Patents by Inventor Kazuhide Asai
Kazuhide Asai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20200043763Abstract: There is provided a technique that includes a first controller configured to acquire event data generated at a time of transferring a substrate and alarm data generated at a time of occurrence of a transfer error, a recorder configured to, while recording a transfer operation of the substrate as first image data, record the transfer operation of the substrate as second image data having a higher resolution than the first image data, a second controller configured to store the first image data in a first memory based on the event data, and store the second image data in a second memory based on the alarm data, and an operating controller configured to display at least the first image data and the second image data. The second controller displays both the first image data and the second image data on a same screen.Type: ApplicationFiled: July 30, 2019Publication date: February 6, 2020Applicant: KOKUSAI ELECTRIC CORPORATIONInventors: Akihiko YONEDA, Kazuhide ASAI, Tetsuyuki MAEDA, Naoya MIYASHITA, Nobuyuki MIYAKAWA, Tadashi OKAZAKI, Hideo YANASE
-
Patent number: 10496078Abstract: There is provided a configuration that includes a plurality of substrate processing apparatuses and a management device for managing the plurality of substrate processing apparatuses. Upon receiving information specifying a substrate processing apparatus as a reference and file information designating a predetermined device file, the plurality of substrate processing apparatuses transmits request data including first device information and first data information to the management device. Upon receiving the request data, the management device transmits the received request data to the reference substrate processing apparatus. The reference substrate processing apparatus creates response data including second data information responding to the first data information and transmits the created response data to the management device. Upon receiving the response data, the management device transmits the received response data to the plurality of substrate processing apparatuses.Type: GrantFiled: March 19, 2018Date of Patent: December 3, 2019Assignee: KOKUSAI ELECTRIC CORPORATIONInventors: Kazuyoshi Yamamoto, Osamu Ueda, Kazuhide Asai
-
Publication number: 20190195219Abstract: There is provided a technique that includes: a main controller configured to execute a process recipe including a plurality of steps to perform a predetermined process on a substrate so as to acquire device data when executing the process recipe; and a storage part configured to store the acquired device data, wherein the main controller is configured to: acquire the device data in a predetermined specific step among the steps constituting the process recipe; calculate a value of the acquired device data in the specific step; compare the calculated value with a value of the device data in the specific step calculated at a time of previous execution of the process recipe; and generate an alarm when the calculated value shows a predefined tendency.Type: ApplicationFiled: December 20, 2018Publication date: June 27, 2019Applicant: KOKUSAI ELECTRIC CORPORATIONInventors: Masanori OKUNO, Hideki HORITA, Kazuyoshi YAMAMOTO, Kazuhide ASAI, Toshihiko YONEJIMA
-
Patent number: 10289781Abstract: A management apparatus includes: a manipulation & display unit including a user interface for selecting a reference device information, and configured to display: a difference between the device information obtained from the substrate processing device and the reference device information selected via the user interface; a content of the reference device information; and a content of the device information, and further configured to receive a command for modifying the device information; and a control unit configured to modify the device information based on the command received from the manipulation & display unit and configured to transmit a modified device information to the substrate processing device.Type: GrantFiled: November 20, 2015Date of Patent: May 14, 2019Assignee: KOKUSAI ELECTRIC CORPORATIONInventors: Toshiro Koshimaki, Kazuhide Asai, Hideto Shimizu, Kayoko Yashiki, Kazuyoshi Yamamoto, Nobuhisa Makino
-
Patent number: 10211110Abstract: A method of manufacturing a semiconductor device includes supplying an inert gas into a process chamber; exhausting an internal atmosphere of the process chamber from an exhaust part; acquiring first data serving as reference data on a relationship between a flow rate of the inert gas and a pressure in one of the process chamber or the exhaust part; processing a substrate accommodated in the process chamber by supplying a processing gas into the process chamber; and adjusting exhaust characteristics by adjusting a valve opening degree of an exhaust regulating part installed in the exhaust part.Type: GrantFiled: February 23, 2018Date of Patent: February 19, 2019Assignee: HITACHI KOKUSAI ELECTRIC INC.Inventors: Tsukasa Kamakura, Kazuhide Asai
