improve the dimensional accuracy and the shape accuracy of a pattern to be transferred onto a wafer and enable the long use. A reflective photomask blank (10) according to this embodiment includes: a substrate (1); a reflective layer (2); and an absorption layer (4) in this order, in which the absorption layer (4) is a layer containing a material of a first material group and containing a material of a second material group, the content of the material of the first material group decreases from the side of the substrate (1) toward the side of an outermost surface (4a) of the absorption layer (4), and the content of the material of the second material group increases from the side of the substrate (1) toward the side of the outermost surface (4a) of the absorption layer (4). The first material group contains Te, Co, Ni, Pt, Ag, Sn, In, Cu, Zn, and Bi, and oxides, nitrides, and oxynitrides thereof.

Abstract: There are provided a phase shift mask blank capable of sufficiently suppressing the generation of a haze on a mask, a phase shift mask with few haze defects, and a method for manufacturing the phase shift mask.

Abstract: There are provided a reflective mask blank, a reflective mask, a reflective mask manufacturing method, and a reflective mask correction technique capable of reducing time required for electron beam correction etching, even when a material used for a thin absorption film has a large extinction coefficient k to an EUV light. A reflective photomask blank (10) according to this embodiment has a substrate (1), a multi-layer reflective film (2), a capping layer (3), and a low reflective portion (5), in which the low reflective portion (5) is obtained by alternately depositing an absorption film (A) and an absorption film (B), the correction etching rate in the electron beam correction of the absorption film (A) is larger than the correction etching rate in the electron beam correction of the absorption film (B), and the absorption film (B) contains one or more elements selected from tin, indium, platinum, nickel, tellurium, silver, and cobalt.

Abstract: A mask blank has a structure where a thin film for pattern formation and a hard mask film are stacked in this order on a transparent substrate, featured in that the thin film is formed of a material containing chromium, the hard mask film includes a stacked structure of a lower layer and an upper layer, the lower layer is formed of a material containing silicon and oxygen, the upper layer is formed of a material containing tantalum and oxygen with an oxygen content of 30 atom % or more, and the ratio of a thickness of the upper layer relative to a total thickness of the hard mask film is 0.7 or less.

Abstract: A lens barrel includes a filter ring retainer, an OIS base frame, and a ring-shaped filter ring. The filter ring retainer has a male screw. The OIS base frame has a female screw locking the male screw. The ring-shaped filter ring has an inner circumferential projection inserted into between the filter ring retainer and the OIS base frame, and is disposed on the outer circumferential side of the filter ring retainer and the OIS base frame.

Abstract: A lens barrel includes a filter ring retainer, an OIS base frame, and a ring-shaped filter ring. The filter ring retainer has a male screw. The OIS base frame has a female screw locking the male screw. The ring-shaped filter ring has an inner circumferential projection inserted into between the filter ring retainer and the OIS base frame, and is disposed on the outer circumferential side of the filter ring retainer and the OIS base frame.

Abstract: A reflective mask having a light-shielding frame with high light-shielding performance, and a method for manufacturing thereof. In a reflective mask having a light-shielding frame dug into a multilayered reflective layer, when side etching is performed or processing to obtain a reverse tapered shape is performed only on the multilayered reflective layer, it becomes possible to suppress reflection of EUV light (extreme ultraviolet light) in the vicinity of the edge of the light-shielding frame, provide a reflective mask having high light-shielding ability, and form a transcription pattern with high accuracy.

Abstract: A lens barrel of the present invention includes: a fixing frame having a plurality of cam grooves that are formed an inner circumferential surface of the fixing frame and also having a protrusion provided between any adjacent two of the cam grooves among a plurality of the cam grooves; and a drive frame having cam followers that are provided to an outer circumferential surface of drive frame, are engaged with the cam grooves, and are movable along the cam grooves. With this configuration, when an external force is applied to the drive frame, an end portion of the drive frame comes into contact with the protrusion to prevent the cam followers from coming out of the cam grooves.

Abstract: A reflective mask having a light-shielding frame with high light-shielding performance, and a method for manufacturing thereof. In a reflective mask having a light-shielding frame dug into a multilayered reflective layer, when side etching is performed or processing to obtain a reverse tapered shape is performed only on the multilayered reflective layer, it becomes possible to suppress reflection of EUV light (extreme ultraviolet light) in the vicinity of the edge of the light-shielding frame, provide a reflective mask having high light-shielding ability, and form a transcription pattern with high accuracy.

Abstract: A lens barrel comprises an optical system forming an optical image of a subject, a tube supporting at least one lens included in the optical system, a fixed member disposed on an outer peripheral side of the tube, the fixed member including a wall formed along an outer peripheral face of the tube, an electrical part disposed on an inner peripheral side of the tube, and a flexible printed cable electrically connected to the electrical part. The tube is incorporated into the fixed member by being moved in a specific direction. The wall includes a slit with an inclination of 45 degrees or less with respect to the specific direction, the slit is open at one end in the specific direction. The flexible printed cable is guided to an inner face of the wall and pulled out through the slit to outside of the fixed member.

Abstract: A lens barrel of the present invention includes: a fixing frame having a plurality of cam grooves that are formed an inner circumferential surface of the fixing frame and also having a protrusion provided between any adjacent two of the cam grooves among a plurality of the cam grooves; and a drive frame having cam followers that are provided to an outer circumferential surface of drive frame, are engaged with the cam grooves, and are movable along the cam grooves. With this configuration, when an external force is applied to the drive frame, an end portion of the drive frame comes into contact with the protrusion to prevent the cam followers from coming out of the cam grooves.

