Abstract: A process of forming a semiconductor device that includes an interconnection formed by electro-plating is disclosed. The process comprises steps of: forming a stopper layer on a first insulating film; covering the stopper layer and the first insulating film with a second insulating film; preparing a first mask having an edge that overlaps with the stopper layer; depositing a seed layer on the first mask and the second insulating film that is exposed from the first mask; preparing a second mask having an edge that overlaps with the stopper layer, the edge of the first mask being retreated from the edge of the second mask; forming an upper layer on the seed layer by electro-plating a metal so as not to overlap with the first mask; and removing the seed layer exposed from the upper layer by etching.

Abstract: A process of forming a semiconductor device that includes an interconnection formed by electro-plating is disclosed. The process comprises steps of: forming a stopper layer on the first insulating film; covering the stopper layer and the first insulating film with a second insulating film; preparing a first mask having an edge that overlaps with the stopper layer; depositing a seed layer on the first mask and the second insulating film that is exposed from the first mask; preparing a second mask having an edge that overlaps with the stopper layer, the edge of the first mask retreating from the edge of the second mask; forming an upper layer on the seed layer by electro-plating a metal so as not to overlap with the first mask; and removing the seed layer exposed from the upper layer by etching.

Abstract: A fuel injector includes: a pilot injector configured to spray fuel so as to form a first combustion region in a combustion chamber; and a main injector provided coaxially with the pilot injector so as to surround the pilot injector and configured to supply a fuel-air mixture that is a mixture of the fuel and air to form a second combustion region in the combustion chamber, wherein the main injector includes: a first inflow channel through which the air having a major flow component in an axial direction is taken; a second inflow channel through which the air having a major flow component in a radial direction is taken and which causes the air therein to meet the air from the first inflow channel; and a main fuel injecting portion configured to inject the fuel only to the second inflow channel.

Abstract: A fuel injector includes: a pilot injector configured to spray fuel so as to form a first combustion region in a combustion chamber; and a main injector provided coaxially with the pilot injector so as to surround the pilot injector and configured to supply a fuel-air mixture that is a mixture of the fuel and air to form a second combustion region in the combustion chamber, wherein the pilot injector includes: a center nozzle configured to eject air jet flowing straight in an axial direction on a central axis of the pilot injector; an inside swirler provided on a radially outer side of the center nozzle and configured to cause inflow air to swirl around the central axis; and a pilot fuel injecting portion configured to inject the fuel from between the center nozzle and the inside swirler to air flow in the center nozzle.

Abstract: A method for manufacturing a semiconductor device includes: forming a first active region, a second active region, an inactive region located between the first active region and the second active region, and a third active region, which crosses the inactive region to electrically connect the first active region to the second active region, in a semiconductor layer; forming an insulating layer on the semiconductor layer; and forming an opening selectively in the insulating layer by dry etching.

Abstract: A method for manufacturing a semiconductor device includes: forming a first active region, a second active region, an inactive region located between the first active region and the second active region, and a third active region, which crosses the inactive region to electrically connect the first active region to the second active region, in a semiconductor layer; forming an insulating layer on the semiconductor layer; and forming an opening selectively in the insulating layer by dry etching.

Abstract: A method for manufacturing a semiconductor device includes: forming a first active region, a second active region, an inactive region located between the first active region and the second active region, and a third active region, which crosses the inactive region to electrically connect the first active region to the second active region, in a semiconductor layer; forming an insulating layer on the semiconductor layer; and forming an opening selectively in the insulating layer by dry etching.

Abstract: A main swirler of a triple annular configuration that is partitioned by a pre-filmer and a separator is installed in an inlet port of a main air flow channel. The vicinity of the inner wall of the main air flow channel provided with a main fuel injection port is bulged radially outward from the innermost surface (innermost surface of a small swirler) of a main swirler. Further, a distance from the main fuel injection port and the pre-filmer is set such that an effective opening area between the pre-filmer and “the inner wall of the main air flow channel provided with the main fuel injection port” is equal to an effective opening area of the small swirler. The swirling directions of the swirlers of the main swirler are “clockwise”-“counter-clockwise”-“clockwise” respectively along the radial outward direction when the swirling direction of the innermost swirler is taken as “clockwise”.

Abstract: A fuel injector includes: a pilot injector configured to spray fuel so as to form a first combustion region in a combustion chamber; and a main injector provided coaxially with the pilot injector so as to surround the pilot injector and configured to supply a fuel-air mixture that is a mixture of the fuel and air to form a second combustion region in the combustion chamber, wherein the pilot injector includes: a center nozzle configured to eject air jet flowing straight in an axial direction on a central axis of the pilot injector; an inside swirler provided on a radially outer side of the center nozzle and configured to cause inflow air to swirl around the central axis; and a pilot fuel injecting portion configured to inject the fuel from between the center nozzle and the inside swirler to air flow in the center nozzle.

Abstract: A fuel injector includes: a pilot injector configured to spray fuel so as to form a first combustion region in a combustion chamber; and a main injector provided coaxially with the pilot injector so as to surround the pilot injector and configured to supply a fuel-air mixture that is a mixture of the fuel and air to form a second combustion region in the combustion chamber, wherein the main injector includes: a first inflow channel through which the air having a major flow component in an axial direction is taken; a second inflow channel through which the air having a major flow component in a radial direction is taken and which causes the air therein to meet the air from the first inflow channel; and a main fuel injecting portion configured to inject the fuel only to the second inflow channel.

Abstract: A main swirler of a triple annular configuration that is partitioned by a pre-filmer and a separator is installed in an inlet port of a main air flow channel. The vicinity of the inner wall of the main air flow channel provided with a main fuel injection port is bulged radially outward from the innermost surface (innermost surface of a small swirler) of a main swirler. Further, a distance from the main fuel injection port and the pre-filmer is set such that an effective opening area between the pre-filmer and “the inner wall of the main air flow channel provided with the main fuel injection port” is equal to an effective opening area of the small swirler. The swirling directions of the swirlers of the main swirler are “clockwise”-“counter-clockwise”-“clockwise” respectively along the radial outward direction when the swirling direction of the innermost swirler is taken as “clockwise”.