-
Publication number: 20190035657Abstract: There is provided a configuration that includes a device-status-monitoring controller that stores, in a storage section, device data generated by the apparatus; an analysis-support controller that acquires the device data related to abnormality analysis information from the storage section based on basic information that includes: information that defines an abnormal event, at least one of the device data corresponding to the abnormal event, and step information indicating a step where the at least one of the device data is generated; and recipe-specific information that includes at least a recipe name; and a display device that displays the device data related to the abnormality analysis information in a manner that goes back to a past time from a time when a latest recipe specified by the recipe name is executed.Type: ApplicationFiled: September 28, 2018Publication date: January 31, 2019Applicant: KOKUSAI ELECTRIC CORPORATIONInventors: Kazuhide ASAI, Hidemoto HAYASHIHARA, Kazuyoshi YAMAMOTO, Takayuki KAWAGISHI, Kayoko YASHIKI, Hiroyuki IWAKURA
-
Publication number: 20180210423Abstract: There is provided a configuration that includes a plurality of substrate processing apparatuses and a management device for managing the plurality of substrate processing apparatuses. Upon receiving information specifying a substrate processing apparatus as a reference and file information designating a predetermined device file, the plurality of substrate processing apparatuses transmits request data including first device information and first data information to the management device. Upon receiving the request data, the management device transmits the received request data to the reference substrate processing apparatus. The reference substrate processing apparatus creates response data including second data information responding to the first data information and transmits the created response data to the management device. Upon receiving the response data, the management device transmits the received response data to the plurality of substrate processing apparatuses.Type: ApplicationFiled: March 19, 2018Publication date: July 26, 2018Applicant: HITACHI KOKUSAI ELECTRIC INC.Inventors: Kazuyoshi YAMAMOTO, Osamu UEDA, Kazuhide ASAI
-
Publication number: 20180120822Abstract: There is provided a technique for detecting a fault of a device from an error in device data. According to the technique described herein, there is provided a substrate processing apparatus including: a pipe heater configured to heat a gas pipe; a temperature detecting unit provided at the pipe heater and configured to detect a temperature of the gas pipe; a control unit configured to control the pipe heater based on device data representing the temperature of the gas pipe measured by the temperature detecting unit by executing a process control program to adjust an electrical power applied to the pipe heater; a memory unit configured to store a monitored item table; and a device status monitoring unit configured to execute a device status monitoring program.Type: ApplicationFiled: September 19, 2017Publication date: May 3, 2018Applicant: HITACHI KOKUSAI ELECTRIC INC.Inventors: Kazuhide ASAI, Hiroyuki IWAKURA, Hidemoto HAYASHIHARA, Mitsuru FUKUDA, Kazuyoshi YAMAMOTO, Kayoko YASHIKI, Takayuki KAWAGISHI
-
Publication number: 20170300044Abstract: A substrate processing apparatus includes an operating unit for transmitting apparatus data to a memory, the apparatus data being required while a recipe for processing a substrate is executed; and a data matching unit for comparing the apparatus data stored in the memory. When an error occurs in the substrate processing apparatus, the operating unit transmits data representing the error to the data matching unit. The data matching unit includes: a selection unit for selecting first apparatus data which was acquired when the recipe was executed without an occurrence of the error, and stored in the memory; an acquisition unit for acquiring first and second apparatus data from the memory, the first apparatus data being acquired when an error did not occur and the second apparatus data being acquired when an error occurred; and a calculation unit for comparing the first and second apparatus data and calculating a difference therebetween.Type: ApplicationFiled: March 29, 2017Publication date: October 19, 2017Applicant: HITACHI KOKUSAI ELECTRIC INC.Inventors: Kazuhide ASAI, Kazuyoshi YAMAMOTO, Takayuki KAWAGISHI, Hidemoto HAYASHIHARA, Kayoko YASHIKI, Hiroyuki IWAKURA
-
