Abstract: An exposure amount control device for controlling an integrated exposure amount of pulsed light to a photosensitive substrate within a predetermined range in which a pattern of a mask is successively exposed on the substrate by synchronously scanning the mask forming the pattern to be exposed and the photosensitive substrate relatively with respect to a predetermined illumination area illuminated with pulsed light from a pulsed light source, satisfies the following relationship:.DELTA.D.sub.12 .gtoreq.D/(2N.sub.min)wherein luminous intensity distribution of the predetermined illumination area in a scan direction is shaped to be a trapezoid, .DELTA.D.sub.12 is an average value of half of the widths of the slope portions on the lateral sides of the trapezoid-shaped luminous intensity distribution in the scan direction, D is the width, at half peak value points, of the luminous intensity distribution on the predetermined illumination area of the substrate in the scan direction and N.sub.

Abstract: The purpose of the present invention is to provide an oil-in-alcohol emulsified composition that the oil phase is uniformly and stably dispersed into an outer phase which is mainly comprised of a lower alcohol.Accordingly, the oil-in-alcohol emulsified composition of the present invention comprising: (a) an oily component, (b) a lower alcohol, (c) water, and (d) an emulsifier which comprising one or more of polyether-modified silicones represented by the following general formula (1), ##STR1## ?In the formula: A is a polyalkylene group shown as the general formula: --C.sub.3 H.sub.6 O(C.sub.2 H.sub.4 O).sub.a (C.sub.3 H.sub.6 O).sub.b R' (where R' is a group selected from the group of a hydrogen atom, an acyl group, and alkyl groups having a carbon number of 1 to 4, where a is an integer of 5 to 50, and where b is an integer of 5 to 50.); R is a methyl group or a phenyl group; m is an integer of 50 to 1,000; and n is an integer of 1 to 40.!.

Abstract: This invention provides a thermocompression bonding equipment which, when the material to be bonded is to be changed, allows easy replacement and preparation of a compression bonding head, reduction of working time required for replacement and preparation of a compression bonding head, and simplified adjustment of the compression bonding head. The thermocompression bonding equipment is provided with a head unit 20 comprising a base 10, thermocompression bonding head 56 and sliding mechanism 50 for sliding the thermocompression bonding head 56 provided on the base 10, pressing means 30, which are structured independently from the head unit, for pressing the sliding mechanism 50 to slide the thermocompression bonding head 56, thereby thermocompression bonding the material of ACF, LCD, and TAB, and a base frame 40 provided with positioning means 40, 41 for positioning the base 10.

Abstract: A multilayer ceramic part including dielectric ceramic layers and internal conductor layers is prepared by forming dielectric ceramic layers from an oxide system dielectric ceramic material having a sintering completion temperature between the melting point and the boiling point of the internal conductor. A pattern of internal conductor is formed on dielectric ceramic layers. The dielectric ceramic layers are placed one on another so as to sandwich the internal conductor pattern therebetween. The laminate is fired at or above the melting point of the internal conductor, optionally in an atmosphere having a controlled oxygen partial pressure. Since the dielectric ceramic material has an improved dielectric constant and dielectric loss and the internal conductor is densified and improved in surface property, the part is improved in resonator Q value and other properties.

Abstract: An apparatus has a pulse light source for emitting light pulses with varying light quantities, an illumination optical system for radiating the light pulses from the source onto a predetermined illumination region on a mask on which a transfer pattern is formed, and a projection optical system for projecting an image of the pattern onto a predetermined exposure region on a substrate, and which synchronously scans the mask and the substrate during the projection. The apparatus includes a measuring device for detecting intensities of the light pulses radiated onto the substrate during the scanning and measuring an integrated light quantity on each of a plurality of partial regions in the exposure region on the substrate on the basis of a detection signal of the intensities, wherein the partial regions are defined by a scanning speed of the photosensitive substrate and an oscillation interval of the light pulses.