Abstract: A lens barrel of the present invention includes: a fixing frame having a plurality of cam grooves that are formed an inner circumferential surface of the fixing frame and also having a protrusion provided between any adjacent two of the cam grooves among a plurality of the cam grooves; and a drive frame having cam followers that are provided to an outer circumferential surface of drive frame, are engaged with the cam grooves, and are movable along the cam grooves. With this configuration, when an external force is applied to the drive frame, an end portion of the drive frame comes into contact with the protrusion to prevent the cam followers from coming out of the cam grooves.

Abstract: A lens barrel includes a fixing frame provided with cam grooves formed in an inner circumferential surface of the fixing frame, and a drive frame provided with cam followers formed on an outer circumferential surface of the drive frame and a plurality of engaging teeth to the outer circumferential surface of the drive frame, located on substantially the same circumference as the cam followers. With the drive frame incorporated in the fixing frame, the cam followers are fitted in the cam grooves, drive force is transmitted via the engaging teeth, and the drive frame can move relative to the fixing frame in the optical axis direction of a lens as the cam followers move along the cam grooves. In this lens barrel, cam followers are less likely to come out of the cam grooves.

Abstract: A lens barrel includes a fixing frame provided with cam grooves formed in an inner circumferential surface of the fixing frame, and a drive frame provided with cam followers formed on an outer circumferential surface of the drive frame and a plurality of engaging teeth to the outer circumferential surface of the drive frame, located on substantially the same circumference as the cam followers. With the drive frame incorporated in the fixing frame, the cam followers are fitted in the cam grooves, drive force is transmitted via the engaging teeth, and the drive frame can move relative to the fixing frame in the optical axis direction of a lens as the cam followers move along the cam grooves. In this lens barrel, cam followers are less likely to come out of the cam grooves.

Abstract: A lens barrel comprises an optical system forming an optical image of a subject, a tube supporting at least one lens included in the optical system, a fixed member disposed on an outer peripheral side of the tube, the fixed member including a wall formed along an outer peripheral face of the tube, an electrical part disposed on an inner peripheral side of the tube, and a flexible printed cable electrically connected to the electrical part. The tube is incorporated into the fixed member by being moved in a specific direction. The wall includes a slit with an inclination of 45 degrees or less with respect to the specific direction, the slit is open at one end in the specific direction. The flexible printed cable is guided to an inner face of the wall and pulled out through the slit to outside of the fixed member.

Abstract: A lens barrel of the present invention includes a fixing frame 100 provided with cam grooves 103-105 formed in an inner circumferential surface of the fixing frame, and a drive frame 200 provided with cam followers 201-203 formed on an outer circumferential surface of the drive frame and a plurality of engaging teeth 200a provided to the outer circumferential surface of the drive frame so as to be located on substantially the same circumference as the cam followers 201-203. The drive frame 200 is adapted such that, with the drive frame incorporated in the fixing frame 100, the cam followers 201-203 are fitted in the cam grooves 103-105, drive force is transmitted via the engaging teeth 200a, and the drive frame 200 can move relative to the fixing frame 100 in the optical axis direction of a lens as the cam followers 201-203 move along the cam grooves 103-105.

Abstract: A simply structured zooming movement mechanism for moving a first lens group located in the object side from a bending member. Also provided are a small-sized lens unit by making it collapsible and an image pickup apparatus. The lens unit has: the bending member for bending the light, entering from an object along a first optical axis, to the direction of a second optical axis substantially perpendicular to the first optical axis; and a first moving member for moving a first support member, which supports the first lens group, in the direction of the first optical axis to a storage position; a bending member moving member for moving the bending member to an evacuation position in order to create a space for storing the first supporting member; and a first zooming movement member for moving the first supporting member in the direction of the first optical axis in a variable magnification manner.

Abstract: A lens barrel of the present invention includes: a fixing frame having a plurality of cam grooves that are formed an inner circumferential surface of the fixing frame and also having a protrusion provided between any adjacent two of the cam grooves among a plurality of the cam grooves; and a drive frame having cam followers that are provided to an outer circumferential surface of drive frame, are engaged with the cam grooves, and are movable along the cam grooves. With this configuration, when an external force is applied to the drive frame, an end portion of the drive frame comes into contact with the protrusion to prevent the cam followers from coming out of the cam grooves.

Abstract: A lens barrel of the present invention includes a fixing frame 100 provided with cam grooves 103-105 formed in an inner circumferential surface of the fixing frame, and a drive frame 200 provided with cam followers 201-203 formed on an outer circumferential surface of the drive frame and a plurality of engaging teeth 200a provided to the outer circumferential surface of the drive frame so as to be located on substantially the same circumference as the cam followers 201-203. The drive frame 200 is adapted such that, with the drive frame incorporated in the fixing frame 100, the cam followers 201-203 are fitted in the cam grooves 103-105, drive force is transmitted via the engaging teeth 200a, and the drive frame 200 can move relative to the fixing frame 100 in the optical axis direction of a lens as the cam followers 201-203 move along the cam grooves 103-105.

Abstract: A lens unit includes: a first lens group arranged in a first optical axis direction of the lens unit, on which a light flux from an object is incident; a second lens group provided closer to an image side than the first lens group and arranged in a second optical axis direction; a bending section provided between the first and the second lens groups, which bends the first optical axis in the second optical axis direction, wherein the first and second lens groups are movable in the respective optical axes when a zooming operation is carried out; an actuator which drives the first and second lens groups; a first drive mechanism which moves the first lens group; a second drive mechanism which moves the second lens group; and a coupling member which concurrently transmits drive force from the actuator to the first and second drive mechanisms.