Publication number: 20170285613Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.Type: ApplicationFiled: March 24, 2017Publication date: October 5, 2017Applicant: HITACHI KOKUSAI ELECTRIC INC.Inventors: Kazuhide ASAI, Kazuyoshi YAMAMOTO, Hidemoto HAYASHIHARA, Takayuki KAWAGISHI, Kayoko YASHIKI, Yukio MIYATA, Hiroyuki IWAKURA, Masanori OKUNO, Kenichi FUJIMOTO, Ryuichi KAJI
-
Patent number: 9581996Abstract: A management device includes a measurement data storage unit configured to store measurement data transmitted from a substrate processing apparatus; a setting unit configured to set an item of the measurement data as a determination target, reference data, and upper and lower limit values with respect to the reference data; a counting unit configured to count the number of times that the value of the measurement data corresponding to the item exceeds the upper and lower limit values; and a determining unit configured to determine that the measurement data as a determination target is abnormal, when the counted number exceeds a predetermined value.Type: GrantFiled: March 29, 2012Date of Patent: February 28, 2017Assignee: HITACHI KOKUSAI ELECRIC INC.Inventors: Kazuhide Asai, Hideto Shimizu, Kayoko Yashiki
-
Patent number: 9400794Abstract: There is provided a group management apparatus connected to a substrate processing apparatus configured to store at least a configuration file, the group management apparatus including a controller configured to: receive a command for generating a file group for the configuration file; receive the configuration file and at least one associated file related to the configuration file from the substrate processing apparatus according to the command for generating the file group; and generate the file group including the configuration file and the associated file received from the substrate processing apparatus and store the file group in a state where an output is possible.Type: GrantFiled: July 17, 2013Date of Patent: July 26, 2016Assignee: Hitachi Kokusai Electric Inc.Inventors: Kazuhide Asai, Osamu Ueda, Hiroyuki Iwakura
-
Publication number: 20160078163Abstract: A management apparatus includes: a manipulation & display unit including a user interface for selecting a reference device information, and configured to display: a difference between the device information obtained from the substrate processing device and the reference device information selected via the user interface; a content of the reference device information; and a content of the device information, and further configured to receive a command for modifying the device information; and a control unit configured to modify the device information based on the command received from the manipulation & display unit and configured to transmit a modified device information to the substrate processing device.Type: ApplicationFiled: November 20, 2015Publication date: March 17, 2016Applicant: HITACHI KOKUSAI ELECTRIC INC.Inventors: Toshiro KOSHIMAKI, Kazuhide ASAI, Hideto SHIMIZU, Kayoko YASHIKI, Kazuyoshi YAMAMOTO, Nobuhisa MAKINO
-
Patent number: 9142436Abstract: A data analyzing method includes receiving monitor data from the substrate processing apparatus; producing representative value data based on the monitor data; associating apparatus condition information indicating a condition of the substrate processing apparatus at the time of production of the monitor data, with the representative value data; storing the representative value data and the apparatus condition information associated with the representative value data and in a database; retrieving the representative value data and the apparatus condition information associated with the representative value data from the database; comparing an exclusion parameter with the retrieved apparatus condition information, the exclusion parameter including information indicating whether the retrieved representative value data should be included in analysis processing targets; and determining whether the retrieved representative value data should be included in the analysis processing targets, based on the comparison resType: GrantFiled: July 1, 2011Date of Patent: September 22, 2015Assignee: HITACHI KOKUSAI ELECTRIC INC.Inventor: Kazuhide Asai
-
Patent number: 8948899Abstract: Provided are a substrate processing apparatus, a display method thereof, and a substrate processing system capable of detecting any change in the condition of each component of a substrate processing apparatus. In the substrate processing system including the substrate processing apparatus for processing a substrate and a group management apparatus connected thereto, the substrate processing apparatus is configured to acquire monitor data representing at least the condition of each component of the substrate processing apparatus, aggregate a plurality of the monitor data to generate package data including at least one of a maximum value, an average value, and a minimum value of the monitor data, and transmit the package data to the group management apparatus. The group management apparatus is configured to receive the package data from the substrate processing apparatus and readably store the same therein.Type: GrantFiled: August 16, 2011Date of Patent: February 3, 2015Assignee: Hitachi Kokusai Electric Inc.Inventor: Kazuhide Asai