Abstract: A method of manufacturing a circulator includes the steps of forming, on at least one sheet (41, 42) of an insulating ferromagnetic material, dummy inner conductors (44a, 44b, 44c, 45a, 45b, 45e) made of a material which is thermally decomposed at a temperature equal to or less than a sintering completion temperature of the insulating ferromagnetic material, laminating a plurality of the sheets (40, 41, 42) of the insulating ferromagnetic material so that at least one insulating ferromagnetic material sheet (40, 41) covers the dummy inner conductors formed on the sheets (41, 42), firing the laminated insulating ferromagnetic material sheets (40, 41, 42) to form an insulating ferromagnetic material body (46) in a single continuous body and to form ducts (47) for inner conductors at portions occupied by the dummy inner conductors, injecting with pressure conductive paste into the ducts (47) in the insulating ferromagnetic material body (46), and firing the insulating ferromagnetic material body (46) to form the

Abstract: An apparatus for detecting positions is provided with an auxiliary pattern adjacent to the opaque portion of an index pattern, which has a spatial frequency higher than the insulating spatial frequency of an imaging system in order to obtain a stable signal portion (slope). Using this slope, the positional information of the index pattern is obtained, and on the basis of the positional information, the positions of wafer alignment marks are detected.

Abstract: A circulator includes a circulator element (50) with inner conductors (41) having a predetermined pattern and an insulating ferromagnetic material body (40) closely surrounding the inner conductors. The insulating ferromagnetic material body is constituted by a fired single continuous body. The circulator also includes a plurality of terminal electrodes (76) formed on side surfaces of the circulator element and electrically connected to one end of the inner conductors, a plurality of circuit elements (51a, 51b, 51c) electrically connected to the terminal electrodes, and excitation permanent magnets (52, 53) for applying a dc magnetic field to the circulator element.

Abstract: A thermocompression bonding apparatus wherein object parts can be connected with a high degree of accuracy by thermocompression bonding and the entire apparatus is not deformed readily by a high pressure and a member of a large size can be connected at a fine pitch with a high degree of accuracy. The thermocompression bonding apparatus is constructed so as to bond a first member to a second member by thermocompression bonding and comprises a base member, a holding device for holding the second member thereon, a heat generation element for applying heat to the first member, and a pressurization member for pressing the heat generation element against the first member and the second member. The holding device, the heat generation element and the pressurization member are disposed mechanically separately from the base member. Also a thermocompression bonding method and a process of manufacturing a liquid crystal display device which are performed using the thermocompression bonding apparatus are disclosed.

Abstract: A semiconductor device having stable breakdown voltage in wiring area. The semiconductor has a first conducting type semiconductor substrate with a plurality of second conducting type first semiconductor regions formed on one part of the surface of the first conducting type semiconductor substrate. A first conducting type high density diffused second semiconductor region is formed on one part of the surface within the second conducting type first semiconductor region. A gate electrode material extends across one part of the surface of the first conducting type semiconductor substrate, where one part of the surface of the first conducting type high density diffused second semiconductor region and the second conducting type first semiconductor region are not formed. An insulating film covers the gate electrode material and a metal source wiring is connected to the first conducting type high density diffused second semiconductor region and the second conducting type first semiconductor region.

Abstract: A projection optical apparatus for projection an image of an object onto a workpiece, which is suitable for use, for example, as an exposure apparatus used in the manufacture of integrated circuits. The projection optical apparatus includes an image forming optical system whose optical characteristic is changed by the light energy supplied from the illuminated object. A change of the optical characteristic of the optical system is determined by the use of a predetermined parameter whereby when the distribution of the light energy on the pupil of the optical system is changed, the parameter is correct in such a manner that the change of the optical characteristic determined by the parameter is changed in correspondence to the change in the distribution of the light energy.

Abstract: An exposure control apparatus for controlling exposure quantity of pulse energy to a resist, when pattern of a rectile is transcribed to the resist on a wafer, using pulse energy accompanied by energy variation within a predetermined range per each emission, i.e., coherent or non-coherent light energy, or pulse energy other than light, such as X-ray.

