Abstract: A thin film formation apparatus includes a vacuum chamber, a target holding mount held movably in the vacuum chamber, a target containing a film material, an ArF excimer laser for emitting high energy radiation to a surface of the target, an optical system for concentrating the radiation from the excimer laser to the surface of the target, a substrate holding mount holding the substrate, an oxidizing gas inlet for supplying an oxidizing gas into the vacuum chamber for oxidizing a substance deposited on the substrate, a heater placed inside the substrate holding mount for heating the substrate in the vacuum chamber, and a light for irradiating the substrate held on the substrate holding mount with light rays.

Abstract: An infrared detecting capacitor formed of a ferroelectric film has its capacitor portion supported by first and second interconnecting lines to be held on an Si substrate located on both sides of a trench. A lower electrode is coupled with the first interconnecting line while an upper electrode is coupled with the second interconnecting line. The capacitor portion is a rectangle in shape in plan view without small triangular sections opposite to each other in the diagonal direction.

Abstract: A positive resist composition comprising a binder resin and a radiation-sensitive compound, wherein the binder resin contains a polymerization unit of the following formula (I) and a polymerization unit of the following formula (II) and becomes alkali-soluble by the radiation-sensitive compound after irradiation with radioactive ray: 1

Abstract: A state information acquisition system has

Abstract: A chemical amplifying type positive resist composition is provided which is excellent in transmittance for the wavelength of F2 excimer light. Therefore, it is suitable for fine processing of a semiconductor using F2 excimer laser; and comprises an acid generating agent and a resin which contains a polymerization unit derived from an alicyclic hydrocarbon having a polymerizable carbon-carbon double bond in the ring and a polymerization unit derived from (meth)acrylonitrile, and which itself is insoluble or slightly soluble in an alkali but becomes alkali-soluble due to the action of an acid.

Abstract: A positive resist composition comprising, in admixture, an alkali-soluble resin, a quinone diazide compound and a mixed solvent of (B) at least one organic solvent selected from the group consisting of &ggr;-butyrolactone, 3-methoxybutanol and cyclohexanone and (A) an organic solvent other than the solvents (B) which does not have simultaneously an alkylcarbonyl group and an alkoxy group in a molecule and has a boiling point of from 140 to 180° C. under atmospheric pressure (B), which composition has a large &ggr;-value and provides an improved profile and a large depth of focus.

Abstract: A resist composition comprising a binder resin and a radiation-sensitive compound.

Abstract: An infrared detecting capacitor formed of a ferroelectric film has its capacitor portion supported by first and second interconnecting lines to be held on an Si substrate located on both sides of a trench. A lower electrode is coupled with the first interconnecting line while an upper electrode is coupled with the second interconnecting line. The capacitor portion is a rectangle in shape in plan view without small triangular sections opposite to each other in the diagonal direction.

Abstract: A thin film formation apparatus includes a vacuum chamber, a target holding mount held movably in the vacuum chamber, a target containing a film material, an ArF excimer laser for emitting high energy radiation to a surface of the target, an optical system for concentrating the radiation from the excimer laser to the surface of the target, a substrate holding mount holding the substrate, an oxidizing gas inlet for supplying an oxidizing gas into the vacuum chamber for oxidizing a substance deposited on the substrate, a heater placed inside the substrate holding mount for heating the substrate in the vacuum chamber, and a light for irradiating the substrate held on the substrate holding mount with light rays.

Abstract: There is provided a resist composition containing a photosensitive resin and used in photolithography, said photosensitive resin having a transmittance of 40% or more for a light having a wavelength of 157 nm in applying to a thickness of 0.1 &mgr;m. The composition has a characteristic that it allows easy formation of a fine pattern having a good profile, particularly at a wavelength for exposure with an F2 excimer laser.

Abstract: A thermal type infrared sensing device has; a plurality of light-receiving electrodes for outputting a change of surface charge associated with a polarization that occurs in a dielectric when subjected to infrared radiation; and a plurality of compensation electrodes, corresponding one for one to plurality of light-receiving electrodes, for compensating the outputs of corresponding light-receiving electrodes, and wherein plurality of compensation electrodes are formed on a different substrate from a substrate on which plurality of light-receiving electrodes are formed.

Abstract: An in-bed state detection system includes: a load detection section for detecting a load applied to a bed and providing a corresponding load signal; a determination section for determining an in-bed state based on the load signal; and a transmission section for transmitting a result of the determination.