-
Patent number: 8719230Abstract: An information managing method for managing information based upon an electronic message containing apparatus information or event information transmitted from a substrate processing apparatus, the information managing method comprising: storing the apparatus information of the substrate processing apparatus at a transmission time of the electronic message in a first apparatus information storage unit; comparing the event information with a condition for accumulating the apparatus information when the electronic message is transmitted; and accumulating the apparatus information in a second apparatus information storage unit by associating the apparatus information with a time stamp of a generation of the event information when the condition is satisfied.Type: GrantFiled: November 6, 2012Date of Patent: May 6, 2014Assignee: Hitachi Kokusai Electric Inc.Inventors: Kazuhide Asai, Hiroyuki Iwakura, Toshiro Koshimaki, Kayoko Yashiki
-
Patent number: 8639367Abstract: Provided is a substrate processing system, which comprises a plurality of substrate processing apparatuses configured to process a substrate; and a group management apparatus configured to connect and manage the plurality of substrate processing apparatuses, wherein the group management apparatus includes: a communication part configured to transmit and receive data to and from the plurality of substrate processing apparatuses; a first storage part configured to store the data transmitted through the communication part from the plurality of substrate processing apparatuses; a second storage part configured to store a file prescribing a condition for determining an abnormality of the plurality of substrate processing apparatuses from the data; a display part including a manipulation screen for inputting the condition for determining the abnormality using the data stored in the first storage part or the file stored in the second storage part; a screen control part configured to control the display part to changType: GrantFiled: September 1, 2010Date of Patent: January 28, 2014Assignee: Hitachi Kokusai Electric Inc.Inventor: Kazuhide Asai
-
Publication number: 20140025677Abstract: There is provided a group management apparatus connected to a substrate processing apparatus configured to store at least a configuration file, the group management apparatus including a controller configured to: receive a command for generating a file group for the configuration file; receive the configuration file and at least one associated file related to the configuration file from the substrate processing apparatus according to the command for generating the file group; and generate the file group including the configuration file and the associated file received from the substrate processing apparatus and store the file group in a state where an output is possible.Type: ApplicationFiled: July 17, 2013Publication date: January 23, 2014Inventors: Kazuhide ASAI, Osamu Ueda, Hiroyuki Iwakura
-
Patent number: 8538571Abstract: A maintenance engineer can analyze an abnormal state with less difficulty in a rapid and correct manner independent of his/her skill. A substrate processing system comprises: a substrate processing apparatus configured to operate according to a recipe defining a process sequence and process conditions, and a group managing apparatus connected to the substrate processing apparatus. The group managing apparatus comprises an analysis support unit. The analysis support unit is configured to extract check item information relating to both abnormal state information for indentifying an abnormal state occurring when the recipe is executed and apparatus type information for identifying the type of the substrate processing apparatus at which the abnormal state occurs, and to prepare a check item table comprising the extracted check item information.Type: GrantFiled: September 17, 2010Date of Patent: September 17, 2013Assignee: Hitachi Kokusai Electric Inc.Inventors: Kazuhide Asai, Hiroyuki Iwakura, Kazuyoshi Yamamoto
-
Patent number: 8447424Abstract: It is intended to provide a substrate processing system and a group management system enabling a more flexible and simplified structure of substrate processing apparatuses.Type: GrantFiled: July 19, 2010Date of Patent: May 21, 2013Assignee: Hitachi Kokusai Electric Inc.Inventors: Kazuhide Asai, Hiroyuki Iwakura