Abstract: A heater includes an insulating base, a resistance heating element, and a hollow member. The base includes an upper surface and a lower surface. The resistance heating element extends inside the base along the upper surface and the lower surface. The hollow member includes a first plate-shaped part laid over the lower surface, a second plate-shaped part facing the first plate-shaped part through a space, and a side surface part surrounding the space from an outside in a planar direction of the first plate-shaped part and the second plate-shaped part.

Abstract: A flow path member of the present disclosure includes: a base having a first surface, and further having a first inflow port and a first outflow port; and a flow path that connects to the first inflow port and the first outflow port in an inside of the base. The flow path includes a first flow path that goes along the first surface and a second flow path that intersects the first flow path. The base includes a first projection in the first flow path, and a surface of the first projection is continuous with a wall surface of the second flow path.

Abstract: A ceramic structural body includes a substrate that is composed of a ceramic(s), a hole that is opened on a surface of the substrate, and a seal material that is positioned at an opening portion of the hole.

Abstract: A heater includes an insulating base, a resistance heating element, and a hollow member. The base includes an upper surface and a lower surface. The resistance heating element extends inside the base along the upper surface and the lower surface. The hollow member includes a first plate-shaped part laid over the lower surface, a second plate-shaped part facing the first plate-shaped part through a space, and a side surface part surrounding the space from an outside in a planar direction of the first plate-shaped part and the second plate-shaped part.

Abstract: A heat exchange member includes: a lid portion; a bottom plate portion; a plurality of partition portions disposed so as to connect the lid portion and the bottom plate portion, a part surrounded by the lid portion, the bottom plate portion and the partition portion defining a first flow passage through which a first fluid flows; a curved portion curved toward the first flow passage on a first flow passage side of at least one of the lid portion and the bottom plate portion when viewed in a cross section perpendicular to a direction in which the first fluid flows.

Abstract: A flow path member includes a lid portion, a bottom plate portion, and side walls provided between the lid portion and the bottom plate portion, a flow path in which a fluid flows is configured with the lid portion, the side walls, and the bottom plate portion, a portion of a surface of the side walls on the flow path side includes a coarse portion that is coarser than the other portions.

Abstract: A flow path member may include silicon nitride ceramics. The flow path member may have an inlet port, an outlet port, and a flow path connected to the inlet port and the outlet port inside the flow path member. A plurality of needle-shaped crystals may be arranged on a surface of the flow path where the needle-shaped crystals intersect each other.

Abstract: A flow path member may include silicon nitride ceramics. The flow path member may have an inlet port, an outlet port, and a flow path connected to the inlet port and the outlet port inside the flow path member. A plurality of needle-shaped crystals may be arranged on a surface of the flow path where the needle-shaped crystals intersect each other.

Abstract: A flow path member includes a flow path which has an inlet and an outlet in a base made of ceramics, and a low resistance portion whose surface resistance is less than 1×107 ?/sq in at least a part of the flow path.

Abstract: A flow channel member according to the present invention includes a ceramic substrate, a flow channel inside the ceramic substrate through which a fluid flows, and multiple protrusions on an outer surface of the substrate.

Abstract: The heat exchanger is provided with: a plurality of first members including walls that have introduction holes on a first end side and discharge holes on a second end side, with spaces connecting the introduction holes and the discharge holes serving as first channels through which fluid flows; second members that communicate with the introduction holes at the first end side of the plurality of first members to introduce the first fluid to the first members; and third members that communicate with the discharge holes at the second end side of the plurality of first members to discharge the first fluid that has flowed through the first members. In at least one adjacent pair of the introduction holes, regions that overlap with opening regions of the upstream-side introduction holes exist in the walls including the downstream-side introduction holes, when viewed in a direction in which the first fluid flows.