Abstract: In a projection-type optical apparatus in which a projection optical system projects an image of an object upon a substrate, a position detecting sensor mechanically connected to the projection optical system detects the position of the projection optical system relative to the substrate along the optical axis of the projection optical system. A displacement measuring device measures relative displacement between the position detecting sensor and the projection optical system along the optical axis. The substrate is brought into coincidence with an optimum image forming plane of the projection optical system on the basis of the position detected by the position detecting sensor and the displacement measured by the displacement measuring device.

Abstract: An energy amount control device having a pulse energy generating source which produces pulse energy with a predetermined range of energy fluctuations per oscillation, and adjusting voltage applied to the energy generating source to thereby control an energy amount of the pulse energy, the energy amount control device comprising a storage unit for storing information about the relation between predetermined voltage to produce pulse energy in the energy generating source and an energy amount of the pulse energy emitted from the energy generating source under the predetermined voltage; an energy amount measuring unit for detecting the energy amount of the pulse energy actually emitted from the energy generating source; an arithmetic unit for updating the information stored in the storage unit at predetermined timing based on the predetermined voltage to produce the pulse energy in the energy generating source and the energy amount detected by the energy amount measuring unit; and decision unit for determining th

Abstract: A process for the transesterification of substrates comprising (a) fat and oil and (b) one or more compounds selected from the group consisting of fatty acid, fatty acid ester and other fat and oil with the use of a lipase, wherein said transesterification is effected in the presence of a monohydric lower alcohol.

Abstract: An exposure apparatus in an exposure operation involving image composing or photocomposing, adapts an alignment method for defining the actual positions of all the shot areas on a wafer by sample alignment prior to the exposure operation. It is assumed that a substrate, such as a wafer, is provided with regularly positioned plural image transfer areas each of which is divided into at least two partial areas, and the apparatus executes superimposed exposures with different of the same patterns respectively by a step-and-repeat or step-and-scan-method.

Abstract: A simple illumination control device provides illuminating light with improved uniformity in intensity and without speckle fringes.A speckle pattern, formed with a specific periodicity by the irradiation of a pulse on a first object or a second object, is moved within a predetermined range at least in one direction. The minimum number of pulses required for substantially smoothing the speckle pattern on the second object by irradiation of plural pulses during the movement of the speckle pattern over the predetermined range, is stored. Based on the minimum number of pulses, the number of pulses required for obtaining desired exposure, the amount of light of each pulse, and the number of pulses for moving the speckle pattern substantially by a cycle, are determined.

Abstract: The process for producing an oleaginous composition of the present invention comprises transesterifying a fat containing a large amount of polybasic unsaturated fatty acid(s) as constituting fatty acid(s) with saturated fatty acid(s) and/or saturated fatty acid alcohol ester(s) with the use of a lipase having an site-specificity to thereby give symmetric triglyceride(s) wherein the fatty acid groups at the 1- and 3-positions are selectively transesterified and a polybasic unsaturated fatty acid group is present at the 2-position. The above transesterification should be carried out under such conditions as to give an oleaginous composition which comprises 40% or more of symmetric triglyceride(s) each having a polybasic unsaturated fatty acid group at the 2-position and 50% or more of completely saturated fatty acid(s) each having 16 or more carbon atoms.

Abstract: A projection exposure apparatus for manufacturing semiconductor elements has a control system for correcting changes in imaging characteristics with high precision on a real-time basis and for correcting imaging characteristics of a projecting lens on the basis of information associated with the history of light incident on the projection lens, wherein even if the history information of incident light is lost, due to a power failure, for example, or an error occurs in the information, correction control for the imaging characteristics can be restored with high precision.

Abstract: In a power MOS FET and the method of manufacturing such FET, in which a material, such as platinum, having a small resistivity compensation effect is diffused as a lifetime killer into the vicinity of a PN diode junction formed by the drain region and the base region. The diffusion is made through an opening formed in a covering insulator layer. An example of the lifetime killer is platinum and the preferable temperature range for diffusing platinum is not higher than 900.degree. C.