Abstract: A movement pattern recognizing apparatus has a movement signal detection device including a sensor for detecting a mobile body in a detection region and for providing a movement signal indicating the position of the mobile body. The signal changes as time elapses. The apparatus further has a movement pattern storage device for storing data about previous movement patterns which were realized when a mobile body moved in the detection region, and a movement pattern selection device for selecting data about the movement pattern from the movement pattern storage device based upon the movement signal detected by the movement signal detection device.

Abstract: A thermal object detecting method for; obtaining a thermal image of a measuring space by two-dimensional thermal image detecting method for detecting two-dimensional thermal image information, obtaining position information of an object in the measuring space by object position detecting device, obtaining distance data between said two-dimensional thermal image detecting device and said object from the position information, and correcting the temperature level of the object in the thermal image in the measuring space or correcting the size of the object in the thermal image in said measuring space, using the distance data from the object as correction factor.

Abstract: On a semiconductor substrate, chips to be products and alignment chips located at a portion a part thereof is left out from a peripheral part of the semiconductor substrate are formed. Contact holes and alignment marks are formed at the chips to be products and the alignment chips. Covering the alignment chips with alignment mark cover parts of a substrate holder, a material for metal wiring is deposited on the semiconductor substrate to form a metal film on the substrate. A mask pattern is formed on the metal film using the alignment marks of the alignment chips on which the metal film is not formed.

Abstract: A thermal object detecting method and apparatus. According to the method and apparatus, a thermal image of a measuring space is obtained by a two-dimensional thermal image detecting device. Then, position information of an object in the measuring space is obtained by an object distance detecting device, which determines a distance between the apparatus and the object. The output of the two-dimensional thermal image detecting device can be corrected using the distance data from the object distance detecting device.

Abstract: A plurality of rows are provided on a calling of sensors and each have a plurality of distance variation measuring sensors. The distance variation measuring sensors each include a light emitter and a light receiver arranged in the orthogonal direction to the direction in which human bodies pass. The number of passers is detected on the basis of the number of the distance variation measuring sensors which have detected a human body. The traveling direction of human bodies is detected on the basis of the change in the distance to the distance variation measuring human bodies measured by the sensors.

Abstract: A positive resist composition sensitive to radiations such as ultraviolet rays, far ultraviolet rays, which comprises;an o-quinonediazide compound; anda novolac resin(1) obtained by allowing an aromatic aldehyde of the formula(I) ##STR1## wherein R.sub.4 to R.sub.6 represents hydrogen, alkyl, cycloalkyl, alkoxy, alkenyl or aryl, k'0 represents an integer not smaller than 0 and p represents 1, 2 or 3, to react with a phenol compound of the formula (II) ##STR2## wherein R.sub.7 to R.sub.9 represents hydrogen, hydroxy, alkyl, cycloalkyl, alkoxy, alkenyl or aryl, provided that at least one of R.sub.7 to R.sub.9 is cycloalkyl having 6 or less carbon atoms, in the presence of an acid catalyst to obtain a reaction product(1) containing low molecular weight ingredients;and, then, allowing the reaction product(1) to further react with a phenol compound(1) and formaldehyde.

Abstract: The present invention provides a positive photoresist composition comprising a 1,2-naphthoquinonediazide compound and a novolac resin obtained through a condensation reaction between an aldehyde compound and a phenol compound represented by the following general formula (I): ##STR1## wherein R.sub.5, R.sub.6 and R.sub.7 each independently represents hydrogen atom, hydroxyl group or alkyl, cycloalkyl, alkoxy or alkenyl group having 6 or less carbon atoms or aryl group, provided that at least one of R.sub.5, R.sub.6 and R.sub.7 represents a cycloalkyl group having 6 or less carbon atoms. The composition of the present invention is excellent in the balance between properties such as sensitivity, resolution, heat resistance, profile, depth of focus, etc. and free from scum.

Abstract: A warm object detector that includes an infrared object detector and an ultrasonic object detector. A thermal image signal processor obtains thermal object information representative of a warm object in an area by processing signals from the infrared object detector. An ultrasonic processor obtains ultrasonic object information representative of an object in an area by processing signals generated by the ultrasonic object detector. Then a new object determining device determines the presence of a new object in the area by comparing ultrasonic object information supplied from the ultrasonic image signal processor at a prior time with ultrasonic object information being currently supplied by the ultrasonic image signal processor. The new object determining device provides output information representative of a determined new object.