Abstract: [Object] Provided are a flow channel member having high heat-exchange efficiency in addition to high corrosion resistance and high mechanical characteristics, a heat exchanger including the flow channel member, and a semiconductor module including the flow channel member. [Solution] A flow channel member 10 according to the present invention includes a ceramic substrate 1, a flow channel 3 inside the ceramic substrate 1 through which a fluid flows, and multiple protrusions 2 on an outer surface of the substrate 1. The flow channel member 10 according to the present invention having such a configuration has high heat-exchange efficiency in addition to high corrosion resistance and high mechanical characteristics.

Abstract: A heat exchange member includes: a lid portion; a bottom plate portion; a plurality of partition portions disposed so as to connect the lid portion and the bottom plate portion, a part surrounded by the lid portion, the bottom plate portion and the partition portion defining a first flow passage through which a first fluid flows; a curved portion curved toward the first flow passage on a first flow passage side of at least one of the lid portion and the bottom plate portion when viewed in a cross section perpendicular to a direction in which the first fluid flows.

Abstract: Channel members 100 to 107 according to the present invention have an inner spiral channel 9 through which a fluid 23 flows. The channel 9 is formed by a lid part 1, a bottom plate part 3, and a wall part 2 connected to the lid part 1 and the bottom plate part 3. The wall part 2 is made of a ceramic laminate. Even if the wall part 2 of the channel members 100 to 107 is narrow between channel segments 9, its good corrosion resistance allows the channel 9 to be resistant to collapse when the fluid 23 is supplied at high pressure. A heat exchanger 200, a semiconductor unit 300, and a semiconductor manufacturing apparatus 400 including any of the channel members 100 to 107 have improved heat exchange efficiency between the channel members 100 to 107 and the fluid 23.

Abstract: There is provided a flow path member including: a first wall section; a second wall section; and a third wall section that is provided between the first wall section and the second wall section. An internal section that is configured by the first wall section, the second wall section, and the third wall section becomes a flow path through which a fluid flows and a plurality of flow path openings of the flow path are arranged in one direction on a cut plane obtained by cutting from the first wall section to the second wall section. Furthermore, one of two adjacent flow path openings is disposed to be more displaced than the other either toward the first wall section side or toward the second wall section side.

Abstract: A flow path member includes a lid portion, a bottom plate portion, and side walls provided between the lid portion and the bottom plate portion, a flow path in which a fluid flows is configured with the lid portion, the side walls, and the bottom plate portion, a portion of a surface of the side walls on the flow path side includes a coarse portion that is coarser than the other portions.

Abstract: A flow path member includes a flow path which has an inlet and an outlet in a base made of ceramics, and a low resistance portion whose surface resistance is less than 1×107 ?/sq in at least a part of the flow path.

Abstract: Channel members 100 to 107 according to the present invention have an inner spiral channel 9 through which a fluid 23 flows. The channel 9 is formed by a lid part 1, a bottom plate part 3, and a wall part 2 connected to the lid part 1 and the bottom plate part 3. The wall part 2 is made of a ceramic laminate. Even if the wall part 2 of the channel members 100 to 107 is narrow between channel segments 9, its good corrosion resistance allows the channel 9 to be resistant to collapse when the fluid 23 is supplied at high pressure. A heat exchanger 200, a semiconductor unit 300, and a semiconductor manufacturing apparatus 400 including any of the channel members 100 to 107 have improved heat exchange efficiency between the channel members 100 to 107 and the fluid 23.

Abstract: There is provided a flow channel member which is configured by laminating a plurality of side wall units and inside which a flow channel is provided, wherein occurrence of joint failure of the side wall units are reduced. A flow channel member includes a cover unit, a side wall unit, and a bottom plate unit, wherein a flow channel through which a fluid flows is provided inside the flow channel member, and a gap which communicates with the flow channel is provided between the cover unit and the side wall unit. According to the flow channel member, since the gap which communicates with the flow channel is located between the cover unit and the side wall unit, a contact area between the flow channel and the fluid increases, and thus heat exchange efficiency with the cover unit may be increased.