Patents by Inventor Kazuhide Serizawa

Kazuhide Serizawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thermal processing method and thermal processing unit
    Patent number: 7537448
    Abstract: The present invention is a thermal processing method including: a step of conducting a predetermined thermal process in a low temperature zone to a plurality of objects to be processed held in a tier-like manner by a heating unit, in a processing container that is made of metal and has the heating unit therein, and a step of introducing a cooling gas into respective areas in the processing container divided in a height direction of the objects to be processed.
    Type: Grant
    Filed: March 29, 2004
    Date of Patent: May 26, 2009
    Assignee: Tokyo Electron Limited
    Inventors: Takanori Saito, Kazuhide Serizawa, Takashi Ichikawa
  • Thermal processing method and thermal processing unit
    Publication number: 20070095288
    Abstract: The present invention is a thermal processing method including: a step of conducting a predetermined thermal process in a low temperature zone to a plurality of objects to be processed held in a tier-like manner by a heating unit, in a processing container that is made of metal and has the heating unit therein, and a step of introducing a cooling gas into respective areas in the processing container divided in a height direction of the objects to be processed.
    Type: Application
    Filed: March 29, 2004
    Publication date: May 3, 2007
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Takanori Saito, Kazuhide Serizawa, Takashi Ichikawa